公开(公告)号：KR1020020062420A

公开(公告)日：2002-07-26

申请号：KR1020010003412

申请日：2001-01-20

Applicant: 한국과학기술연구원

Inventor： 최원국 ,  정형진 ,  송종한 ,  송재훈 ,  권순남 ,  황정남

IPC: H01J37/30

CPC classification number: H01J37/317 ,  H01J37/34 ,  H01J2237/31701

Abstract: PURPOSE: A gas cluster ion accelerator is provided to generate gas cluster by using adiabatic expansion and readily adjust acceleration energy of gas cluster. CONSTITUTION: A gas cluster ion accelerator comprises a cluster generating unit, an ionizing unit(32), a lens unit(52), a cluster measuring unit(36), an accelerating unit(54) and scanning units(56,58). The cluster generating unit jets gas from high pressure to low pressure under adiabatic expansion condition to convert the gas to cluster state. The ionizing unit(32) ionizes the cluster from the cluster generating unit. The lens part(52) adjusts focus of the ionized cluster from the ionizing unit(32). The cluster measuring unit(36) measures size of the ionized cluster from the lens part(52). The accelerating unit accelerates the ionized cluster. The scanning units(56,58) scan the accelerated ionized cluster from the accelerating unit(54) onto a target(75).

Abstract translation: 目的：提供气体聚集离子加速器，通过绝热膨胀产生气体簇，容易调节气体团簇的加速能。 构成：气体簇离子加速器包括簇生成单元，离子化单元（32），透镜单元（52），簇测量单元（36），加速单元（54）和扫描单元（56,58）。 集群发电机组在绝热膨胀条件下将气体从高压到低压喷射，将气体转化为集束状态。 离子化单元（32）使簇从簇生成单元离子化。 透镜部分（52）从电离单元（32）调节离子簇的聚焦。 簇测量单元（36）测量来自透镜部分（52）的电离簇的尺寸。 加速单元加速电离簇。 扫描单元（56,58）将加速的离子簇从加速单元（54）扫描到目标（75）上。

公开(公告)号：KR1020020049493A

公开(公告)日：2002-06-26

申请号：KR1020000078678

申请日：2000-12-19

Applicant: 한국과학기술연구원

Inventor： 강병권 ,  이석 ,  박윤호 ,  김선호 ,  우덕하 ,  양정수 ,  송종한

IPC: G02B26/02

CPC classification number: G02B5/1857 ,  G03H2260/14

Abstract: PURPOSE: A method for generating a large area holographic grating and an apparatus thereof are provided, which fabricates a large area grating below an effective area of a lens as using an optical system of small caliber. CONSTITUTION: A light projected by an ultraviolet ray laser(10) of a single wavelength is focused to a pin hole(14) with an object lens(12) and then passes through a spatial lens removing noise in the air, and then the beam extended using a collimating lens(16) and passes through an inverse Gaussian transparent filter(22) and is irradiated to a sample(18) in parallel. The sample is located to have an angle to a path of the light, and a mirror(20) is attached to the sample so that a reflected light has a specific angle with the incident light to control an interval of an interference pattern.

Abstract translation: 目的：提供一种用于生成大面积全息光栅的方法及其装置，其使用小口径光学系统在透镜的有效区域下方制造大面积的光栅。 构成：将由单一波长的紫外线激光器（10）投影的光聚焦到具有物镜（12）的针孔（14），然后通过空间透镜去除空气中的噪声，然后将光束 使用准直透镜（16）延伸并通过反相高斯透明滤光器（22）并且平行地照射到样品（18）。 样品被定位成与光的路径成一角度，并且反射镜（20）附着到样品上，使得反射光与入射光具有特定的角度，以控制干涉图案的间隔。