-
公开(公告)号：DE602004015521D1
公开(公告)日：2008-09-18
申请号：DE602004015521
申请日：2004-03-19
Applicant: XEROX CORP
Inventor： KUBBY JOEL A , FEINBERG KATHLEEN A , GERMAN KRISTINE A , GULVIN PETER M , MA JUN , LIN PINYEN
-
公开(公告)号：DE60134106D1
公开(公告)日：2008-07-03
申请号：DE60134106
申请日：2001-10-03
Applicant: XEROX CORP
Inventor： KUBBY JOEL A , EKLUND ELLIOTT A , GULVIN PETER M
-
公开(公告)号：DE60221947T2
公开(公告)日：2007-12-20
申请号：DE60221947
申请日：2002-11-08
Applicant: XEROX CORP
Inventor： KUBBY JOEL A , LIN PINYEN , CHEN JINGKUANG , SU YI
Abstract: A silicon demultiplexer, a plurality of silicon switches and a silicon multiplexer are monolithically integrated on a single silicon chip. In embodiments, the silicon demultiplexer and the silicon multiplexer each comprise a diffraction grating. In other embodiments, the silicon demultiplexer and the silicon multiplexer each comprise an arrayed waveguide grating. In various exemplary embodiments, the silicon optical switches comprise optical switches, micromachined torsion mirrors, electrostatic micromirrors, and/or tilting micromirrors. In use, an optical signal comprising a multiplexed data stream is input into the monolithic reconfigurable optical multiplexer. An optical signal that comprises a modified multiplexed data stream may be output. In an optical communications system, the silicon demultiplexer communicates with an input optical fiber, the plurality of silicon optical switches communicate between the silicon demultiplexer and the silicon multiplexer, and the silicon multiplexer communicates with an output optical fiber. In various embodiments, the optical switches are fabricated to be self-aligned.
-
公开(公告)号：DE60128440D1
公开(公告)日：2007-06-28
申请号：DE60128440
申请日：2001-11-27
Applicant: MICROSCAN SYSTEMS INC , XEROX CORP
Inventor： SCHARF BRUCE R , GULVIN PETER M , CHEN JINGKUANG , KUBBY JOEL A , LIN CHUANG-CHIA , TRAN ALEX T
IPC: B81B3/00 , B81C1/00 , H01L21/762 , H01L27/14
Abstract: The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a pattern on a single crystal silicon layer separated by an insulator layer from a substrate layer; defining a structure in the single-crystal silicon layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; and releasing the formed structure.
-
公开(公告)号：DE60128437D1
公开(公告)日：2007-06-28
申请号：DE60128437
申请日：2001-11-27
Applicant: MICROSCAN SYSTEMS INC , XEROX CORP
Inventor： SCHARF BRUCE R , KUBBY JOEL A , LIN CHUANG-CHIA , TRAN ALEX T , ZOSEL ANDREW J , GULVIN PETER M , CHEN JINGKUANG
IPC: B81B3/00 , B81C1/00 , H01L21/762 , H01L27/14
Abstract: The present invention provides a micromechanical or microoptomechanical structure produced by a process comprising defining the structure in a single-crystal silicon layer separated by an insulator layer from a substrate layer; selectively etching the single crystal silicon layer; depositing and etching a polysilicon layer on the insulator layer, with remaining polysilicon forming mechanical elements of the structure; metalizing a backside of the structure; and releasing the formed structure.
-
Patent Agency Ranking
公开(公告)号：DE69935694D1
公开(公告)日：2007-05-16
申请号：DE69935694
申请日：1999-09-29
Applicant: XEROX CORP
Inventor： PEETERS ERIC , NOOLANDI JAAN , APTE RAJ B , FLOYD PHILIP D , SMALL JONATHAN , KOVACS GREGORY J , LEAN MENG H , VOLKEL ARMIN R , BOLTE STEVEN B , SHI AN-CHANG , ENDICOTT FREDERICK J , ANDERSON GREGORY B , HAYS DAN A , KUBBY JOEL A , JACKSON WARREN B , MOFFAT KAREN A , MCANENEY BRIAN T , VEREGIN RICHARD P N , MCDOUGALL MARIA N V , BOILS DANIELLE C , SZABO PAUL , BERLIN ANDREW A , CONNELL NEVILLE G A
Abstract: A print head (24) is disclosed for use in a marking apparatus in which a propellant stream (A) is passed through a channel (34) and directed toward a substrate (38). Marking material (28), such as ink, toner, etc., is controllably introduced into the propellant stream (A) and imparted with sufficient kinetic energy thereby to be made incident upon the substrate (38). A multiplicity of channels for directing the propellant and marking material allow for high throughput, high resolution marking. Multiple marking materials (28C, 28M, 28Y, 28K) may be introduced into the channel (34) and mixed therein prior to being made incident on the substrate (38), or mixed or superimposed on the substrate (38) without re-registration. One example is a single-pass, full-color printer.
-
公开(公告)号：DE69836519D1
公开(公告)日：2007-01-11
申请号：DE69836519
申请日：1998-06-02
Applicant: XEROX CORP
Inventor： GENOVESE FRANK C , KUBBY JOEL A , PEETERS ERIC , CHEN JINGKUANG , HAYS DAN A , POND STEPHEN F
Abstract: A magnetically actuated ink jet printing device for use in an ink jet printer ejects ink droplets by deforming a diaphragm (38) with the force generated on an electrode (40) in a magnetic field when an electric current pulse is applied thereto. In one embodiment, the diaphragm (38) of the device is provided by anisotropically etching a silicon substrate (32) with an etch stop which provides a thin membrane of silicon material for use as the diaphragm (38). An electrode (40) having an input and output terminal (45, 42) is patterned over the diaphragm (38) and a sacrificial layer (64) is deposited over the silicon substrate surface containing the diaphragm (38). The sacrificial layer (64) is patterned to subsequently provide the ink ejection chamber (49) over the diaphragm (38). A patternable layer (44) is deposited over the silicon substrate surface including the sacrificial layer and patterned to provide the nozzles (46) and expose the electrode terminals (45, 42). The sacrificial layer (64) is removed and an ink supply is connected to the space previously occupied by the sacrificial layer (64). Magnetic field generating means having a predetermined magnetic field strength are placed adjacent the device, and electric current applied to the electrode terminals (45, 42) in a predetermined direction relative to the magnetic field produces a force necessary to deform the diaphragm (38) and eject an ink droplet from the nozzles (46) of the printing device.
-
公开(公告)号：CA2461327A1
公开(公告)日：2004-09-19
申请号：CA2461327
申请日：2004-03-16
Applicant: XEROX CORP
Inventor： LIN PINYEN , KUBBY JOEL A , GERMAN KRISTINE A , MA JUN , FEINBERG KATHLEEN A , GULVIN PETER M
Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M .times. N optical signal switching system. The optical MEMS switch comprises a plurali ty of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. T he optical MEMS switch utilizes a latching mechanism in association with a thermal dri ve actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs ). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
-
公开(公告)号：CA2460765C
公开(公告)日：2010-07-06
申请号：CA2460765
申请日：2004-03-12
Applicant: XEROX CORP
Inventor： KUBBY JOEL A , FEINBERG KATHLEEN A , GERMAN KRISTINE A , GULVIN PETER M , MA JUN , LIN PINYEN
Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M × N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
-
公开(公告)号：CA2461327C
公开(公告)日：2010-01-12
申请号：CA2461327
申请日：2004-03-16
Applicant: XEROX CORP
Inventor： GULVIN PETER M , LIN PINYEN , FEINBERG KATHLEEN A , MA JUN , GERMAN KRISTINE A , KUBBY JOEL A
Abstract: An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M x N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle . In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.
-
-
-
-
-
-
-
-
-
Search Results
70
records
(took 0.023 seconds)
