公开(公告)号：DE602004015526D1

公开(公告)日：2008-09-18

申请号：DE602004015526

申请日：2004-04-01

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  ANCEY PASCAL ,  CARUYER GREGORY

IPC: B81B3/00 ,  H01H61/06 ,  H03H3/00 ,  H03H3/02 ,  H03H3/10 ,  H03H9/00 ,  H03H9/02 ,  H03H9/17 ,  H03H9/46 ,  H03H9/54

Abstract: The tunable micro resonator (1) has a piezoelectric layer (3) sandwiched between two metallic electrodes (4,5). The resonator is mounted on a suspension beam which is formed as a bimetallic material which has controllable deformability. The beam can have heating inserts (22,23) and one or more inserted blocks (20,21) formed of a material with a different thermal expansion characteristic than the beam.

公开(公告)号：DE602006002007D1

公开(公告)日：2008-09-11

申请号：DE602006002007

申请日：2006-08-31

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  CASSET FABRICE ,  ANCEY PASCAL

IPC: H01G5/16 ,  H01L21/822 ,  H01L27/04 ,  H05K3/00

公开(公告)号：DE60306196T2

公开(公告)日：2007-04-19

申请号：DE60306196

申请日：2003-11-27

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  CARUYER GREGORY ,  ANCEY PASCAL

IPC: H03H9/05 ,  H01L23/14 ,  H01L27/20 ,  H01L41/04 ,  H03H9/17 ,  H03H9/58

公开(公告)号：FR2890229A1

公开(公告)日：2007-03-02

申请号：FR0552645

申请日：2005-08-31

Applicant: ST MICROELECTRONICS SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BOUCHE GUILLAUME ,  CASSET FABRICE ,  ANCEY PASCAL

IPC: H01G5/16 ,  H01L21/02 ,  H01L21/822 ,  H01L27/04 ,  H01L29/92

Abstract: L'invention concerne un procédé de formation d'un condensateur variable comprenant une bande conductrice recouvrant l'intérieur d'une cavité, et une membrane souple conductrice placée au-dessus de la cavité, la cavité étant réalisée selon les étapes suivantes : former un évidement dans un substrat ; placer un matériau malléable dans l'évidement ; mettre un poinçon en appui sur le substrat au niveau de l'évidement afin de conférer à la partie supérieure du matériau malléable une forme désirée ; durcir le matériau malléable ; et retirer le poinçon.

公开(公告)号：FR2863789B1

公开(公告)日：2006-09-29

申请号：FR0314567

申请日：2003-12-12

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  CARUYER GREGORY ,  ANCEY PASCAL

IPC: H03H9/15 ,  H01L41/083 ,  H03H3/02 ,  H03H9/17 ,  H03H9/56 ,  H03H9/58

Abstract: An acoustic resonator device (1) comprises an active element (6) and a support. The support includes a membrane (5) and the active element provided with at least one piezoelectric layer (10) is surmounted by a multi-layer assembly (12) provided with at least three layers (13, 14, 15) of which at least one has a strong acoustic impedance and at least one a low acoustic impedance.

公开(公告)号：FR2873849A1

公开(公告)日：2006-02-03

申请号：FR0408289

申请日：2004-07-27

Applicant: ST MICROELECTRONICS SA ,  COMMISSARIAT ENERGIE ATOMIQUE

Inventor： BOUCHE GUILLAUME ,  ANCEY PASCAL ,  VIALA BERNARD ,  COUDERC SANDRINE

IPC: H01F10/14 ,  B82B3/00 ,  H01F10/00 ,  H01F10/13 ,  H01F10/32 ,  H01F17/00 ,  H01F41/18 ,  H01F41/30 ,  H01L23/552 ,  H01L27/20 ,  H01L41/22

Abstract: L'invention concerne un procédé d'obtention d'un film mince magnétique doux, à forte aimantation et isolant, comprenant une nitruration de nanograins ferromagnétiques riches en Fe immergés dans un substrat amorphe et une oxydation sélective du substrat amorphe.L'invention concerne également les films minces magnétiques doux à forte aimantation et isolant obtenus par le présent procédé.L'invention propose également un circuit intégré comprenant un composant utilisant une membrane incorporant un film mince obtenu par le même procédé.

公开(公告)号：FR2853473A1

公开(公告)日：2004-10-08

申请号：FR0304039

申请日：2003-04-01

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  SMEARS NICK ,  ANCEY PASCAL ,  CARUYER GREGORY

IPC: H01L27/20 ,  H03H9/15 ,  H03H9/58

Abstract: The electronic component has two resonators (3, 4) that are disposed on an upper surface of a silicon substrate. Each resonator has a lower electrode in contact with the upper surface, a piezoelectric active component disposed on the lower electrode and an upper electrode disposed on the active component. The respective lower electrodes are made of aluminum and molybdenum, to obtain frequencies at different resonance. Independent claims are also included for the following (a) an integrated circuit including the electronic component (b) a hybrid circuit including the electronic component (c) a filter comprising a electronic component (d) a process of fabrication of the electronic component.

公开(公告)号：AU2003294093A1

公开(公告)日：2004-06-23

申请号：AU2003294093

申请日：2003-11-27

Applicant: ST MICROELECTRONICS SA

Inventor： BOUCHE GUILLAUME ,  CARUYER GREGORY ,  ANCEY PASCAL

IPC: H01L23/14 ,  H01L27/20 ,  H01L41/04 ,  H03H9/05 ,  H03H9/17 ,  H03H9/58

公开(公告)号：FR2819630B1

公开(公告)日：2003-08-15

申请号：FR0100416

申请日：2001-01-12

Applicant: ST MICROELECTRONICS SA

Inventor： MENUT OLIVIER ,  BOUCHE GUILLAUME ,  JAOUEN HERVE

IPC: H01L21/762 ,  H01L21/76 ,  H01L27/118

公开(公告)号：FR2819630A1

公开(公告)日：2002-07-19

申请号：FR0100416

申请日：2001-01-12

Applicant: ST MICROELECTRONICS SA

Inventor： MENUT OLIVIER ,  BOUCHE GUILLAUME ,  JAOUEN HERVE

IPC: H01L21/762 ,  H01L21/76 ,  H01L27/118

Abstract: A semiconductor device comprises a semiconductor substrate (SB) incorporating locally at least one zone (ZL) emerging at the surface and entirely edged, at its lateral edges and it bottom, by an insulating material rendering it entirely insulated from the rest of the substrate. The horizontal insulating layer may be with a constant thickness or crenellated. An Independent claim is also included for a method for the fabrication of this semiconductor device.