SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH
    331.
    发明公开
    SYSTEM METHOD AND APPARATUS FOR SELECTING AND CONTROLLING LIGHT SOURCE BANDWIDTH 审中-公开
    SYSTEM,VERFAHREN UND VORRICHTUNG ZUR AUSWAHL UND STEUERUNG EINER LICHTQUELLENBANDBREITE

    公开(公告)号:EP2351169A4

    公开(公告)日:2017-08-30

    申请号:EP09822830

    申请日:2009-10-24

    Applicant: CYMER LLC

    Abstract: The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.

    Abstract translation: 带宽选择机构包括安装在色散光学元件的第二面上的第一致动器,第二面与反射面相对,第一致动器具有耦合到第一端块的第一端和耦合到第二端的第二端 所述第一致动器可操作以将相等且相反的力施加到所述第一端块和所述第二端块上,以使所述色散光学元件的所述主体沿所述主体的所述纵向轴线弯曲,并沿垂直于所述反射面的第一方向弯曲 的色散光学元件。 带宽选择机构还包括第二致动器,第二致动器可操作以在垂直于色散光学元件的反射面的第二方向上施加相等且相反的力以沿着主体的纵向轴线弯曲主体。

    IMAGING SPECTROMETER WITH EXTENDED RESOLUTION
    332.
    发明公开
    IMAGING SPECTROMETER WITH EXTENDED RESOLUTION 审中-公开
    具有增强的分辨率成像光谱仪

    公开(公告)号:EP3105559A1

    公开(公告)日:2016-12-21

    申请号:EP15719114.9

    申请日:2015-04-16

    Abstract: Interferometric transform spectrometer (ITS) systems and methods of operation thereof. In one example, an ITS system includes a Michelson interferometer that introduces a varying optical path length difference (OPD) between its two arms so as to produce an interferogram, a detector that receives and samples the interferogram, and a scan controller coupled to the detector and to Michelson interferometer. The scan controller controls the Michelson interferometer to vary the OPD in discrete steps such that the detector provides M samples of the interferogram for each of two scan segments. In the first scan segment, the M samples have a uniform or non-uniform sample spacing and the OPD has a first maximum value. In the second scan segment, the M samples have an incrementally increasing sample spacing and the OPD has a second maximum value that is at least twice the first maximum value.

    MOBILE APPARATUS FOR ANALYZING A SURFACE AREA OF AN OBJECT USING RAMAN SPECTROSCOPY AND FLUORESCENCE
    333.
    发明公开
    MOBILE APPARATUS FOR ANALYZING A SURFACE AREA OF AN OBJECT USING RAMAN SPECTROSCOPY AND FLUORESCENCE 审中-公开
    为对象的表面积分析移动设备上通过拉曼光谱和荧光手段

    公开(公告)号:EP3101412A1

    公开(公告)日:2016-12-07

    申请号:EP15170743.7

    申请日:2015-06-04

    Applicant: rascope AG

    Inventor: Schneider, Urs

    Abstract: The invention relates to an apparatus for analyzing a surface area of an object, comprising: a laser device (10) configured to emit monochromatic incident light (101) of a first wavelength (λ 1 ) as well as optionally a monochromatic incident light (102) of a second wavelength (λ 2 ) that differs from the first wavelength (λ 1 ), a first deflection means (20) configured to deflect said incident light (101, 102) onto a point (P ij (x i , y j )) of a surface area (A) of an object that is to be analyzed so that scattered light (104) is generated at said point (P ij (x i , y j )), wherein said deflection means (20) is further configured to deflect said incident light (101, 102) such that said surface area (A) is scanned in a pointwise fashion by said incident light (101, 102), a first sensor means (40) configured to detect said scattered light (104) and to provide from said detected scattered light (104) a scatter data set (S ij (λ k )) for the respective point (P ij (x i , y j )), wherein the respective scatter data set (S ij (λ k )) comprises intensities of the detected scattered light (104) for different wave numbers, and a processing unit (50) for processing and/or analyzing said data sets. Further, the invention relates to a method for analyzing a surface area of an object.

    Abstract translation: 本发明涉及到用于分析的物体的表面区域,包括:配置成发射第一波长的单色入射光(101)(»1)以及任选的单色入射光的激光装置(10)(102 )的第二波长的(“2)的确不同于第一波长(»1),被配置为到一个点(P IJ偏转所述入射光(101,102)第一偏转装置(20)(XI,YI)) 的物体的表面面积(A)的所做的是要被分析为没有散射光(104)在所述点(P IJ(XI,YI))产生的,worin所述偏转装置(20)进一步被配置为偏转所述 入射光(101,102)求在于所述表面面积(A)在由所述入射光(101,102),被配置为检测所述散射光(104)和以提供第一传感器装置(40)逐点的方式被扫描 从散射光(104),用于所述respectivement点散射的数据集(S IJ(“k))的(P IJ(XI,YI))所述检测到的磨片 纯粹的respectivement散射数据集(S IJ(“K))包括用于不同波数所检测到的散射光(104)的强度,以及用于处理和/或分析的处理单元(50),所述数据集。 此外,本发明涉及一种用于分析对象的表面区域的方法。

    SCANNER DRIVE SYSTEM FOR MICROSPECTROMETER GRATING
    335.
    发明公开
    SCANNER DRIVE SYSTEM FOR MICROSPECTROMETER GRATING 审中-公开
    扫描仪 - 光学仪器仪表(FANNER-ANTRIEBSSYSTEMFÜRMIKROSPEKTROMETER-GITTER)

    公开(公告)号:EP3029440A1

    公开(公告)日:2016-06-08

    申请号:EP15202700.9

    申请日:2007-12-21

    Abstract: A spectrometer is disclosed, which comprises a diffraction grating (204); and a resonant scanner drive system (200) comprising:
    a taut band (202) providing a rotational axis for the diffraction grating (204), wherein the diffraction grating (204) is fastened at a first side of the taut band (202); a permanent magnet (206) fastened to a second side of the taut band (202); and a first and a second spacer (208), wherein the first spacer is provided between the diffraction grating (204) and the taut band (202), wherein the second spacer is provided between the permanent magnet (206) and the taut band (202).

    Abstract translation: 公开了一种光谱仪,其包括衍射光栅(204); 以及谐振扫描器驱动系统(200),包括:提供所述衍射光栅(204)的旋转轴线的拉紧带(202),其中所述衍射光栅(204)紧固在拉紧带(202)的第一侧; 固定在拉紧带(202)的第二侧的永磁体(206); 以及第一和第二间隔件(208),其中所述第一间隔件设置在所述衍射光栅(204)和拉紧带(202)之间,其中所述第二间隔件设置在所述永磁体(206)和拉紧带 202)。

    SPECTRAL MICROSCOPY DEVICE
    336.
    发明公开
    SPECTRAL MICROSCOPY DEVICE 审中-公开
    光谱显微镜装置

    公开(公告)号:EP3004841A1

    公开(公告)日:2016-04-13

    申请号:EP14804707.9

    申请日:2014-05-21

    Abstract: A spectral microscopy device includes a spectral detecting unit including a light source that is capable of controlling an output wavelength, a microscope section that is provided with an observation area that is illuminated with light output from the light source, and a signal detector that detects light from the observation area as spectral data; a moving unit configured to move the observation area; and a controller that performs a control operation to allow the spectral detecting unit and the moving unit to move in response to each other. The spectral microscopy device is controlled so that switching between different measurement conditions is performed at an observation area movement time in which the observation area is moved by the moving unit and measurement is performed and at an observation area movement stoppage time in which the observation area is fixed and measurement is performed.

    Abstract translation: 本发明提供一种光谱显微镜装置,该光谱显微镜装置具备:光谱检测部,其具有能够控制输出波长的光源;显微镜部,其具备被从光源射出的光照射的观察区域;以及信号检测部, 从观测区域获取光谱数据; 移动单元,被配置为移动观察区域; 以及控制器,执行控制操作以允许频谱检测单元和移动单元响应于彼此而移动。 对光谱显微镜装置进行控制,使得在通过移动单元移动观察区域并进行测量的观察区域移动时间和在观察区域移动停止时间的观察区域移动停止时间执行不同测量条件之间的切换 固定并进行测量。

    MONOCHROMATOR MIT SCHWINGUNGSARM BEWEGBAREN OPTISCHEN ELEMENTEN
    337.
    发明公开
    MONOCHROMATOR MIT SCHWINGUNGSARM BEWEGBAREN OPTISCHEN ELEMENTEN 有权
    单声道麻省理工学院BEWEGBAREN OPTISCHEN ELEMENTEN

    公开(公告)号:EP2975369A1

    公开(公告)日:2016-01-20

    申请号:EP15166308.5

    申请日:2015-05-05

    Abstract: Ein Monochromator (1) umfasst zumindest ein gegenüber einfallendem Licht einer Lichtquelle (3) drehbar ausgebildetes optisches Gitter (2); eine Antriebs-Einheit (8) zum Drehen des optischen Gitters (2) mittels einer mit diesem verbundenen Antriebs-Stange (7) um eine Längsachse (9); und eine Steuereinheit (10), welche die Antriebs-Einheit (8) und damit die Drehung des optischen Gitters (2) steuert. Die Antriebs-Einheit (8) des Monochromators (1) umfasst zudem ein erstes Dämpfungs-Element (11) mit zumindest einer elektrisch leitfähigen Fläche und ein zweites Dämpfungs-Element (12), das zumindest ein Magnetfeld mit einer magnetischen Achse (14) bereitstellt, welche die elektrisch leitfähige Fläche durchdringt. Dabei ist das erste oder zweite Dämpfungs-Element (11,12) mit der Antriebs-Stange (7) fest verbunden und mit dieser um deren Längsachse (9) drehbar in Relation zum zweiten oder ersten Dämpfungs-Element (12,11) ausgebildet.

    Abstract translation: 单色仪具有至少一个相对于光源的入射光可旋转的光栅;驱动单元,用于通过围绕纵轴的连接的驱动杆旋转光栅;以及控制单元,用于控制驱动单元和 从而光栅的旋转。 驱动单元还具有带有至少一个导电表面的第一阻尼元件和提供至少一个具有穿过导电表面的磁轴的磁场的第二阻尼元件。 第一和第二阻尼元件中的一个固定到驱动杆上,并且与驱动杆一起围绕其纵向轴线相对于第二或第一阻尼元件中的另一个可旋转。

    Rotating disk reflection for fast wavelength scanning of dispersed broadbend light
    339.
    发明公开
    Rotating disk reflection for fast wavelength scanning of dispersed broadbend light 审中-公开
    Drehscheiben reflexion zur schnellenWellenlängendurchstimmungvon dispergiertem Breitbandlicht

    公开(公告)号:EP2662674A2

    公开(公告)日:2013-11-13

    申请号:EP13179246.7

    申请日:2008-01-17

    Abstract: An apparatus and source arrangement for filtering an electromagnetic radiation can be provided which may include at least one spectral separating arrangement (200) configured to physically separate one or more components (320, 340) of the electromagnetic radiation based on a frequency of the electromagnetic radiation. The apparatus and source arrangement may also have at least one continuously rotating optical arrangement, e.g., a spinning reflector disk scanner (500), which is configured to receive at least one signal that is associated with the one or more components (320, 340). Further, the apparatus and source arrangement can include at least one beam selecting arrangement configured to receive the signal. Rotating disk (500) may comprise reflecting patterns (520) to generate a wavelength scan depending on the rotation frequency of the disk (500).

    Abstract translation: 可以提供用于过滤电磁辐射的装置和源装置,其可以包括至少一个光谱分离装置(200),其被配置为基于电磁辐射的频率物理地分离电磁辐射的一个或多个部件(320,340) 。 装置和源装置还可以具有至少一个连续旋转的光学布置,例如旋转反射器盘扫描器(500),其被配置为接收与一个或多个部件(320,340)相关联的至少一个信号, 。 此外,装置和源装置可以包括被配置为接收信号的至少一个波束选择装置。 旋转盘(500)可以包括反射图案(520),以根据盘(500)的旋转频率产生波长扫描。

    Detection optical system and scanning microscope
    340.
    发明公开
    Detection optical system and scanning microscope 审中-公开
    Optisches Detektionssystem und Rastermikroskop

    公开(公告)号:EP2594979A1

    公开(公告)日:2013-05-22

    申请号:EP12007625.2

    申请日:2012-11-09

    Abstract: Provided is a detection optical system that is provided with a dispersed-light detection function and that can increase the amount of detected light by enhancing the diffraction efficiency. A detection optical system 10 is employed which includes a transmissive VPH diffraction grating 11 that disperses fluorescence from a specimen into a plurality of wavelength bands; a rotating mechanism that rotates the VPH diffraction grating 11 about an axial line L that is perpendicular to an incident optical axis of the fluorescence from the specimen and an emission optical axis from the VPH diffraction grating 11; a light detection portion 15 that detects the fluorescence from the specimen that has been dispersed by the VPH diffraction grating 11; and a correcting portion that corrects an incident position on the light detection portion 15 in accordance with a displacement of the optical axis caused by the rotation of the VPH diffraction grating 11 in synchronization with the rotating mechanism.

    Abstract translation: 提供了一种具有分散光检测功能并且可以通过提高衍射效率来增加检测光量的检测光学系统。 使用检测光学系统10,其包括将来自样本的荧光分散到多个波长带中的透射VPH衍射光栅11; 旋转机构,其使VPH衍射光栅11绕垂直于来自样本的荧光入射光轴的轴线L和来自VPH衍射光栅11的发射光轴旋转; 光检测部分15,其检测来自由VPH衍射光栅11分散的样本的荧光; 以及校正部,其根据与旋转机构同步的VPH衍射光栅11的旋转引起的光轴的位移校正光检测部15上的入射位置。

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