公开(公告)号：NL2007864A

公开(公告)日：2011-12-22

申请号：NL2007864

申请日：2011-11-25

Applicant: ASML NETHERLANDS BV

Inventor： YAKUNIN ANDREI ,  IVANOV VLADIMIR ,  SCHOOT JAN ,  KRIVTSUN VLADIMIR ,  SWINKELS GERARDUS ,  MEDVEDEV VIACHESLAV

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2003777A

公开(公告)日：2010-07-13

申请号：NL2003777

申请日：2009-11-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ,  SWINKELS GERARDUS ,  BUURMAN ERIK

IPC: G03F7/20 ,  H05G2/00

Abstract: A laser device includes a seed laser, an amplifier, a detector, and an optical element arranged to direct radiation emitted by the seed laser towards a plasma generation site. The optical element is arranged to direct towards the detector amplified spontaneous emission radiation which has been emitted by the seed laser and has been reflected from a droplet of fuel material. The detector is arranged to trigger generation of a laser radiation pulse by the seed laser when the reflected amplified spontaneous emission radiation is detected.