Abstract:
Analytical radiation from a source 10 enters a Michelson-type interferometer including a beam splitter 13 and a movable reflecting member 17. Quadrature phase discrimination is employed to provide signals indicative of the position and direction of movement of a portion of member 17 within the analytical radiation path, using a beam from laser 25 directed onto beam splitter 13 and, after reflection by fixed mirror 15 (via retardation plate 27) and movable mirror 17, passed coaxially with beam 11 to detector 28. Multiple quadrature phase discrimination systems may be employed to indicate of the position and direction of movement of three portions of a flat reflecting member. One portion may be within the analytical radiation path. An initial reference indicative of the position of the movable reflecting member independently of the beam splitter and an additional quadrature phase discrimination system may be provided. The reference system may provide redundantly an indication of position and direction of movement of member 17.
Abstract:
State-of-the-art portable Raman spectrometers use discrete free-space optical components that must be aligned well and that don't tolerate vibrations well. Conversely, the inventive spectrometers are made with monolithic photonic integration to fabricate some or all optical components on one or more planar substrates. Photonic integration enables dense integration of components, eliminates manual alignment and individual component assembly, and yields superior mechanical stability and resistance to shock or vibration. These features make inventive spectrometers especially suitable for use in high-performance portable or wearable sensors. They also yield significant performance advantages, including a large (e.g., 10,000-fold) increase in Raman scattering efficiency resulting from on-chip interaction of the tightly localized optical mode and the analyte and a large enhancement in spectral resolution and sensitivity resulting from the integration of an on-chip Fourier-transform spectrometer.
Abstract:
A device and method for expediting spectral measurement in metrological activities during semiconductor device fabrication through interferometric spectroscopy of white light illumination during calibration, overlay, and recipe creation.
Abstract:
A device and method for tracking optics for a spectrometer, is disclosed. A plurality of tracking mirrors track a position of a light source relative to the tracking optics, receive light from the light source, and emit reflected light. A reflecting diffuser is configured to receive reflected light from the mirrors and diffuse and reflect the received light toward the spectrometer. A camera is configured to record an image of the light source on the diffuser surface, and a tracking mechanism is configured to adjust the position of one or more of the tracking mirrors according to the image of the light source in the recorded image.
Abstract:
Coherent spectroscopic methods are described, to measure the total phase difference during an extended interrogation interval between the signal delivered by a local oscillator (10) and that given by a quantum system (QS). According to one or more embodiments, the method may comprise reading out at the end of successive interrogation sub-intervals (Ti) intermediate error signals corresponding to the approximate phase difference (φ) between the phase of the LO signal and that of the quantum system, using coherence preserving measurements; shifting at the end of each interrogation sub-intervals (Ti) the phase of the local oscillator signal, by a known correction value ( φ (i) FB ) so as to avoid that the phase difference approaches the limit of the inversion region; reading out a final phase difference (φf) between the phase of the prestabilized oscillator signal and that of the quantum system using a precise measurement with no restriction on the destruction; reconstructing a total phase difference over the extended interrogation interval, as the sum of the final phase difference (φf) and the opposite of all the applied phase corrections figure (I).
Abstract:
In a system for analyzing optical properties of an object (350) a point source of light (100) composed of multiple spectral bands each having a respective amplitude, phase and polarization is converted by first optics (120, 150) into a line light source to illuminate an object line on the object. A beam splitter (200) splits the light exiting the first optics and directs a first portion of light on to the object (350) as an illuminated line and a second portion of the light on to a reference mirror (450). Second optics (500) collects respective first and second lines of light reflected by the object and mirror of and collinearly images the reflected lines of light as an image line on to an imaging spectrometer (550) wherein mutual interference allows determination of the optical properties of the object at each point along the object line.
Abstract:
Examples herein include apparatus and techniques that can be used to perform rotational spectroscopy on gas-phase samples. Such techniques can include using a spectrometer providing frequency synthesis and pulse modulation to provide excitation (e.g., pump or probe pulses) of a gas-phase sample at mm-wave frequencies. Synthesis of such mm-wave frequencies can include use of a frequency multiplier, such as an active multiplier chain (AMC). A free induction decay (FID) elicited by the excitation or other time-domain information can be obtained from the sample, such as down-converted and digitized. A frequency domain representation of the digitized information, such as a Fourier transformed representation, can be used to provide a rotational spectrum.