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    POSITIONING UNIT
    24.
    发明专利
    POSITIONING UNIT 失效

    公开(公告)号：JPH07106404A

    公开(公告)日：1995-04-21

    申请号：JP26571893

    申请日：1993-09-29

    Applicant: CANON KK

    Inventor： CHIBA YUJI ,  MARUMO KOJI ,  KUNO MITSUTOSHI

    IPC: G21K5/00 ,  G03F7/20 ,  G03F9/00 ,  H01L21/027 ,  H01L21/68

    Abstract: PURPOSE:To enhance the throughput of an exposing unit by providing means for detecting the positional shift of a substrate held on a holding board and a driving means for shifting a moving tables based on the output therefrom thereby shortening the waiting time significantly. CONSTITUTION:The positioning unit comprises moving tables 3b, 3d reciprocative in a predetermined axial direction along a guide means 3f, and a holding board 3a supported thereby. The positioning unit further comprises means 3i for detecting the positional shift of a substrate W1 held on the holding board 3a, and driving means 3e, 3g for shifting the moving tables 3b, 3d based on the output therefrom. The detecting means 3i is supported by the moving tables 3b, 3d. This structure detects positional shift of the substrate W1 while shifting the moving tables 3b, 3d toward the guide means 3f and eliminates at least a part of the positional shift thus shortening the waiting time of a positioning unit significantly.

    ALIGNMENT METHOD OF SEMICONDUCTOR WAFER
    27.
    发明专利
    ALIGNMENT METHOD OF SEMICONDUCTOR WAFER 失效

    公开(公告)号：JPH04146647A

    公开(公告)日：1992-05-20

    申请号：JP26938190

    申请日：1990-10-09

    Applicant: CANON KK

    Inventor： MORI MAKIKO ,  KUNO MITSUTOSHI ,  IWAMOTO KAZUNORI

    IPC: G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68

    Abstract: PURPOSE:To enable the orientation flat to be discriminated precisely thereby enabling the adjustment to be made with high precision by a method wherein the orifla detecting wafer stages are turned by a turning means according to the specified orifla angle so as to make a semiconductor wafer orifla take the specified direction. CONSTITUTION:The edge position of a semiconductor wafer 1 while being turned is detected in no contact therewith. Next, the edge locus displaying the fluctuation in the edge distance to the turning angles is processed according to the detected edge position so that the orientation flat may be discriminated by detecting the minimum value on the edge locus. Furthermore, the orifla angle with the turning center as to the discriminated orifla is detected for enabling the orifla direction on the orifla detecting wafer stages to be taken so that the orifla detecting stages may be turned according to the orifla angle thereby enabling orifla to take the specified direction.

    MASK HOLDING DEVICE
    28.
    发明专利
    MASK HOLDING DEVICE 失效

    公开(公告)号：JPH0267716A

    公开(公告)日：1990-03-07

    申请号：JP21852588

    申请日：1988-09-02

    Applicant: CANON KK

    Inventor： FUJIOKA HIDEHIKO ,  CHIBA YUJI ,  KUNO MITSUTOSHI ,  KARIYA TAKUO ,  SHIMODA ISAMU

    IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30

    Abstract: PURPOSE:To make possible a stable operation even at the time of trouble of solenoid coils by a method wherein the attraction force of the solenoid coils is set at a certain constant ratio to that of a permanent magnet. CONSTITUTION:If a mask frame (a mask) 1 is approached a mask holder 4, a magnetic circuit is formed of a permanent magnet 5, the holder 4 and the frame 1 and the frame 1 is sucked and attracted by the magnet 5 and the holder 4. At the time of separation of the frame from the magnet and the holder, a current is made to flow through solenoid coils 6a and 6b from power supplies 8a and 8b through lead wires 7a and 7b in such a way that a magnetic flux reverse to that of the magnet 5 is generated and the magnetic forces of the coils and the magnet are temporarily cancelled to perform a separation operation. In this case, if the power supplies are respectively provided with a self- checking function, which is not shown in the diagram, and can feed the current without an erroneous operation, a stable operation can be commanded from a CPU 9 even in either case of a normal time and the time of trouble if there is the attraction force of the coils. Moreover, the number of the solenoid coils has only to be two or more and it is desirable that there are two or more as to the number of power supplies.

    DRIVING METHOD FOR OPTICAL MODULATION ELEMENT
    29.
    发明专利
    DRIVING METHOD FOR OPTICAL MODULATION ELEMENT 失效

    公开(公告)号：JPS62289817A

    公开(公告)日：1987-12-16

    申请号：JP13274686

    申请日：1986-06-10

    Applicant: CANON KK

    Inventor： KUNO MITSUTOSHI ,  ENARI MASAHIKO ,  SHINDO HISASHI

    IPC: G02F1/133 ,  G02F1/1343 ,  G09F9/30 ,  G09G3/36

    Abstract: PURPOSE:To improve a picture quality of a gradation display, and to obtain a display having a high density by inputting simultaneously an information signal corresponding to a gradation signal, to an information side electrode and a scanning side electrode, and writing the information to a liquid crystal panel in a real time by dot sequential driving. CONSTITUTION:A display photoconductive film 2, and parallel electric transmission electrodes 3 of an equal interval are superposed on a substrate 1, an opposed photoconductive film 5, and parallel electric transmission electrodes 6 of an equal interval are superposed on an opposed substrate 4, a picture element area A is formed on a crossing part of the electric transmission electrodes, and a ferroelectric liquid crystal is inserted and held between the film 2 and 5. Electrodes 3a, 3c are set to VE=0, a signal voltage Va is applied to 3b, and a gradient of Va is provided to length directions L1, L2 in the film 2 surface. In the same way, Vb=Va is applied to the electrode 6, and a gradient is provided into the film 5 surface. When Va and Vb exceed 1/2 of an inverted threshold value Vth of a liquid crystal, Va'+Vb' exceeding Vth is applied in length directions M, (m) in the film 2, 5 surfaces, and the corresponding part is converted to dark. When Va=Vb is applied at every picture element, and its voltage value is modulated in accordance with gradation information, the gradation can be displayed with a high density extending over a wide area by a good picture quality.

    DRIVING METHOD FOR OPTICAL MODULATION ELEMENT
    30.
    发明专利
    DRIVING METHOD FOR OPTICAL MODULATION ELEMENT 失效

    公开(公告)号：JPS62238532A

    公开(公告)日：1987-10-19

    申请号：JP8292486

    申请日：1986-04-09

    Applicant: CANON KK

    Inventor： KUNO MITSUTOSHI ,  ENARI MASAHIKO ,  SHINDO HISASHI

    IPC: G02F1/133 ,  G02F1/1343 ,  G09G3/36

    Abstract: PURPOSE:To enable high-speed writing to a display panel and gradation display by having the 1st and 2nd steps to impress specific information signals in synchronization with successively impressed scanning signals. CONSTITUTION:This optical modulation element is of a system which is formed with a potential gradient in a picture element A and executes driving in accordance with said potential gradient. Said element is provided with the 1st substrate 31 provided particularly with a conductive film 32 and the 1st electrode group 34 of plural lines wired to be electrically connected to the conductive film 32, the 2nd substrate provided with the 2nd electrode group of plural lines and an optical modulation material disposed between the 1st substrate and the 2nd substrate. The element is constituted to have the 1st step to impress the 1st information signal to the 1st electrode group 34 of the odd number and the 2nd step to impress the 2nd information signal to the 1st electrode group 34 of the even number in synchronization with the scanning signals successively impressed to the 2nd electrode group. The high-density picture elements are thereby provided over a wide area and the element is made particularly suitable for a gradation display.

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