公开(公告)号：US20030134449A1

公开(公告)日：2003-07-17

申请号：US10338561

申请日：2003-01-07

Applicant: REFLECTIVITY, INC., a California Corporation

Inventor： Andrew G. Huibers

IPC: H01L021/00

CPC classification number: B81C3/002

Abstract: A method for making a MEMS device comprises forming a plurality of micromechanical elements on a first substrate; forming circuitry and electrodes on a second substrate, the first and second substrates extending in a plane in X and Y directions; aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; singulating the assembly into assembly portions; and altering the gap for each assembly portion. Another embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; actuating and testing the micromechanical elements of the assembly; and altering the gap for each assembly. A further embodiment involves aligning the first and second substrates in the X and Y directions and moving the substrates toward each other in a Z direction and bonding the first and second substrates with a gap therebetween in the Z direction to form an assembly; wherein the micromechanical elements are actuated while bonding of the substrates.

Abstract translation: 制造MEMS器件的方法包括在第一衬底上形成多个微机械元件; 在第二基板上形成电路和电极，所述第一和第二基板在X和Y方向上的平面中延伸; 使第一和第二基板沿X方向和Y方向对齐，并且沿Z方向彼此移动基板，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 将组件分成组装部分; 并改变每个组装部分的间隙。 另一实施例涉及使第一和第二基板沿X方向和Y方向对准，并使基板沿Z方向彼此相对移动，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 启动和测试组件的微机械元件; 并改变每个装配的间隙。 另一实施例涉及在第一和第二基板之间沿X方向和Y方向对准并沿Z方向彼此移动基板，并且在Z方向上将第一和第二基板之间的间隙接合以形成组件; 其中所述微机械元件在所述基板的接合的同时被致动。

公开(公告)号：US20020176150A1

公开(公告)日：2002-11-28

申请号：US10153138

申请日：2002-05-20

Applicant: REFLECTIVITY, INC.

Inventor： Andrew G. Huibers

IPC: G02B026/00

CPC classification number: G02B26/0833 ,  G02B26/08 ,  G02B26/0841 ,  Y10S359/904

Abstract: A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.

Abstract translation: 空间光调制器包括保持在包含寻址电路的下基板上的上透光基板。 一个或多个静电可偏转元件通过铰链从上基板悬挂。 在操作中，单独的反射镜被选择性地偏转并且用于空间调制入射到上基板上并随后被上反射回的光。 运动止挡件可以附接到反射偏转元件，使得反射镜不卡扣到底部基板。 相反，运动停止件靠在上基板上，从而限制反射可偏转元件的偏转角。

公开(公告)号：US20020109821A1

公开(公告)日：2002-08-15

申请号：US10052012

申请日：2002-01-16

Applicant: REFLECTIVITY, INC., a California Corporation

Inventor： Andrew G. Huibers ,  Peter W. Richards

IPC: G03B021/14

CPC classification number: H04N9/3114 ,  G02B26/008 ,  G02B26/023

Abstract: A projection system is disclosed that has a light source of multiple wavelengths, a spatial light modulator and projection optics for projecting an image to be viewed by a viewer or to be displayed on a target. Also provided are one or more color sequencing devices which filter the light multiple times. Whether a single or plural color sequencing elements are provided, a single light beam passes at least twice through a sequence of light filters. In one embodiment, two color wheels provide the ability to filter the light multiple times. By changing the physical position or phase of one series of filters relative to another, the brightness and color saturation of the image projected through the projection optics can be changed. The changes in brightness and color saturation can be performed manually by mechanically changing the phase (or position) of the color sequencing device(s) relative to the light beam. Such changes can be performed step-wise of gradually through a continuum of brightness vs. color saturation points.

Abstract translation: 公开了具有多个波长的光源的投影系统，空间光调制器和用于投影由观看者观看或要显示在目标上的图像的投影光学器件。 还提供了一种或多种多次过滤光的颜色排序装置。 是否提供单个或多个颜色排序元件，单个光束通过一系列滤光器至少通过两次。 在一个实施例中，两个色轮提供多次过滤光的能力。 通过改变一系列滤光镜相对于另一系列的物理位置或相位，可以改变通过投影光学器件投影的图像的亮度和色彩饱和度。 亮度和色彩饱和度的变化可以通过机械地改变颜色排序装置相对于光束的相位（或位置）来手动执行。 这样的变化可以逐步地通过连续的亮度与色彩饱和度点逐步地执行。

公开(公告)号：US20040100677A1

公开(公告)日：2004-05-27

申请号：US10305536

申请日：2002-11-26

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Andrew G. Huibers ,  Satyadev R. Patel

IPC: G02B026/00

CPC classification number: G02B26/0833 ,  B81B7/0077 ,  B81B2201/042 ,  B81C1/00896 ,  B81C1/00904 ,  B81C2203/0118 ,  B82Y30/00 ,  H01L24/97 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01013 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/0102 ,  H01L2924/01023 ,  H01L2924/01024 ,  H01L2924/01027 ,  H01L2924/01033 ,  H01L2924/01039 ,  H01L2924/01041 ,  H01L2924/01049 ,  H01L2924/01054 ,  H01L2924/01058 ,  H01L2924/01072 ,  H01L2924/01074 ,  H01L2924/01077 ,  H01L2924/01079 ,  H01L2924/01322 ,  H01L2924/04953 ,  H01L2924/10329 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/19041 ,  H01L2924/19042 ,  H01L2924/3025 ,  H01L2924/00

Abstract: A projection system, a spatial light modulator, and a method for forming a micromirror array such as for a projection display are disclosed. The spatial light modulator can have two substrates bonded together with one of the substrates comprising a micro-mirror array. The two substrates can be bonded at the wafer level after depositing a getter material and/or solid or liquid lubricant on one or both of the wafers if desired. In one embodiment of the invention, one of the substrates is a light transmissive substrate and a light absorbing layer is provided on the light transmissive substrate to selectively block light from passing through the substrate. The light absorbing layer can form a pattern, such as a frame around an array of micro-mirrors.

Abstract translation: 公开了投影系统，空间光调制器和用于形成诸如投影显示器的微镜阵列的方法。 空间光调制器可以具有与包括微镜阵列的基板之一粘合在一起的两个基板。 如果需要，在沉积吸气剂材料和/或固体或液体润滑剂在一个或两个晶片上之后，两个基底可以在晶片层上结合。 在本发明的一个实施例中，一个基板是透光基板，并且在透光基板上设置光吸收层，以选择性地阻挡光通过基板。 光吸收层可以形成图案，例如围绕微镜阵列的框架。

公开(公告)号：US20040069747A1

公开(公告)日：2004-04-15

申请号：US10269149

申请日：2002-10-11

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Satyadev R. Patel ,  Gregory P. Schaadt ,  Douglas B. MacDonald ,  Niles K. MacDonald ,  Hongqin Shi

IPC: G01L021/30 ,  G01R031/00

CPC classification number: H01J37/32963 ,  B81C1/00476 ,  B81C1/00587 ,  B81C99/0065 ,  B81C2201/0132 ,  B81C2201/0138 ,  H01J37/32449 ,  H01J37/32935

Abstract: Processes for the removal of a layer or region from a workpiece material by contact with a process gas in the manufacture of a microstructure are enhanced by the ability to accurately determine the endpoint of the removal step. A vapor phase etchant is used to remove a material that has been deposited on a substrate, with or without other deposited structure thereon. By creating an impedance at the exit of an etching chamber (or downstream thereof), as the vapor phase etchant passes from the etching chamber, a gaseous product of the etching reaction is monitored, and the endpoint of the removal process can be determined. The vapor phase etching process can be flow through, a combination of flow through and pulse, or recirculated back to the etching chamber

Abstract translation: 通过与制造微结构中的工艺气体接触从工件材料去除层或区域的工艺通过精确地确定去除步骤的终点的能力增强。 气相蚀刻剂用于去除已经沉积在基底上的材料，其上具有或不具有其它沉积结构。 通过在蚀刻室（或其下游）的出口处产生阻抗，当气相蚀刻剂从蚀刻室通过时，监测蚀刻反应的气态产物，并且可以确定去除过程的终点。 气相蚀刻工艺可以流过，流过和脉冲的组合，或再循环回蚀刻室

公开(公告)号：US20030137501A1

公开(公告)日：2003-07-24

申请号：US10340162

申请日：2003-01-10

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Peter W. Richards

IPC: G09G005/00

CPC classification number: G09G3/34 ,  G02F1/136277 ,  G09G3/2018 ,  G09G3/346 ,  G09G3/3648 ,  G09G2300/08 ,  G09G2310/0235 ,  G09G2310/0251 ,  G11C11/401 ,  G11C11/404

Abstract: A voltage storage cell circuit includes an access transistor and a storage capacitor, wherein the source of said access transistor is connected to a bitline, the gate of said access transistor is connected to a wordline, and wherein the drain of said access transistor is connected to a first plate of said storage capacitor forming a storage node, and wherein the second plate of said storage capacitor is connected to a pump signal. This arrangement allows for a novel pixel circuit design with area requirements comparable to that of a 1T1C DRAM-like pixel cell, but with the advantage of an output voltage swing of the full range allowed by the breakdown voltage of the pass transistor. A spatial light modulator such as a micromirror array can comprise such a voltage storage cell.

Abstract translation: 电压存储单元电路包括存取晶体管和存储电容器，其中所述存取晶体管的源极连接到位线，所述存取晶体管的栅极连接到字线，并且其中所述存取晶体管的漏极连接到 所述存储电容器的第一板形成存储节点，并且其中所述存储电容器的第二板连接到泵浦信号。 这种布置允许具有与1T1C类DRAM像素单元的面积要求相当的面积要求的新型像素电路设计，但是具有通过晶体管的击穿电压允许的全范围的输出电压摆幅的优点。 诸如微镜阵列的空间光调制器可以包括这种电压存储单元。

公开(公告)号：US20030073302A1

公开(公告)日：2003-04-17

申请号：US10270465

申请日：2002-10-11

Applicant: REFLECTIVITY, INC., a California corporation

Inventor： Andrew G. Huibers

IPC: H01L021/4763

CPC classification number: B81C1/00801 ,  B81C1/00095 ,  B81C1/00476 ,  B81C99/0065 ,  B81C2201/0138 ,  B81C2201/117 ,  H01L21/7682

Abstract: Processes are disclosed for forming integrated circuit devices where multilayered structures are formed having between layers a removable silicon material. The layers adjacent the removable silicon can be either conducting or insulating or both. After forming one or more layers with the removable silicon therebetween, the silicon is removed so as to provide for an air-gap dielectric. In one embodiment, adjacent layers are copper. Between the copper and removable silicon can be a barrier layer, such as a transition metal-silicon-nitride layer. In a preferred embodiment, the removable silicon is removed with a gas phase interhalogen or noble gas halide.

Abstract translation: 公开了用于形成集成电路器件的工艺，其中多层结构在层之间形成可移除的硅材料。 与可去除的硅相邻的层可以是导电的或绝缘的，也可以是两者。 在其间具有可去除的硅形成一个或多个层之后，去除硅以提供气隙电介质。 在一个实施例中，相邻层是铜。 在铜和可移除的硅之间可以是阻挡层，例如过渡金属 - 氮化硅层。 在优选的实施方案中，用气相卤间或惰性气体卤化物除去可除去的硅。

公开(公告)号：DE60123008D1

公开(公告)日：2006-10-26

申请号：DE60123008

申请日：2001-01-25

Applicant: REFLECTIVITY INC

Inventor： HUIBERS G ,  HEUREUX J

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/04

Abstract: A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

公开(公告)号：AT339704T

公开(公告)日：2006-10-15

申请号：AT01905068

申请日：2001-01-25

Applicant: REFLECTIVITY INC

Inventor： HUIBERS ANDREW G ,  HEUREUX PETER J

IPC: B81B3/00 ,  B81B7/04 ,  G02B26/08

Abstract: A spatial light modulator having a substrate holding an array of deflectable (e.g. mirror) elements. The deflectable elements are deflectably coupled to the substrate via corresponding hinges, each hinge being disposed on a side of the deflectable element opposite to the side on which the substrate is disposed. By placing the hinge in this way the fill factor of the array is improved. The hinge can be provided flush against the deflectable element, or it can be provided with a gap between the deflectable element and the hinge. The hinge can be attached via one or more posts or walls connecting to the substrate, and with a flexible or deformable portion that is substantially or entirely hidden from view when viewed through the substrate (e.g. a glass substrate). In one embodiment, the hinge is connected to the undersides of both the substrate and the deflectable element, and connects towards a center part of the deflectable element. In this way, a longer hinge is provided thus reducing strain on any one part of the hinge. Advantages of the present invention include: (1) increased fill factor as the torsion hinge is hidden behind the reflective plate; (2) increased contrast due to fewer scattering optical surfaces exposed, and due to a greater ability to control their angle and geometry; and (3) increased geometric flexibility to optimize electro-mechanical performance and robustness with respect to manufacturing.

公开(公告)号：DE20122614U1

公开(公告)日：2006-09-14

申请号：DE20122614

申请日：2001-08-03

Applicant: REFLECTIVITY INC

IPC: G02B26/08 ,  B81B3/00 ,  B81B7/02 ,  B81B7/04 ,  B81C1/00 ,  G02B27/18 ,  G03B21/00 ,  G03B21/10 ,  G03B21/18 ,  G03F7/00 ,  H04N3/08 ,  H04N5/74

Abstract: A micro-mirror (24) is connected to a substrate (10) via a post (21), a hinge (18c), a post (16c) and metal areas (12a) and an array of the micro-mirrors is disposed in a rectangular shape with a capability of rotation around a switching axis between on and off states corresponding to pixels in a viewed image. Light is directed from a source to the mirrors non-perpendicularly to at least two sides of each mirror, while reflected light is received from collection optics. Independent claims are included for an array of movable micro-mirrors, for a method of positioning an image on a target, for a method of spatially modulating light beams, for an optical micro-mirror element, for a packaged micro-electromechanical device and for a method of making a micro-mirror.