公开(公告)号：NL2004977A

公开(公告)日：2010-08-12

申请号：NL2004977

申请日：2010-06-28

Applicant: ASML NETHERLANDS BV

Inventor： MESTROM WILBERT ,  LOOPSTRA ERIK ,  SWINKELS GERARDUS ,  BUURMAN ERIK

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2009020A

公开(公告)日：2013-01-24

申请号：NL2009020

申请日：2012-06-18

Applicant: ASML NETHERLANDS BV

Inventor： BUURMAN ERIK ,  CSISZAR SZILARD

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2012846A

公开(公告)日：2014-12-15

申请号：NL2012846

申请日：2014-05-20

Applicant: ASML NETHERLANDS BV

Inventor： SYTINA OLGA ,  BUURMAN ERIK ,  HOFSTRA RAMON ,  KLEEMANS NIEK

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2006550A

公开(公告)日：2011-05-17

申请号：NL2006550

申请日：2011-04-06

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ,  SWINKELS GERARDUS ,  BUURMAN ERIK ,  STAMM UWE

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2004978A

公开(公告)日：2010-08-12

申请号：NL2004978

申请日：2010-06-28

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ,  SWINKELS GERARDUS ,  BUURMAN ERIK ,  MESTROM WILBERT

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2005691A

公开(公告)日：2011-01-06

申请号：NL2005691

申请日：2010-11-15

Applicant: ASML NETHERLANDS BV

Inventor： BUURMAN ERIK ,  ASTEN NICOLAAS ,  KREUWEL HERMANUS

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2003777A

公开(公告)日：2010-07-13

申请号：NL2003777

申请日：2009-11-10

Applicant: ASML NETHERLANDS BV

Inventor： LOOPSTRA ERIK ,  SWINKELS GERARDUS ,  BUURMAN ERIK

IPC: G03F7/20 ,  H05G2/00

Abstract: A laser device includes a seed laser, an amplifier, a detector, and an optical element arranged to direct radiation emitted by the seed laser towards a plasma generation site. The optical element is arranged to direct towards the detector amplified spontaneous emission radiation which has been emitted by the seed laser and has been reflected from a droplet of fuel material. The detector is arranged to trigger generation of a laser radiation pulse by the seed laser when the reflected amplified spontaneous emission radiation is detected.