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公开(公告)号：KR1020110009849A
公开(公告)日：2011-01-31
申请号：KR1020090067270
申请日：2009-07-23
Applicant: 한국표준과학연구원
Abstract: PURPOSE: A vacuum pump, an operation method thereof and a gas transport unit are provided to easily implement a vacuum condition by being placed near a container to be evacuated. CONSTITUTION: A vacuum pump comprises a main valve(16), an exhaust valve(18) and a thermal pumping part. The main valve is connected to a main container. The exhaust valve discharges the gas from the main container. The thermal pumping part is arranged between the main valve and the exhaust valve and includes a pumping container(10) and a temperature control unit(12) which heats and cools the pumping container.
Abstract translation: 目的：提供一种真空泵及其操作方法和气体输送单元，通过放置在要抽真空的容器附近来容易地实现真空状态。 构成：真空泵包括主阀（16），排气阀（18）和热泵送部件。 主阀连接到主容器。 排气阀从主容器排出气体。 热泵部分设置在主阀和排气阀之间，并包括一个泵送容器（10）和一个加热和冷却泵送容器的温度控制单元（12）。
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公开(公告)号：KR100989140B1
公开(公告)日：2010-10-20
申请号：KR1020080021062
申请日：2008-03-06
Applicant: 한국표준과학연구원
Abstract: 본 발명은 산화아연 나노와이어에 전이금속을 도핑하는 방법에 관한 것으로, 상세하게는 a) 기판 상부에 아연박막을 형성시키는 단계; b) 아연박막이 형성된 기판을 아연염, 환원제 및 전이금속염을 함유하는 수용액에 침지하는 단계; 및 c) 상기 수용액에 초음파를 가하여 상기 아연박막 상에 전이금속이 도핑된 산화아연 나노와이어를 생성 및 성장시키는 단계;를 포함하는 특징이 있다.
초음파, 공동효과, 산화아연, 나노와이어, 불순물, 전이금속, 도핑-
公开(公告)号：KR1020100016911A
公开(公告)日：2010-02-16
申请号：KR1020080076562
申请日：2008-08-05
Applicant: 한국표준과학연구원
CPC classification number: H01J37/32183 , H01J37/3211 , H01J37/32532 , H01J37/32669 , H01J2237/33 , H05H1/46 , H05H2001/4667 , H05H2001/4682
Abstract: PURPOSE: A chamber inner type plasma generating device is provided to generate a high density plasma by minimizing a loss due to a skin layer. CONSTITUTION: A first power source part(152) supplies an electric power. A first matching circuit part(142) is serially connected to the first power source part. A transformer part(130) comprises a first coil(132) and a second coil(134). A chamber part(100) confines a plasma. An induction coil part(122) is arranged inside the chamber part. The first coil is electrically connected to the first matching circuit part. The second coil is electrically connected to the induction coil part. The transformer part reduces a voltage applied in the induction coil part. The transformer part increases a current applied in the induction coil part.
Abstract translation: 目的：提供室内型等离子体产生装置，以通过最小化由皮肤层引起的损失来产生高密度等离子体。 构成：第一电源部分（152）提供电力。 第一匹配电路部分（142）串联连接到第一电源部分。 变压器部件（130）包括第一线圈（132）和第二线圈（134）。 室部分（100）限制等离子体。 感应线圈部分（122）布置在腔室部分的内部。 第一线圈电连接到第一匹配电路部分。 第二线圈电连接到感应线圈部分。 变压器部分减小施加在感应线圈部分中的电压。 变压器部分增加施加在感应线圈部分中的电流。
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公开(公告)号：KR1020090074589A
公开(公告)日：2009-07-07
申请号：KR1020080000426
申请日：2008-01-02
Applicant: 한국표준과학연구원
Abstract: A method for measuring the size distribution of particle and a recording medium storing a program to implement the method are provided to accurately and successively measure the size distribution of the particle includes in aerosol. A method for measuring the size distribution of particle comprises: a step of passing purifier and aerosol through a DMA(differential mobility analyzer)(S30); a step of measuring the discharge voltage and inner pressure of the DMA(S40); a step of separating the particle included in the aerosol to a specific collection of particles of m(S50); a step of getting an electrical mobility centroid of a DMA transfer function belonging to a K particle collection(S70); a step of estimating the electrical mobility distribution of the particle charged at the charging step(S80); a step of estimating the total particle number concentration of the separated K particle collections(S90); a step of estimating the electrical mobility distribution of the particle before the charging step(S120); and a step of measuring the size distribution of the particle included in the aerosol(S130).
Abstract translation: 提供用于测量颗粒尺寸分布的方法和存储用于实施该方法的程序的记录介质，以精确地并连续地测量气溶胶中颗粒的尺寸分布。 用于测量颗粒尺寸分布的方法包括：通过DMA（差示迁移率分析仪）使净化器和气溶胶通过的步骤（S30）; 测量DMA的放电电压和内部压力的步骤（S40）; 将包含在气溶胶中的颗粒分离成m的特定颗粒集合的步骤（S50）; 获得属于K粒子收集的DMA传递函数的电移动质心的步骤（S70）; 估计在充电步骤中充电的颗粒的电迁移率分布的步骤（S80）; 估计分离的K颗粒收集物的总颗粒数浓度的步骤（S90）; 在充电步骤之前估计颗粒的电迁移率分布的步骤（S120）; 以及测量包含在气溶胶中的颗粒的尺寸分布的步骤（S130）。
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公开(公告)号：KR1020090036636A
公开(公告)日：2009-04-15
申请号：KR1020070101765
申请日：2007-10-10
Applicant: 한국표준과학연구원
IPC: H01L21/02
Abstract: A structure for diagnosis system of reaction process is provided to easily control the incident window of the analytical laboratory and temperature of the emergent window according to the temperature of by-product. The by-product is stored in the analytical laboratory(4130). The incident window(4131) and emergent window(4122) are installed at the analytical laboratory. The light ray is delivered to the analytical laboratory through the incident window and emergent window. The first gas receiver(4110) is formed in the outer side surface of the analytical laboratory. The first gas receiver is connected with the second gas receiver. The receiving part incident window(4111) is installed at the first gas receiver. The light ray is delivered to the first gas receiver through the receiving part incident window. The receiving part emergent window is installed at the second gas receiver.
Abstract translation: 提供反应过程诊断系统的结构，根据副产品的温度，轻松控制分析实验室的入口窗口和出风口的温度。 副产物储存在分析实验室（4130）。 事件窗口（4131）和紧急窗口（4122）安装在分析实验室。 光线通过事件窗口和紧急窗口传送到分析实验室。 第一气体接收器（4110）形成在分析实验室的外侧表面。 第一气体接收器与第二气体接收器连接。 接收部分入射窗口（4111）安装在第一气体接收器处。 光线通过接收部件入射窗口被传送到第一气体接收器。 接收部分紧急窗口安装在第二气体接收器处。
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Patent Agency Ranking
公开(公告)号：KR1020080064661A
公开(公告)日：2008-07-09
申请号：KR1020070001757
申请日：2007-01-05
Applicant: 한국표준과학연구원
IPC: G01F23/296 , G01F23/26 , G01F23/00
CPC classification number: G01F23/296 , G08B3/10 , G08B21/182
Abstract: A liquid level measuring apparatus with a disturbance prevention device is provided to reduce a defect rate of products by surely measuring the level of liquid chemicals in real time while the chemicals are filled in a container. A liquid level measuring apparatus includes a container(200), a liquid level measuring unit, an A/D converter, a controller, an alarm, and a disturbance prevention device(1000). The container contains the liquid chemicals for use in a chemical deposition process. The liquid level measuring unit includes an ultrasonic sensor(510). The ultrasonic sensor is arranged on the bottom of the container for measuring the level of the liquid chemicals. The A/D converter is connected to the liquid level measuring unit and converts analog signals to digital signals. The controller is connected to the A/D converter and checks whether the level of the liquid chemicals is lower than the standard. The alarm is connected to the controller and operates when the level of the liquid chemicals is lower than the standard. The disturbance prevention device prevents disturbance of the liquid chemicals in the container while the liquid chemicals is compensated through a supply pipe(310).
Abstract translation: 提供一种具有防干扰装置的液面测量装置，用于通过在将化学品填充到容器中的同时实时测量液体化学品的水平来减少产品的缺陷率。 液位测量装置包括容器（200），液位测量单元，A / D转换器，控制器，报警器和防扰装置（1000）。 该容器包含用于化学沉积过程的液体化学品。 液位测量单元包括超声波传感器（510）。 超声波传感器布置在容器的底部，用于测量液体化学品的含量。 A / D转换器连接到液位测量单元，并将模拟信号转换为数字信号。 控制器连接到A / D转换器，检查液体化学品的液面是否低于标准。 报警器连接到控制器，当液体化学物质的含量低于标准值时，进行操作。 防扰装置通过供给管（310）补偿液体化学物质，防止容器内的液体化学物质的干扰。
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公开(公告)号：KR1020080064660A
公开(公告)日：2008-07-09
申请号：KR1020070001756
申请日：2007-01-05
Applicant: 한국표준과학연구원
IPC: G01F23/296 , G01F23/28 , G01F23/00
CPC classification number: G01F23/296 , G01F23/60 , G08B3/10 , G08B21/182 , H01L21/0228 , H03M1/001
Abstract: A liquid level measuring apparatus is provided to reduce a defect rate of products by surely measuring the level of liquid chemicals while the chemicals are filled in a container. A liquid level measuring apparatus includes a container(200), a liquid level measuring unit, an A/D converter, a controller, an alarm, and a sub liquid level measuring unit. The container contains the liquid chemicals for use in a chemical deposition process. The liquid level measuring unit includes an ultrasonic sensor(510). The ultrasonic sensor is arranged on the bottom of the container for measuring the level of the liquid chemicals. The A/D converter is connected with the liquid level measuring unit and converts analog signals to digital signals. The controller is connected to the A/D converter and checks whether the level of the liquid chemicals is lower than the standard or not. The alarm is connected to the controller and operates when the level of the liquid chemicals is lower than the standard. The sub liquid level measuring unit is installed to allow the liquid level measuring unit to accurately measure the level despite disturbance of the liquid chemicals.
Abstract translation: 提供了一种液位测量装置，用于通过在化学品被填充到容器中时可靠地测量液体化学品的水平来降低产品的缺陷率。 液位测量装置包括容器（200），液位测量单元，A / D转换器，控制器，报警器和副液位测量单元。 该容器包含用于化学沉积过程的液体化学品。 液位测量单元包括超声波传感器（510）。 超声波传感器布置在容器的底部，用于测量液体化学品的含量。 A / D转换器与液位测量单元连接，将模拟信号转换为数字信号。 控制器连接到A / D转换器，检查液体化学品的液位是否低于标准。 报警器连接到控制器，当液体化学物质的含量低于标准值时，进行操作。 副液位测量单元被安装以允许液位测量单元精确地测量水平，尽管液体化学物质的干扰。
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公开(公告)号：KR100805879B1
公开(公告)日：2008-02-20
申请号：KR1020060061055
申请日：2006-06-30
Applicant: 한국표준과학연구원
IPC: H01L21/02 , H01L21/66 , H01L21/3065
CPC classification number: H05H1/0062
Abstract: 본 발명은 플라즈마 전자밀도 및 전자온도 모니터링 장치 및 방법에 관한 것으로, 일련되는 주파수 대역의 전자파가 연속 송출되는 전자파 발생기; 상기 전자파 발생기의 전자파가 반응용기 내의 플라즈마에 대해 상관 관계를 갖도록 상기 반응용기 내에 접속되고 상기 전자파 발생기에 전기적으로 연결되어 전자파를 송출하는 전자파 송수신기; 상기 전자파 송수신기로부터 수신되는 전자파의 주파수를 분석하도록 상기 전자파 송수신기에 전기적으로 연결되는 주파수 분석기; 및 상기 전자파의 주파수 대역별 송출 지령과, 상기 분석 데이터에 기초한 상기 전자밀도 및 전자온도와 당해 각 전자파의 상관관계 연산을 위해 상기 전자파 발생기 및 주파수 분석기에 전기적으로 연결되는 컴퓨터;를 포함하여 구성되는 것을 특징으로 한다.
플라즈마, 전자밀도, 전자온도, 컷오프, 주파수, 반도체-
公开(公告)号：KR100379623B1
公开(公告)日：2003-04-08
申请号：KR1020000006469
申请日：2000-02-11
Applicant: 한국표준과학연구원
IPC: G01N33/00
Abstract: PURPOSE: A calorimeter by using a phase shifting temperature and a constant temperature maintaining method are provided to improve precision in measurement of calorie though unifying a base temperature of the calorimeter by using phase shifting temperature of a pure material. CONSTITUTION: A constant temperature is maintained by using phase shifting temperature of a pure material(15). Herein, a device is formed by a constant temperature measuring chamber(11), a pure material store container(14), a heater(16), and an insulating unit(17). Power is supplied to the heater for heating the pure material. Then, the material is molten for maintaining temperature until completing melting performance. Then, a sample is placed on a sample container(12) of the constant temperature measuring chamber. Herein, a heat flow meter(18) in the constant temperature measuring chamber measures temperature of the chamber while using the temperature of the store container as a base temperature. Therefore, a small amount of calorie in the sample is measured.
Abstract translation: 目的：通过使用相移温度和恒温保持方法来提供热量计，以通过使用纯物质的相移温度来统一热量计的基准温度来提高卡路里测量的精度。 构成：恒温通过使用纯物质的相移温度来维持（15）。 此处，装置由恒温测量室（11），纯物质储存容器（14），加热器（16）和绝缘单元（17）形成。 向加热器供电以加热纯物质。 然后，材料被熔化以保持温度直到完成熔化性能。 然后，将样品放置在恒温测量室的样品容器（12）上。 这里，恒温测量室中的热流计（18）在使用存储容器的温度作为基准温度的同时测量室的温度。 因此，测量样品中的少量卡路里。
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