公开(公告)号：NL2006030A

公开(公告)日：2011-10-18

申请号：NL2006030

申请日：2011-01-19

Applicant: ASML NETHERLANDS BV

Inventor： PEETERS EMIEL ,  WUISTER SANDER ,  KOOLE ROELOF

IPC: G03F7/20

公开(公告)号：NL2008951A

公开(公告)日：2013-01-02

申请号：NL2008951

申请日：2012-06-07

Applicant: ASML NETHERLANDS BV

Inventor： BRIZARD AURELIE ,  WUISTER SANDER ,  KOOLE ROELOF ,  PEETERS EMIEL

IPC: G03F7/20

Abstract: A block copolymer, adapted to self-assemble to form an ordered pattern on a substrate, has first and second blocks with a terminal moiety covalently bonded to the end of the first block. The molecular weight of the terminal moiety is 20% or less than that of the block copolymer and the terminal moiety has a low chemical affinity for the first block. The terminal moiety can assist the accurate positional placement of the domains of the ordered array and lead to improved critical dimension uniformity and/or reduced line edge roughness. The polymer may be useful in combination with a graphoepitaxy template, where the terminal moiety is chosen to associate with a sidewall of the template. This may reduce undesired aggregation of polymer domains at a sidewall and/or assist in domain placement accuracy.

公开(公告)号：NL2007128A

公开(公告)日：2012-02-20

申请号：NL2007128

申请日：2011-07-18

Applicant: ASML NETHERLANDS BV

Inventor： KOOLE ROELOF

IPC: G03F7/00

公开(公告)号：NL2006639A

公开(公告)日：2011-12-06

申请号：NL2006639

申请日：2011-04-20

Applicant: ASML NETHERLANDS BV

Inventor： PEETERS EMIEL ,  WUISTER SANDER ,  KOOLE ROELOF

IPC: G03F7/20

公开(公告)号：NL2007630A

公开(公告)日：2011-11-23

申请号：NL2007630

申请日：2011-10-20

Applicant: ASML NETHERLANDS BV

Inventor： SCACCABAROZZI LUIGI ,  BANINE VADIM ,  LUTTIKHUIS BERNARDUS ,  KOOLE ROELOF ,  WONDERGEM HENDRIKUS ,  GRAAT PETRUS

IPC: G03F7/20

公开(公告)号：NL2005865A

公开(公告)日：2011-08-17

申请号：NL2005865

申请日：2010-12-16

Applicant: ASML NETHERLANDS BV

Inventor： LAMMERS JEROEN ,  WUISTER SANDER ,  KOOLE ROELOF

IPC: G03F7/00

公开(公告)号：NL2005265A

公开(公告)日：2011-04-11

申请号：NL2005265

申请日：2010-08-25

Applicant: ASML NETHERLANDS BV

Inventor： LAMMERS JEROEN ,  WUISTER SANDER ,  KRUIJT-STEGEMAN YVONNE ,  KOOLE ROELOF

IPC: G03F7/00