公开(公告)号：JPS5530651B2

公开(公告)日：1980-08-12

申请号：JP7798775

申请日：1975-06-24

IPC: H01J37/147 ,  H01J3/26 ,  H01J29/70 ,  H01J29/72 ,  H01J37/305 ,  H01L21/027

公开(公告)号：JPS5530414U

公开(公告)日：1980-02-27

申请号：JP11251478

申请日：1978-08-18

IPC: H01J37/147 ,  H01J3/26 ,  H01J3/38 ,  H01L21/027 ,  H01L21/30

公开(公告)号：JPS5461457A

公开(公告)日：1979-05-17

申请号：JP12833177

申请日：1977-10-25

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： UEDA KAZUHIRO ,  SHIODA MASARU ,  GOTOU MASAHARU

IPC: G21K1/093 ,  H01J3/26 ,  H05H1/22 ,  H05H1/24 ,  H05H7/08

Abstract: PURPOSE:To polarize the ion beam of bundle shape greater in width and thickness toward a given direction with less diffusion, by generating the magnetic field almost orthogonal to the ion beam progressing direction and delivering ion beam with rotary deflection. CONSTITUTION:When the ion beam 101 delivered from the ion source 1 reaches the region subject to the effect of the magnetic field of the deflection magnet 2, lorenz force is operated and the direction of propagation is bent for the ion beam. The magnetic field by the deflection magnet 2 and the direction of progress of the ion beam 101 are set so that the force given on the Y axis to opposite direction is gone inside, and the strength of the magnetic field and the shape of the magnetic field around the edge of the polarized magnet 2 are adjusted, avoiding the diffusion of the ion beam 102 after deflection.

公开(公告)号：JPWO2003107383A1

公开(公告)日：2005-10-20

申请号：JP2004514109

申请日：2003-06-10

Applicant: 株式会社東京大学Tlo

Inventor： 奥村　勝弥 ,  勝弥 奥村 ,  元介 三好 ,  元介 三好

IPC: H01J37/12 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J37/147 ,  H01J37/153 ,  H01J37/16

CPC classification number: H01J37/12 ,  H01J37/147 ,  H01J37/153 ,  H01J2237/1215

Abstract: 本発明は、小型化に適する電子光学鏡筒およびその製造方法を提供する。筒体(1)は、内筒(11)と外筒(12)とを備えている。筒体は、全体として高抵抗導電性のセラミックスにより構成されている。内筒の内面(111)には、静電レンズ(21,22,23,24)が、めっき、蒸着その他の手段により取り付けられている。レンズを構成する電極または電極片(211〜213,221,231,232,241〜243)のうち、共通電位のものは、共通の配線により接続されている。これにより、共通電位の電極または電極片を、まとめて、外部配線に接続することができる。

公开(公告)号：JPH10233193A

公开(公告)日：1998-09-02

申请号：JP3190097

申请日：1997-02-17

Applicant: ORC MFG CO LTD

Inventor： ADACHI NOBUO

IPC: H01J3/06 ,  H01J3/26 ,  H01J63/02 ,  H01J63/08

Abstract: PROBLEM TO BE SOLVED: To provide a compact device having a good operability, facilitate measuring work and selectively use desired single color light by providing an electron beam generation means and a substitute means for pulse-driving electron beams produced by pulses sent from a power source device and emitting a light at an optional timing. SOLUTION: A power source device 10 is composed of a pulse generator 10a, a flyback transformer 10b and others. When an optional pulse is provided to a connection part (electrode) 10c connected to the read side of a discharge container 2, an electron gun 3 as the electron beam generation means is actuated by the pulse and then an electron beam is generated. Since excimer light emission is carried out by the electron beam generated by the pulse, a device is made compact and workability such as easy attachment to an installing position is improved. Also, since filled rare gas is replaced by a substitute means 15, a vacuum ultraviolet excimer light is used according to a work situation.

公开(公告)号：JPH10506225A

公开(公告)日：1998-06-16

申请号：JP51678996

申请日：1994-11-18

IPC: H01J37/145 ,  A61M1/14 ,  G21K1/08 ,  H01J3/12 ,  H01J3/26 ,  H01J23/08 ,  H01J29/58 ,  H01J37/153

公开(公告)号：JPH0528753Y2

公开(公告)日：1993-07-23

申请号：JP5017389

申请日：1989-04-27

IPC: G01R31/302 ,  H01J3/26 ,  H01J37/04 ,  H01J37/09 ,  H01J37/153 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

公开(公告)号：JPS54184015U

公开(公告)日：1979-12-27

申请号：JP8270678

申请日：1978-06-16

IPC: H01J3/26 ,  H01J29/76 ,  H01J29/82 ,  H01J31/26 ,  H01J31/28

公开(公告)号：JPS5245335U

公开(公告)日：1977-03-31

申请号：JP13130875

申请日：1975-09-25

IPC: H01J3/26 ,  H01J29/02 ,  H01J29/86 ,  H01J29/90 ,  H01J31/20 ,  H01J31/46

公开(公告)号：JPS514225U

公开(公告)日：1976-01-13

申请号：JP7532074

申请日：1974-06-25

IPC: H04N5/232 ,  H01J3/26 ,  H01J29/76 ,  H04N5/24