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公开(公告)号:KR1020130078605A
公开(公告)日:2013-07-10
申请号:KR1020110147630
申请日:2011-12-30
Applicant: 제일모직주식회사
IPC: C09K3/14 , H01L21/304
CPC classification number: C09G1/02 , C09K3/1463 , H01L21/30625 , H01L21/31053
Abstract: PURPOSE: A CMP slurry composite and a grinding method thereof are provided to selectively adjust a grinding speed on a wafer surface composed of a convex part and a concave part and to enlarge the nitration film stopping of secondary grinding. CONSTITUTION: A CMP slurry composite includes a metal oxide particle, a diisocyanate compound, and ultrapure water. The metal oxide particle is formed by calcination, flame oxidation, or thermal synthesis. The metal oxide particle is selected from a group composed of a ceria (CeO2) particle, a silica (SiO2) particle, an alumina (AI2O3) particle, a titania (TiO2) particle, and a zirconia (ZrO2) particle. A grinding method includes a step of grinding a semiconductor wafer by using the CMP slurry composite.
Abstract translation: 目的:提供CMP浆料复合物及其研磨方法,以选择性地调节由凸部和凹部构成的晶片表面的研磨速度,并扩大二次研磨的硝化膜停止。 构成:CMP浆料复合材料包括金属氧化物颗粒,二异氰酸酯化合物和超纯水。 金属氧化物颗粒通过煅烧,火焰氧化或热合成形成。 金属氧化物颗粒选自由二氧化铈(CeO 2)颗粒,二氧化硅(SiO 2)颗粒,氧化铝(Al 2 O 3)颗粒,二氧化钛(TiO 2)颗粒和氧化锆(ZrO 2)颗粒组成的组。 研磨方法包括通过使用CMP浆料复合物研磨半导体晶片的步骤。
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公开(公告)号:KR1020120077908A
公开(公告)日:2012-07-10
申请号:KR1020100140038
申请日:2010-12-31
Applicant: 제일모직주식회사
IPC: C09K3/14 , H01L21/304
Abstract: PURPOSE: A chemical mechanical polishing composition is provided to use two or more kinds of organic acids as a complex agent chelating metal oxide oxidized by an oxidizer, thereby improving chemical mechanical polishing flatness. CONSTITUTION: A chemical mechanical polishing composition comprises 0.01-20.0 weight% of abrasive, 0.01-10.0 weight% of oxidizer, 0.001-10.0 weight% of corrosion inhibitor, 0.1-10.0 weight% of complex agent in which two or kinds of dicarboxylic acids are mixed, and 50-99 weight% of de-ionized water. The complex agent comprises two kinds of dicarboxylic acid of which dissociation constant(pKa) is 4 or less. The complex agent is added by mixing malic acid and malonic acid with the weight ratio of 1:1-0.7:0.3. The composition has pH of 2-6.
Abstract translation: 目的:提供化学机械抛光组合物,使用两种或多种有机酸作为由氧化剂氧化的螯合金属氧化物的复合剂,从而改善化学机械抛光平整度。 构成:化学机械抛光组合物包含0.01-20.0重量%的研磨剂,0.01-10.0重量%的氧化剂,0.001-10.0重量%的缓蚀剂,0.1-10.0重量%的二种或两种二羧酸为 混合,50-99重量%的去离子水。 复合剂包含解离常数(pKa)为4以下的二种二羧酸。 通过以1:1-0.7:0.3的重量比混合苹果酸和丙二酸来加入络合剂。 组合物的pH为2-6。
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公开(公告)号:KR100756816B1
公开(公告)日:2007-09-07
申请号:KR1020060021687
申请日:2006-03-08
Applicant: 제일모직주식회사
IPC: C08F212/08 , C08F212/10 , C08F212/00
CPC classification number: C08F212/10 , C08F2/38 , C08F6/10
Abstract: A styrene-based thermoplastic resin is provided to improve fluidity and appearance and to enhance transparency, thermal stability and mechanical properties. A styrene-based thermoplastic resin is prepared by mixing (A) 50-100 parts by weight of styrene; (B) 0-50 parts by weight of a cyanovinyl compound; and (C) 0.00001-0.02 parts by weight of at least one trifunctional vinyl compound selected from 1,2,4-butanetriol triacrylate, 1,2,4-butanetriol trimethacrylate, glycerol triacrylate, glycerol trimethacrylate, polyoxypropyl-trimethylolpropane triacrylate, polyoxypropyl-trimethylolpropane trimethacrylate, silicone triacrylate, silicone trimethacrylate, 1,3,5-triacrylolhexahydrostriazine, 1,3,5-trimethacrylolhexahydrostriazine, trimethylolethane triacrylate, trimethylolethane trimethacrylate, 1,2,3-trimethylolpropane triacrylate, 1,2,3-trimethylolpropane trimethacrylate, 1,1,1-trimethylolpropane tris(acryloxypropionate), 1,1,1-trimethylolpropane tris(methacryloxypropionate), 1,2,3-trimethylolpropane tris(acryloxypropionate), 1,2,3-trimethylolpropane tris(methacryloxypropionate), tris(2-acryloxyethyl) isocyanurate, tris(2-methacryloxyethyl) isocyanurate, and polyoxypropyltrimethylolpropane triacrylate, based on 100 parts by weight of (A)+(B).
Abstract translation: 提供苯乙烯类热塑性树脂以改善流动性和外观,并提高透明度,热稳定性和机械性能。 苯乙烯类热塑性树脂是通过混合(A)50-100重量份的苯乙烯制备的; (B)0-50重量份的氰基乙烯基化合物; 和(C)0.00001-0.02重量份的至少一种三官能乙烯基化合物,其选自1,2,4-丁三醇三丙烯酸酯,1,2,4-丁三醇三甲基丙烯酸酯,甘油三丙烯酸酯,甘油三甲基丙烯酸酯,聚氧丙基 - 三羟甲基丙烷三丙烯酸酯,聚氧丙基 - 三羟甲基丙烷三甲基丙烯酸酯,硅氧烷三丙烯酸酯,硅氧烷三甲基丙烯酸酯,1,3,5-三烯丙基六氢三嗪,1,3,5-三甲基丙烯酰六氢三嗪,三羟甲基乙烷三丙烯酸酯,三羟甲基乙烷三甲基丙烯酸酯,1,2,3-三羟甲基丙烷三丙烯酸酯,1,2,3-三羟甲基丙烷三甲基丙烯酸酯,1 ,1,1-三羟甲基丙烷三(丙烯酰氧基丙酸酯),1,1,1-三羟甲基丙烷三(甲基丙烯酰氧基丙酸酯),1,2,3-三羟甲基丙烷三(丙烯酰氧基丙酸酯),1,2,3-三羟甲基丙烷三(甲基丙烯酰氧基丙酸酯),三 - 丙烯酰氧基乙基)异氰脲酸酯,三(2-甲基丙烯酰氧基乙基)异氰脲酸酯和聚氧丙基三羟甲基丙烷三丙烯酸酯,基于100重量份的(A)+(B)。
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公开(公告)号:KR100734131B1
公开(公告)日:2007-06-29
申请号:KR1020050078815
申请日:2005-08-26
Applicant: 제일모직주식회사
CPC classification number: C08L55/02 , C08K5/0066 , C08L23/0869 , H05K1/0373 , C08L2666/04
Abstract: 본 발명은 (A) 아크릴로니트릴-부타디엔-스티렌 공중합체(ABS) 수지 100 중량부; (B) 에틸렌/알킬(메타)아크릴레이트 공중합체 0.1∼30 중량부; (C) 할로겐계 화합물 5∼30 중량부; (D) 산화안티몬 1∼15 중량부; 및 (E) 염소유기화합물 1∼10 중량부를 포함하는 내충격성 및 유동성이 우수한 난연성 열가소성 수지 조성물에 관한 것으로, 상기 조성물에는 그 용도 및 필요에 따라 무기 첨가제, 왁스, 금속활제, 산화방지제, 광안정제, 안료 및 염료로 이루어진 군으로부터 선택된 1종 이상의 물질을 필요한 양으로 더 첨가할 수 있다.
아크릴로니트릴-부타디엔-스티렌계 공중합체, 에틸렌/알킬(메타)아크릴레이트 공중합체, 할로겐계 난연제, 산화안티몬, 염소유기화합물, 내충격성, 유동성-
35.
公开(公告)号:KR100557686B1
公开(公告)日:2006-03-07
申请号:KR1020040107892
申请日:2004-12-17
Applicant: 제일모직주식회사
Abstract: 본 발명에 따른 외관성능이 우수한 난연성 아크릴로니트릴-부타디엔-스티렌 공중합체 수지 조성물은 (A) (a
1 ) 고형성분을 기준으로 아크릴로니트릴 5∼40 중량%, 부타디엔 고무 20∼60 중량% 및 스티렌 10∼70 중량%로 이루어지는 아크릴로니트릴-부타디엔-스티렌 공중합체 라텍스 100 중량부 및 (a
2 ) 콜로이드상의 폴리테트라플루오로에틸렌 고형분 기준 0.1∼10 중량부를 혼합하여 제조된 폴리테트라플루오로에틸렌을 함유한 그라프트 아크릴로니트릴-부타디엔-스티렌 공중합체 수지 20∼70 중량%; 및 (B) 아크릴로니트릴 함량이 15∼45 중량%이고, 중량평균분자량이 70,000 내지 300,000인 스티렌-아크릴로니트릴 공중합체 수지 80∼30 중량%;로 이루어지는 기초수지 100 중량부에 대하여, (C) 할로겐계 화합물 5∼30 중량부; (D) 산화안티몬 1∼15 중량부; 및 (E) 염소유기화합물 1∼10 중량부;로 이루어지는 것을 특징으로 한다.
ABS 공중합체, 폴리테트라플루오로에틸렌, 할로겐계 화합물, 염소유기화합물, 산화안티몬, 외관성능, 난연성Abstract translation: 根据本发明的具有优异外观性能的阻燃丙烯腈 - 丁二烯 - 苯乙烯共聚物树脂组合物包含(A)(a
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公开(公告)号:KR1020030093851A
公开(公告)日:2003-12-11
申请号:KR1020020031732
申请日:2002-06-05
Applicant: 제일모직주식회사
CPC classification number: C08K5/03 , C08J2300/22 , C08K3/22 , C08K3/2279 , C08K2003/2282 , C08K2201/003 , C08L55/02 , C08L2201/02
Abstract: PURPOSE: Provided is a fire-retardant thermoplastic resin composition excellent in fluidity, fire retardancy, heat stability, and mechanical properties, which is used for producing interior and exterior parts of various electric and electronic goods and office automation machines. CONSTITUTION: The fire-retardant thermoplastic resin composition comprises: 100pts.wt. of an acrylonitrile-butadiene-styrene copolymer resin containing SAN resin which comprises 70-80wt% of styrene and 20-30wt% of acrylonitrile and has a weight average molecular weight of 80,000-120,000, comprising 5-30wt% of acrylonitrile, 5-30wt% of butadiene rubber, and 40-90wt% of styrene; 5-30pts.wt. of a halogen compound having a weight average molecular weight of 500-2,000; 1-15pts.wt. of antimony oxide; 0.05-10pts.wt. of an aluminosilicate inorganic compound; additionally 0.05-5pts.wt. of a tin malate compound and 1-10pts.wt. of a chlorine compound.
Abstract translation: 目的:提供流动性,阻燃性,热稳定性和机械性能优异的阻燃热塑性树脂组合物,用于制造各种电气电子产品和办公自动化机器的内部和外部部件。 构成:阻燃热塑性树脂组合物包含:100pts.wt。 的含有SAN树脂的丙烯腈 - 丁二烯 - 苯乙烯共聚物树脂,其包含70-80重量%的苯乙烯和20-30重量%的丙烯腈,其重均分子量为80,000-120,000,包含5-30重量%的丙烯腈,5-30重量% 丁二烯橡胶的百分比,和40-90重量%的苯乙烯; 5-30pts.wt。 的重均分子量为500〜2000的卤素化合物; 1-15pts.wt。 的氧化锑; 0.05-10pts.wt。 的硅铝酸盐无机化合物; 另外0.05-5pts.wt。 的苹果酸锡化合物和1-10pts.wt。 的氯化合物。
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