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公开(公告)号：DE60225484D1
公开(公告)日：2008-04-17
申请号：DE60225484
申请日：2002-08-26
Applicant: IBM
Inventor： JAHNES CHRISTOPHER V , LUND JENNIFER L , SAENGER KATHERINE L , VOLANT RICHARD P
Abstract: A micro-electromechanical (MEM) RF switch provided with a deflectable membrane ( 60 ) activates a switch contact or plunger ( 40 ). The membrane incorporates interdigitated metal electrodes ( 70 ) which cause a stress gradient in the membrane when activated by way of a DC electric field. The stress gradient results in a predictable bending or displacement of the membrane ( 60 ), and is used to mechanically displace the switch contact ( 30 ). An RF gap area ( 25 ) located within the cavity ( 250 ) is totally segregated from the gaps ( 71 ) between the interdigitated metal electrodes ( 70 ). The membrane is electrostatically displaced in two opposing directions, thereby aiding to activate and deactivate the switch. The micro-electromechanical switch includes: a cavity ( 250 ); at least one conductive path ( 20 ) integral to a first surface bordering the cavity; a flexible membrane ( 60 ) parallel to the first surface bordering the cavity ( 250 ), the flexible membrane ( 60 ) having a plurality of actuating electrodes ( 70 ); and a plunger ( 40 ) attached to the flexible membrane ( 60 ) in a direction away from the actuating electrodes ( 70 ), the plunger ( 40 ) having a conductive surface that makes electric contact with the conductive paths, opening and closing the switch.
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公开(公告)号：AU2002316298A1
公开(公告)日：2003-12-31
申请号：AU2002316298
申请日：2002-06-14
Applicant: IBM
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公开(公告)号：SG74649A1
公开(公告)日：2000-08-22
申请号：SG1998002939
申请日：1998-08-08
Applicant: IBM
Inventor： BABICH KATHERINA E , BRUNNER TIMOTHY ALLAN , CALLEGARI ALESSANDRO CESARE , GRILL ALFRED , JAHNES CHRISTOPHER V , PATEL VISHNUBHAI VITTHALBHAI
IPC: C01B31/00 , C23C14/06 , G03F7/11 , H01L21/027 , H01L21/3205
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