公开(公告)号：WO2009048526A1

公开(公告)日：2009-04-16

申请号：PCT/US2008/011420

申请日：2008-10-02

Applicant: EASTMAN KODAK COMPANY ,  BORDER, John Norvold ,  ERHARDT, Herbert, James ,  LEE, Kelly ,  KOWARZ, Marek, Wlodzimierz ,  BOYSEL, Robert, Mark

Inventor： BORDER, John Norvold ,  ERHARDT, Herbert, James ,  LEE, Kelly ,  KOWARZ, Marek, Wlodzimierz ,  BOYSEL, Robert, Mark

IPC: G02B26/02 ,  B81B3/00

CPC classification number: B81B7/04 ,  B81B2201/045 ,  G02B26/02 ,  G02B26/0841

Abstract: A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

Abstract translation: 微型扫描器阵列具有具有透光部分的框架。 线性微型振荡器元件延伸穿过光透射部分并且彼此平行。 每个微型振动元件具有在长度方向上延伸的平坦叶片，并且第一和第二扭转臂在长度方向上从叶片的每侧向外延伸，叶片延伸穿过透光部分。 至少有一个电极与每个线性微型切割器元件相关联并且在长度方向上平行于微型振动器元件延伸。

公开(公告)号：WO2006057797A2

公开(公告)日：2006-06-01

申请号：PCT/US2005/040198

申请日：2005-11-03

Applicant: INTEL CORPORATION ,  CHEE, Choong, Kooi

Inventor： CHEE, Choong, Kooi

IPC: H01H37/00 ,  F16K1/00 ,  G02B26/08 ,  B81B5/00 ,  A61M5/00 ,  C09J133/00 ,  C09J135/00

CPC classification number: B81B3/0024 ,  A61M5/16881 ,  A61M5/1723 ,  A61M2205/0266 ,  B81B2201/018 ,  B81B2201/045 ,  B81B2201/054 ,  H01H2037/008 ,  Y10T137/8242

Abstract: Briefly, in accordance with one embodiment of the invention, a switch structure or the like such as a valve, motor, or optical switch, may be constructed based on a thermoresponsive polymer. At a first temperature the thermoresponsive polymer may be in a first volume state, and at a second temperate the thermoresponsive polymer may be in a second volume state. The change in volume of the thermoresponsive polymer may be operative to push or pull the mechanical structures of the switch, valve, motor, optical switch, and so on, to effectuate operation of the structures.

Abstract translation: 简而言之，根据本发明的一个实施例，可以基于热能聚合物构建诸如阀，电动机或光开关的开关结构等。 在第一温度下，热可聚合物可以处于第一体积状态，并且在第二温度下，热可聚合物可以处于第二体积状态。 热反应聚合物的体积变化可以用于推动或拉动开关，阀门，电机，光学开关等的机械结构，以实现结构的操作。

公开(公告)号：WO2004072705A1

公开(公告)日：2004-08-26

申请号：PCT/US2003/035890

申请日：2003-11-12

Applicant: NORTHROP GRUMMAN CORPORATION

Inventor： STEWART, Robert, E. ,  CHERBETTCHIAN, Agop, H. ,  FERSHT, Samuel ,  HALL, David, B.

IPC: G02B6/35

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/053 ,  G02B6/3512 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3576 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/0866 ,  H01H2001/0042

Abstract: A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.

Abstract translation: 双稳态微致动器由在电接触层处熔合在一起的第一和第二绝缘体上硅晶片形成。 具有V形槽的盖子定义了光轴。 V沟槽中的准直光信号源将光信号耦合到V沟槽中的光端口。 转印部件上的镜面阻挡或反射光信号。 传送构件在第一和第二端具有支撑点。 可膨胀结构沿着压缩轴线在转移构件的第一和第二支撑点之间施加压缩力，以将转移构件保持在弯曲的第一状态或弓形的第二状态。 施加到可膨胀结构中的加热元件的控制信号减小了压缩力，将转印构件切换到第二状态。

公开(公告)号：WO2004001481A1

公开(公告)日：2003-12-31

申请号：PCT/JP2002/006229

申请日：2002-06-21

Applicant: 富士通株式会社 ,  竹内 真一 ,  山本 毅

Inventor： 竹内 真一 ,  山本 毅

IPC: G02B26/08

CPC classification number: G02B26/0833 ,  B81B3/004 ,  B81B7/0003 ,  B81B2201/045 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/3566 ,  G02B6/3584

Abstract: マイクロミラーユニットを、基板３上に、光を反射するマイクロミラー１と、このマイクロミラー１を支持するトーションバー２と、このトーションバー２を回動可能に支持するフレーム部８と、自己の変形によりフレーム部８を基板３から離隔する方向へ持ち上げて支持する変形支持部９とをそなえた構造とする。これにより、犠牲層４の厚さを厚くすることなくマイクロミラー１と基板３との間隔を広げて、ミラー振れ角を大きくすることができる。

Abstract translation: 一种微镜单元，包括：设置在所述基板（3）上的微镜反射光，支撑所述微反射镜的扭杆，可旋转地支撑所述扭力杆的框架部分，以及使所述框架部分沿所述分离方向提升的部分（9） （3）并支撑框架部分。 根据该结构，可以在不增加牺牲层（4）的厚度的情况下扩大微反射镜和基板（3）之间的间隔，并且可以增加偏转角。

公开(公告)号：WO2003055788A1

公开(公告)日：2003-07-10

申请号：PCT/JP2002/013127

申请日：2002-12-16

Applicant: ソニー株式会社 ,  池田 浩一

Inventor： 池田 浩一

IPC: B81B3/00

CPC classification number: B81C1/0015 ,  B81B2201/045 ,  B81B2203/04 ,  B81C2201/0109 ,  B81C2201/0173 ,  B81C2203/0109 ,  G02B26/0841

Abstract: An electrostatic MEMS element for flattening a drive side electrode surface and improving its performance as well as for improving degree of design freedom in a manufacturing process. A manufacturing method of the electrostatic MEMS element is also disclosed. Moreover, a GLV device using the MEMS element and a laser display using the GLV device are also disclosed. The electrostatic MEMS element includes a substrate side electrode and a beam having a drive side electrode driven by an electrostatic attracting force or electrostatic repulsive force functioning between the substrate side electrode and the drive side electrode. The substrate side electrode is formed in a conductive semiconductor region having impurities in the semiconductor substrate so as to constitute an electrostatic drive MEMS element.

Abstract translation: 一种静电MEMS元件，用于使驱动侧电极表面平坦化并提高其性能，并提高制造过程中的设计自由度。 还公开了静电MEMS元件的制造方法。 此外，还公开了使用MEMS元件的GLV器件和使用GLV器件的激光显示器。 静电MEMS元件包括基板侧电极和具有通过在基板侧电极和驱动侧电极之间起作用的静电吸引力或静电排斥力驱动的驱动侧电极的光束。 衬底侧电极形成在半导体衬底中具有杂质的导电半导体区域中，以构成静电驱动MEMS元件。

公开(公告)号：WO2003053843A2

公开(公告)日：2003-07-03

申请号：PCT/US2002/039610

申请日：2002-12-11

Applicant: CORNING INTELLISENSE CORPORATION

Inventor： BERNSTEIN, Jonathan, Jay ,  TAYLOR, William, Patrick

IPC: B81B3/00

CPC classification number: H01H1/0036 ,  B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118 ,  C23C14/165 ,  H01H1/023 ,  H01H2001/0057 ,  Y10T428/12597

Abstract: A microelectromechanical device, comprizing: at least one flexible member formed from an alloy comprising: one or more noble metals selected from the group consisting of gold, platinum and palladium; and one or more alloying elements, the elements selected from iridium, ruthenium, rhodium, palladium, gold, tungsten, osmium and nickel, wherein the one or more alloying elements form a solid solution with the one or more noble metals and wherein the one or more alloying elements are present in an amount sufficient to provide at least one performance characteristic at least 50% greater than the noble metal alone, said performance characteristic selected from the group consisting of yield srength, tensile strength and hardness.

Abstract translation: 一种微机电装置，其包括：至少一个柔性构件，所述柔性构件由合金形成，所述合金包含：选自由金，铂和钯组成的组中的一种或多种贵金属; 和一种或多种合金元素，所述元素选自铱，钌，铑，钯，金，钨，锇和镍，其中所述一种或多种合金元素与所述一种或多种贵金属形成固溶体，并且其中所述一种或多种合金元素 更多合金元素的存在量足以提供比单独贵金属大至少50％的至少一个性能特征，所述性能特征选自屈服强度，拉伸强度和硬度。

公开(公告)号：WO0250874A3

公开(公告)日：2003-02-06

申请号：PCT/US0149427

申请日：2001-12-19

Applicant: COVENTOR INC ,  CUNNINGHAM SHAWN J ,  DEREUS DANA R

Inventor： CUNNINGHAM SHAWN J ,  DEREUS DANA R

IPC: B81B3/00 ,  B81B7/00 ,  B81B7/04 ,  B81C1/00 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  G02B26/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: MEMS device (300) having an actuator (302, 306) with curved electrodes (308, 310). According to one embodiment of the present invention, an actuator is provided for moving an actuating device linearly. The actuator includes a substrate (304) having a planar surface and an actuating device movable in a linear direction relative to the substrate. The actuator includes at least one electrode beam (312, 314) attached to the actuating device and having an end attached to the substrate (304). The electrode beam is flexible (322, 324) between the actuating device and the end of the electrode beam attached to the substrate. Furthermore, the actuator includes at least one electrode (308, 310) attached to the substrate. The electrode (308, 310) has a curved surface aligned in a position adjacent the length of the electrode beam, whereby the actuating device is movable in its substantially linear direction as the electrode beam (312, 314) moves in a curved fashion corresponding substantially to the curved surface of the electrode.

Abstract translation: MEMS器件（300）具有带有弯曲电极（308,310）的致动器（302,306）。 根据本发明的一个实施例，提供了用于使致动装置线性移动的致动器。 致动器包括具有平坦表面的基板（304）和可相对于基板沿线性方向移动的致动装置。 致动器包括附接到致动装置的至少一个电极梁（312,314），并且具有连接到基板（304）的一端。 电极束在致动装置和连接到基底的电极束的端部之间是柔性的（322,324）。 此外，致动器包括附接到基板的至少一个电极（308,310）。 电极（308,310）具有在与电极束的长度相邻的位置对准的弯曲表面，由此当电极束（312,314）以基本相当的弯曲方式移动时，致动装置可在其基本上线性的方向上移动 到电极的弯曲表面。

公开(公告)号：WO02079814A2

公开(公告)日：2002-10-10

申请号：PCT/US0149428

申请日：2001-12-19

Applicant: COVENTOR INC ,  CUNNINGHAM SHAWN J ,  TATIC-LUCIC SVETLANA ,  DEREUS DANA R

Inventor： CUNNINGHAM SHAWN J ,  TATIC-LUCIC SVETLANA ,  DEREUS DANA R

IPC: B81B3/00 ,  B81B7/00 ,  B81B7/04 ,  B81C1/00 ,  G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  G02B

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device is fabricated by micromachining a substrate (10) that has an antireflective coating (12A, 12B) on at least one surface. The micromachining process creates a microstructure that is movable and capable of interacting with an optical signal that is propagating through the substrate. A metal layer (14) is patterned to provide an electrical contact as means of actuating the movable microstructure. Also described is a method in which two substrate are bonded together form the optical MEMS device. Prior to the bonding of the two substrates, one substrate has an antireflective coating while the other substrate contains the movable microstructure.

Abstract translation: 通过在至少一个表面上微加工具有抗反射涂层（12A，12B）的衬底（10）来制造光学MEMS器件。 微加工工艺产生可移动并且能够与正在传播通过衬底的光信号相互作用的微结构。 金属层（14）被图案化以提供电接触作为致动可移动微结构的手段。 还描述了一种将两个基板结合在一起形成光学MEMS器件的方法。 在两个基板的接合之前，一个基板具有抗反射涂层，而另一个基板包含可移动微结构。

公开(公告)号：WO2002061486A1

公开(公告)日：2002-08-08

申请号：PCT/US2001/049429

申请日：2001-12-19

Applicant: COVENTOR, INCORPORATED ,  CUNNINGHAM, Shawn, J. ,  TATIC-LUCIC, Svetlana ,  DEREUS, Dana, R.

Inventor： CUNNINGHAM, Shawn, J. ,  TATIC-LUCIC, Svetlana ,  DEREUS, Dana, R.

IPC: G02B26/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device is fabricated by forming an aperture (20) through the thickness of a first substrate (10) to enable an optical signal to be transmitted through the aperture (20). A movable, actuatable microstructure is formed on a second substrate (30). The second substrate (30) is bonded to the first substrate (10). The first and second substrates (10, 30) are aligned to enable the microstructure to interact with the optical signal upon actuation of the microstructure. A conductive element (25A) is formed on the first substrate (10) to serve as a contact or an interconnect. A channel (43) is formed in the second substrate (30). An insulating layer (57A) can be deposited on the inside surfaces of this channel (43). When the first and second substrates (10, 30) are bonded together, the conductive element (25A) formed on the first substrate (10) is disposed within the channel (43) and is isolated from conductive regions of the resulting optical MEMS device. In another method, an optical MEMS device is fabricated from a substrate (200) that comprises an etch-stop layer (200C) interposed between first and second bulk layers (200A, 200B). The movable, actuatable microstructure is formed into the first bulk layer (200A), and the aperture (230) is formed through the second bulk layer (200B).

Abstract translation: 通过形成通过第一基板（10）的厚度的孔（20）来制造光学MEMS器件，以使光信号能够透过孔（20）。 在第二基板（30）上形成可移动的致动微结构。 第二基板（30）接合到第一基板（10）。 对准第一和第二基板（10,30），以使得微结构在致动微结构时与光信号相互作用。 导电元件（25A）形成在第一基板（10）上以用作接触件或互连件。 在第二基板（30）中形成通道（43）。 绝缘层（57A）可以沉积在该通道（43）的内表面上。 当第一和第二基板（10,30）接合在一起时，形成在第一基板（10）上的导电元件（25A）设置在通道（43）内，并与所得到的光学MEMS器件的导电区域隔离。 在另一种方法中，光学MEMS器件由衬底（200）制成，衬底（200）包括介于第一和第二体层（200A，200B）之间的蚀刻停止层（200C）。 可移动可致动的微结构形成为第一体层（200A），并且孔（230）穿过第二体层（200B）形成。

公开(公告)号：WO0194253A3

公开(公告)日：2002-04-04

申请号：PCT/US0117020

申请日：2001-05-24

Applicant: CALIENT NETWORKS INC

Inventor： CHONG JOHN MATTHEW

IPC: B81B3/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/02

CPC classification number: G02B6/3584 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/033 ,  B81C1/00182 ,  B81C1/00666 ,  B81C2201/0109 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B26/0841

Abstract: A method for forming a suspend structure with thin film flexible elements is disclosed. In one embodiment, the method etches a trench in a bulk substrate around to be released components. The trench is filled with sacrificial material. The surface of the sacrificial material is planarized. Thin film hinge material is patterned and etched on the surface of the sacrificial material. The bulk substrate is then etched from the backside to pre-release the sacrificial material. The sacrificial material is etched to remove the sacrificial material, thus forming a suspended structure with thin film hinges.

Abstract translation: 公开了一种用薄膜柔性元件形成悬挂结构的方法。 在一个实施例中，该方法蚀刻大块衬底中的沟槽以被释放的部件。 沟槽填充有牺牲材料。 牺牲材料的表面被平坦化。 在牺牲材料的表面上对薄膜铰链材料进行图案化和蚀刻。 然后从背面蚀刻大块衬底以预先释放牺牲材料。 牺牲材料被蚀刻以去除牺牲材料，从而形成具有薄膜铰链的悬挂结构。