Abstract:
PROBLEM TO BE SOLVED: To simplify a manufacturing method of a DRAM cell by depositing a third conductive layer on a second insulation film after a second opening is formed. SOLUTION: For example, a DRAM cell is formed in an integrated circuit. While on the one hand a capacitor with an electrode in contact with a first region 2-1 in a substrate 1 is formed, on the other hand a contact with a semiconductor region 2-2 in the substrate 1 is formed. That is, an insulator thickness A between the substrate 1 and a third conductive layer 17 is selected to be between a thickness D1 of a first insulation layer 13-1 and a thickness E1 of a second insulation layer 13-2 and to make an upper surface of a second electrode 16 practically flush with an upper surface of the conductive layer 17. Therefore, a third opening 030 and a fourth opening 040 practically have the same depth and flattening can be simplified by reducing a thickness E1 to minimize height difference of an upper surface of the insulation layer 18 between a part covering a region to establish a contact with the region 2-2 and a part covering a region to establish a contact with a second electrode of a capacitor.
Abstract:
PROBLEM TO BE SOLVED: To avoid self-doping by etching a Si substrate by a specified thickness with a silicon chloride compound gas introduced before depositing in the vapor phase epitaxial deposition on the Si substrate having high-concentration dopant regions. SOLUTION: In the vapor phase epitaxial deposition on a Si substrate 1 having dopant regions 6, 7 containing boron at a high concentration, the initial annealing is selectively made and the epitaxial deposition is made for a given time to obtain an epitaxial layer 5 having a desired usual thickness. Before the epitaxial deposition, a silicon chloride compound gas is introduced to etch the Si substrate 1 by a thickness of about 100 nm or less to thereby remove a self-doped layer of boron to the epitaxial layer 5. Thus the self-doping of boron to the epitaxial layer 5 is reduced.
Abstract:
PROBLEM TO BE SOLVED: To judge resistance of a via, by a method wherein, in a position alignment between a path of a metallization layer and the corresponding via, or between the via and the corresponding path, a contact area between the path and the via is corrected with respect to a normal contact area. SOLUTION: First and second path parts 21, 22 are extended to a direction for corresponding vias 24, 25 and come close to all path parts neighboring the via on the same metallization layer from a common side. A continuous part 23 is not placed so that it comes nearer to one of the vias 24, 25 with substantially larger than a width of the via. A contact area is equal irrespective of a direction and an orientation of offsets between a path 20 and the vias 24, 25. All resistances in a part of the predetermined number of vias and paths are calculated, and a value of one via resistance can be obtained, and it is possible to uniformize more the respective via resistances in the entire integrated circuit and to judge an individual via resistance.
Abstract:
PROBLEM TO BE SOLVED: To enable a silicon wafer to be bent without breaking it when a mechanical stress is applied to the wafer by a method wherein the wafer is lessened in thickness as prescribed so as to be flexible, and made to have a restoring force to recover from a deflection. SOLUTION: The first surface of a silicon wafer is subjected to chemical etching and mechanochemical polishing, wherein a holding device is provided to enable the silicon wafer to make an outer cycloid rotary motion to a polishing felt, and molecular adhesion is generated between the second surface of the silicon wafer and the surface of the holding device to enable the holding device to support the wafer to make the wafer as thin as below 80 μm by polishing. The silicon wafer gets flexible to have a restoring force to cover from a deflection. By this setup, integrated circuits formed of the silicon wafer can be improved in mechanical resistance.
Abstract:
PROBLEM TO BE SOLVED: To improve voltage control characteristics in a voltage stabilizing circuit for which a semiconductor element is inserted between input/output terminals. SOLUTION: In this switching D.C. voltage control circuit provided with the input terminal, the output terminal, a reference terminal and a control terminal, a gate turn-off thyristor Th for connecting a main terminal to the input/output terminals, a resistor R connected between the input terminal and the cathode gate of the thyristor Th, a transistor for connecting the main terminal to the cathode gate of the thyristor Th and the reference terminal and an avalanche diode Z connected between the output terminal and the base of the transistor are provided.
Abstract:
PROBLEM TO BE SOLVED: To provide a guided acoustic wave resonant device and a method for producing the device.SOLUTION: The guided acoustic wave resonant device includes at least two filters (F, ..., F), each filter comprising at least two acoustic wave resonators (R-R, ..., R-R), each filter having a useful frequency band (BF, ..., BF) centered on a central frequency (f, ..., f), each resonator comprising at least one suite of mutual meshing type upper electrodes exhibiting a periodic structure of period (Λ) and a layer of piezoelectric material, each resonator having a coupling coefficient and a resonant frequency, wherein at least one of the resonators includes a differentiation layer (CD) making it possible in combination with the period of the mutual meshing type electrodes to modify the coupling coefficient of the resonator, the useful band and the central frequency being determined by the resonant frequencies and the coupling coefficients of the resonators which are adapted so as to have a determined useful bandwidth.
Abstract:
PROBLEM TO BE SOLVED: To provide a resonator that overcomes a marked drop in its frequency during a rise in temperature, and to provide a method of forming the resonator. SOLUTION: The resonator is a bulk-mode resonator including a resonant element 20 that includes a bulk 21 and a columnar portion 24. The columnar portion 24 is formed of a Young's modulus material having a temperature coefficient sign of the bulk material and a temperature coefficient of an opposite sign. Furthermore, the columnar portion 24 is dispersed such that it is vertically long with respect to the vibration direction of a bulk wave, and intercepts the resonant element 20 in the expansion/compression direction of the resonant element 20 to have a continuous part of the bulk 21. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a technology capable of momentarily detecting a spectral inversion from a received signal in a pseudo way. SOLUTION: A process of correction of the spectral inversion for a receiver in a digital communication system: the process allows the reception in the receiver of a training sequence presumably known according to a modulation of type π/2 BPSK or MDP2. The process includes a step of demodulating the training sequence; steps (21, 22, 23) of calculating the differential correlation on a set of N received samples (R n ) and presumably sent samples (S n ) to generate a result; and a step of using the result to detect the beginning of the screen and to order a spectral inversion in the chain of reception of the aforementioned receiver before launching the detection of the beginning of the frame. The process can realize automatic process of the spectral inversion by the receiver. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation:要解决的问题:提供一种能够以伪方式从接收信号瞬时检测频谱反演的技术。 解决方案:数字通信系统中的接收机的频谱反演的校正过程:该过程允许在接收机中接收根据类型π/ 2 BPSK或MDP2可能已知的训练序列。 该过程包括解调训练序列的步骤; 计算一组N个接收样本(R SB> n SB>)和推测发送的样本(S n SB>)之间的差分相关性以产生结果的步骤(21,22,23) ; 以及在开始对帧的开始的检测之前,使用结果来检测屏幕的开始并且在上述接收器的接收链中订购频谱反转的步骤。 该过程可以实现接收机的频谱反演的自动处理。 版权所有(C)2007,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To make it simple to fit a lens to an optical sensor in an optical semiconductor package. SOLUTION: Provided is the optical semiconductor package comprising a support with a passage to receive a ring holding a lens situated facing an optical sensor. The support (6) has, in the passage, at least one local release recess (9), and the ring (7) is equipped peripherally with a locally projecting, elastically deformable means (14). The local release recess and the elastically deformable means are such that, when the ring occupies an angular mounting position, the locally projecting means is engaged in the local recess of the support and, when the ring is swiveled from the angular mounting position, the locally projecting means is moved out of the recess of the support and is compressed against the wall of the passage in order to secure the ring relative to the support. COPYRIGHT: (C)2006,JPO&NCIPI