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    21.
    发明专利
    未知

    公开(公告)号：DE4306069A1

    公开(公告)日：1994-09-08

    申请号：DE4306069

    申请日：1993-03-01

    Applicant: BASF AG

    Inventor： FUNHOFF DIRK DR ,  SCHWALM REINHOLD DR ,  BINDER HORST

    IPC: C08K5/375 ,  C08K5/42 ,  C09D125/02 ,  C09D125/18 ,  C09D143/04 ,  G03F7/004 ,  G03F7/029 ,  G03F7/032 ,  G03F7/039 ,  H01L21/027 ,  C08L25/18

    Abstract: The invention relates to positive-working, radiation-sensitive mixtures essentially comprising (a1) an organic binder containing acid-labile groups which is insoluble in water, but becomes soluble in aqueous alkaline solutions on treatment with acid, or (a2.1) a polymeric binder which is insoluble in water, but soluble in aqueous alkaline solutions and (a2.2) an organic compound whose solubility in an aqueous alkaline developer is increased by treatment with acid, and (b) an organic compound which produces an acid on exposure to actinic radiation and which additionally contain (c) a strongly basic, organic compound containing hydroxyl, alkoxy or phenoxy anions. These mixtures are suitable for the production of relief structures of improved contrast.

    24.
    发明专利
    未知

    公开(公告)号：DE3918016A1

    公开(公告)日：1990-12-06

    申请号：DE3918016

    申请日：1989-06-02

    Applicant: BASF AG

    Inventor： LICHT ULRIKE DR ,  FUCHS HARALD DR ,  FUNHOFF DIRK DR ,  SCHREPP WOLFGANG DR ,  SCHUPP HANS DR

    IPC: C08F220/36 ,  B05D1/20 ,  C08F20/34 ,  C08F20/52 ,  C08F220/34 ,  C08F220/60 ,  C09K19/38 ,  G02F1/35 ,  G02F1/355 ,  G02F1/361

    Abstract: PCT No. PCT/EP90/00866 Sec. 371 Date Nov. 12, 1991 Sec. 102(e) Date Nov. 12, 1991 PCT Filed May 30, 1990 PCT Pub. No. WO90/15087 PCT Pub. Date Dec. 13, 1990.Novel (meth)acrylate copolymers which contain, as polymerized units, A) one or more (meth)acrylates and/or (meth)acrylamides having second order nonlinear optical properties and of the general formula I (I) where R is hydrogen or methyl, X is a flexible spacer, which may or may not be present, Y is a divalent group having electron donor activity and Z is a noncentrosymmetric radical containing an easily polarizable conjugated pi -electron system and one or more electron acceptor groups, and B) one or more (meth)acrylates of alkanols where the alkyl radical is of 10 to 30 carbon atoms in a molar ratio of (A) to (B) of from 1:0.5 to 1:5 are very suitable as nonlinear optical materials for nonlinear optical arrangements and for the production of Langmuir-Blodgett films. The novel (meth)acrylate copolymers which contain terminal nitro, trifluoromethyl, cyano or fulven-6-yl groups as electron acceptors and have molar ratios A to B differing from those mentioned above are also suitable for intended uses outside nonlinear optics.

    28.
    发明专利
    未知

    公开(公告)号：DE59209708D1

    公开(公告)日：1999-07-15

    申请号：DE59209708

    申请日：1992-10-24

    Applicant: BASF AG

    Inventor： BINDER HORST ,  SCHWALM REINHOLD DR ,  FUNHOFF DIRK DR

    IPC: G03F7/004 ,  G03F7/039 ,  H01L21/027

    Abstract: The invention relates to a positive UV-radiation sensitive composition comprising (a1) an organic binder containing acid-labile ether, ester or carbonate groups, or (a2) a water-insoluble polymeric binder soluble in aqueous alkaline solutions and (a2.1) an organic compound whose solubility in an aqueous alkaline developer is increased by the influence of acid, or (a2.2) an organic compound whose solubility in an aqueous alkaline developer is increased by the influence of acid and which contains at least one group cleavable by acid and additionally a group which forms an acid under the influence of radiation, or a mixture of the organic compounds (a2.1) and (a2.2) and b) an arylsulphonic acid ester. This radiation-sensitive composition is suitable for forming relief patterns.

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