CMP 슬러리 조성물 및 이를 이용한 연마 방법
    1.
    发明公开
    CMP 슬러리 조성물 및 이를 이용한 연마 방법 有权
    CMP浆料组合物和使用其的抛光方法

    公开(公告)号:KR1020140085265A

    公开(公告)日:2014-07-07

    申请号:KR1020120155621

    申请日:2012-12-27

    CPC classification number: C09K3/1409 H01L21/30625

    Abstract: A CMP slurry composition according to the present invention includes ceria particles and deionized water. The ceria particles include pulverized matters of synthetic colloidal ceria particles. Less than 90% of the entire ceria particles have a hexagonal cross-section, and more than 10% of the particles have acute inside angles. Moreover, the surface potential of the ceria particles is 0-50 mV, and an average diameter is 50-130 nm, while having a specific surface area of 15.5-30 m2/g.

    Abstract translation: 根据本发明的CMP浆料组合物包括二氧化铈颗粒和去离子水。 二氧化铈颗粒包括合成胶体二氧化铈颗粒的粉碎物质。 小于90%的整个二氧化铈颗粒具有六边形横截面,并且超过10%的颗粒具有锐角内角。 此外,二氧化铈颗粒的表面电位为0-50mV,平均直径为50-130nm,比表面积为15.5-30m 2 / g。

    난연성 열가소성 수지 조성물
    4.
    发明授权
    난연성 열가소성 수지 조성물 有权
    난연성열가소성수지조성물

    公开(公告)号:KR100654534B1

    公开(公告)日:2006-12-05

    申请号:KR1020050136094

    申请日:2005-12-30

    Abstract: Provided is a flame retardant thermoplastic resin composition which is excellent in weather resistance and flame retardancy without the deterioration of mechanical properties. The thermoplastic resin composition comprises 100 parts by weight of a base resin; 5-30 parts by weight of a halogen-based compound; 1-15 parts by weight of antimony oxide; and 1-10 parts by weight of a chlorine-based organic compound, wherein the base resin comprises (A) an acrylic graft polymer comprising 30-60 wt% of an acrylic synthetic rubber and 40-70 wt% of a copolymer of a cyano vinyl compound and an aromatic vinyl compound; a diene-based graft polymer comprising 30-60 wt% of a diene-based synthetic rubber and 40-70 wt% of a copolymer of a cyano vinyl compound and an aromatic vinyl compound; and a copolymer comprising 20-40 wt% of a cyano vinyl compound and 60-80 wt% of an aromatic vinyl compound.

    Abstract translation: 本发明提供一种阻燃性热塑性树脂组合物,其具有优异的耐候性和阻燃性,而不会降低机械性能。 该热塑性树脂组合物包含100重量份的基础树脂; 5-30重量份的基于卤素的化合物; 1-15重量份的氧化锑; 和1-10重量份的基于氯的有机化合物,其中所述基体树脂包含(A)包含30-60重量%的丙烯酸类合成橡胶和40-70重量%的氰基的共聚物的丙烯酸类接枝聚合物 乙烯基化合物和芳族乙烯基化合物; 二烯类接枝聚合物,其包含30-60重量%的二烯类合成橡胶和40-70重量%的氰基乙烯基化合物和芳族乙烯基化合物的共聚物; 和包含20-40重量%氰基乙烯基化合物和60-80重量%芳族乙烯基化合物的共聚物。

    내충격성 및 내열성이 우수한 난연성 열가소성 수지 조성물
    5.
    发明授权
    내충격성 및 내열성이 우수한 난연성 열가소성 수지 조성물 有权
    耐冲击强度好,耐热性好的阻燃热塑性树脂组合物

    公开(公告)号:KR100475932B1

    公开(公告)日:2005-03-10

    申请号:KR1020020075734

    申请日:2002-12-02

    Inventor: 김동진 최규성

    Abstract: 본 발명의 내충격성과 내열성이 우수한 난연성 열가소성 수지 조성믈은 (A)(a
    1 ) 평균 입자 크기가 0.08-0.18 ㎛인 소입경 고무를 사용하여 그라프트 중합법에 의해 제조된 그라프트 중합체 및 평균입자크기가 0.28-0.38 ㎛인 중입경 고무를 사용하여 그라프트 중합법에 의해 제조된 그라프트 중합체가 40 : 60 내지 80 : 20 중량%의 비율로 구성된 그라프트 ABS 수지 20-50 중량% 및 (a
    2 ) 중량평균분자량이 120,000∼200,000이고, 스티렌 60∼76 중량% 및 아크릴로니트릴 40∼24 중량%로 이루어진 SAN 수지 50-80 중량%로 이루어진 열가소성 아크릴로니트릴-부타디엔-스티렌계 공중합체 수지 100 중량부; (B) 중량평균분자량이 2,000∼10,000 범위인 할로겐계 난연제 5 내지 30 중량부; (C) 산화안티몬 1 내지 15 중량부; 및 (D) 알루미노실리케이트계 무기 화합물 0.05 내지 10 중량부로 이루어진다.

    내충격성, 난연성 및 색상발현성이 우수한아크릴로니트릴-부타디엔-스티렌 공중합체 난연성 수지의조성물
    6.
    发明公开
    내충격성, 난연성 및 색상발현성이 우수한아크릴로니트릴-부타디엔-스티렌 공중합체 난연성 수지의조성물 失效
    丙烯腈 - 丁二烯 - 苯乙烯共聚物阻燃树脂组合物具有优异的耐冲击性,阻燃性和颜色表现

    公开(公告)号:KR1020030056039A

    公开(公告)日:2003-07-04

    申请号:KR1020010086195

    申请日:2001-12-27

    Inventor: 정민영 김동진

    Abstract: PURPOSE: An acrylonitrile-butadiene-styrene copolymer flame retardant resin composition is provided, wherein the composition shows excellent impact resistance, flame retardancy and color expression. CONSTITUTION: The acrylonitrile-butadiene-styrene copolymer resin composition comprises 100 parts by weight of a base resin comprising 20-70 wt% of a graft acrylonitrile-butadiene-styrene copolymer resin, and 30-80 wt% of a styrene-acrylonitrile copolymer resin which is prepared by suspension polymerization or bulk polymerization, contains 15-45 wt% of acrylonitrile and has a weight average molecular weight of 70,000-300,000; 5-30 parts by weight of a halogen-based compound; 0.05-2 or 1-10 parts by weight of a fluorinated organic compound or a chlorinated organic compound; and 0.1-1 parts by weight of antimony trioxide. The graft acrylonitrile-butadiene-styrene copolymer resin comprising the antimony pentoxide is prepared by mixing 100 parts by weight of an acrylonitrile-butadiene-styrene copolymer latex which is prepared by emulsion polymerization, and comprises 5-40 wt% of acrylonitrile, 20-60 wt% of butadiene rubber and 10-70 wt% of styrene based on the solid component without aggregation, dehydration and drying, and 10-50 parts by weight of colloidal antimony pentoxide based on the solid component; and aggregating, dehydrating and drying the obtained one.

    Abstract translation: 目的:提供丙烯腈 - 丁二烯 - 苯乙烯共聚物阻燃树脂组合物,其中组合物显示出优异的耐冲击性,阻燃性和颜色表现。 构成:丙烯腈 - 丁二烯 - 苯乙烯共聚物树脂组合物包含100重量份的包含20-70重量%的接枝丙烯腈 - 丁二烯 - 苯乙烯共聚物树脂的基础树脂和30-80重量%的苯乙烯 - 丙烯腈共聚物树脂 其通过悬浮聚合或本体聚合制备,含有15-45重量%的丙烯腈,其重均分子量为70,000-300,000; 5-30重量份卤素类化合物; 0.05-2或1-10重量份的含氟有机化合物或氯化有机化合物; 和0.1-1重量份的三氧化锑。 包含五氧化二锑的接枝丙烯腈 - 丁二烯 - 苯乙烯共聚物树脂通过混合100重量份通过乳液聚合制备的丙烯腈 - 丁二烯 - 苯乙烯共聚物胶乳,并且包含5-40重量%的丙烯腈,20-60 丁二烯橡胶的重量%和基于固体成分的10-70重量%的苯乙烯,不进行聚合,脱水和干燥,和基于固体组分的10-50重量份胶体五氧化二锑; 并将所得到的聚合,脱水和干燥。

    외관 품질이 우수한 내열성 열가소성 수지조성물
    7.
    发明公开
    외관 품질이 우수한 내열성 열가소성 수지조성물 无效
    耐热性,热塑性树脂组合物具有优异的外观

    公开(公告)号:KR1020030005981A

    公开(公告)日:2003-01-23

    申请号:KR1020010041510

    申请日:2001-07-11

    Inventor: 김동진 하두한

    Abstract: PURPOSE: Provided is a heat resistant, anti-conductive and thermoplastic resin composition containing ABS resin grafted with two different particle size rubber polymers. The small particle size rubber gives good appearance and the middle particle size rubber balances the physical properties. CONSTITUTION: The composition comprises: (A) 20-60wt.% ABS resin consisting of (a1) a graft polymer using the rubber of 0.08-0.18micrometer average particle size and (a2) a graft polymer using the rubber of 0.28-0.38micrometer average particle size, in the weight ratio of 40:60-80:20; (B) 80-40wt.% SAN resin composed of (b1) 30-90wt.% of AMS-based heat resistant SAN resin containing 65-78wt.% of α -methylstyrene and 35-22wt.% of acrylonitrile and (b2) 70-10wt.% of SAN resin with molecular weight of 80,000-120,000 containing 65-78wt.% of styrene and 35-22wt.% of acrylonitrile. On the basis of 100wt.% of above resin composition (A) and (B), the composition optionally comprises (C) 0.1-2.0wt.% of silicon graft copolymer composed of 65-40wt.% of vinyl graft copolymer containing (c1) 35-60wt.% of silicon copolymer with the particle size of 200-400micrometer and (c2) 40-90wt.% of aromatic styrene and 60-10wt.% of vinyl graft copolymer; (D) 0.1-2.0wt.% of heat stabilizer; (E) 0.2-2.0 wt.% of lubricant; (F) and/or 0.4-2.0wt.% of anti-static agent.

    Abstract translation: 目的:提供含有两种不同粒度的橡胶聚合物接枝的ABS树脂的耐热,耐导电和热塑性树脂组合物。 小粒径橡胶具有良好的外观,中等粒度的橡胶平衡了物理性能。 组成:组合物包含:(A)20-60重量%的ABS树脂,其由(a1)使用0.08-0.18微米平均粒度的橡胶的接枝聚合物组成,(a2)使用橡胶的接枝聚合物为0.28-0.38微米 平均粒径,重量比为40:60-80:20; (B)80-40重量%的SAN树脂,其由(b1)30-90重量%的含有65-78重量%的α-甲基苯乙烯和35-22重量%的丙烯腈和(b2)的AMS基耐热SAN树脂组成, 70-10重量%的分子量为80,000-120,000的SAN树脂,其含有65-78重量%的苯乙烯和35-22重量%的丙烯腈。 基于100重量%的上述树脂组合物(A)和(B),组合物任选地包含(C)0.1-2.0重量%的由65-40重量%的乙烯基接枝共聚物组成的硅接枝共聚物,其含有(c1 )35-60重量%的粒径为200-400微米的硅共聚物和(c2)40-90重量%的芳族苯乙烯和60-10重量%的乙烯基接枝共聚物; (D)0.1-2.0重量%的热稳定剂; (E)0.2-2.0重量%的润滑剂; (F)和/或0.4-2.0重量%的抗静电剂。

    텅스텐 패턴 웨이퍼 연마용 CMP 슬러리 조성물 및 이를 이용한 연마 방법
    9.
    发明公开
    텅스텐 패턴 웨이퍼 연마용 CMP 슬러리 조성물 및 이를 이용한 연마 방법 有权
    用于抛光图案波形的CMP浆料组合物和使用其的抛光方法

    公开(公告)号:KR1020120078104A

    公开(公告)日:2012-07-10

    申请号:KR1020100140290

    申请日:2010-12-31

    Abstract: PURPOSE: A CMP(chemical mechanical polishing) slurry composition is provided to remove defects like protrusion, stepped height, edge over erosion, scratch, dishing, SEAM stack, erosion, etc in two polishing steps and to improve planarity. CONSTITUTION: A CMP(chemical mechanical polishing) slurry composition comprises abrasive, a Fe(3+) compound or complex compound, a water-soluble polymer, and an amino acid. The abrasive composition has the polishing rate of a tungsten metal layer of 200-600 Å/min, and the polishing rate of an insulating layer is 600-1500 Å/min. The comprised amount of the Fe3+ compound or the complex compound is 0.1-1.5 weight% based on the composition.

    Abstract translation: 目的:提供CMP(化学机械抛光)浆料组合物,以在两个抛光步骤中去除突起,阶梯高度,边缘过度侵蚀,划痕,凹陷,SEAM叠层,侵蚀等缺陷,并提高平面度。 构成:CMP(化学机械抛光)浆料组合物包含研磨剂,Fe(3+)化合物或络合物,水溶性聚合物和氨基酸。 磨料组合物的钨金属层的抛光速率为200-600 / min,绝缘层的抛光速率为600-1500 / min。 Fe3 +化合物或络合物的含量相对于组合物为0.1〜1.5重量%。

    내후안정성 및 열안정성이 우수한 열가소성아크릴로니트릴-부타디엔-스티렌계 공중합체 난연성 수지조성물
    10.
    发明授权
    내후안정성 및 열안정성이 우수한 열가소성아크릴로니트릴-부타디엔-스티렌계 공중합체 난연성 수지조성물 有权
    阻燃热塑性丙烯腈 - 丁二烯 - 苯乙烯ABS共聚物树脂组合物具有良好的耐紫外线性和良好的热稳定性

    公开(公告)号:KR100583170B1

    公开(公告)日:2006-05-23

    申请号:KR1020030091835

    申请日:2003-12-16

    Inventor: 김동진 이규철

    Abstract: 본 발명은 아크릴로니트릴-부타디엔-스티렌계 공중합체에 브로미네이티드 에폭시 올리고머(Brominated epoxy oligomer)와 2,4,6-트리(2,4,6-트리브로모페녹시)-1,3,5-트리아진을 난연제로, 산화안티몬계 화합물을 난연보조제로, 틴말레이트계 화합물을 열안정제로 사용하고, 염소계 화합물을 충격보강재로 사용함으로써 제조되는 우수한 내후안정성과 열안정성을 보유하는 난연성 아크릴로니트릴-부타디엔-스티렌계 공중합체 수지 조성물에 관한 것이다.
    아크릴로니트릴-부타디엔-스티렌계 공중합체, 브로미네이티드 에폭시 올리고머(Brominated epoxy oligomer), 2,4,6-트리(2,4,6-트리브로모페녹시)-1,3,5-트리아진, 산화안티몬, 틴말레이트, 내후안정성, 열안정성, 난연성

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