32.
    发明专利
    未知

    公开(公告)号:DE10065664B4

    公开(公告)日:2005-07-28

    申请号:DE10065664

    申请日:2000-12-29

    Abstract: The integrated ferroelectric or DRAM semiconductor memory configuration has memory cells each with a selection transistor and a capacitor module that can be addressed by the selection transistor. The capacitors of successive memory cells are formed alternately on the front and rear sides of a substrate wafer.

    39.
    发明专利
    未知

    公开(公告)号:DE10153384B4

    公开(公告)日:2007-08-02

    申请号:DE10153384

    申请日:2001-10-30

    Abstract: A memory gate configuration has several gate regions (F1,F2) that are spatially separated from each other by an insulation region (110). Independent claims are also included for the following: (1) semiconductor memory device; and (2) method for fabricating semiconductor memory cell.

    40.
    发明专利
    未知

    公开(公告)号:DE10326805B4

    公开(公告)日:2007-02-15

    申请号:DE10326805

    申请日:2003-06-13

    Abstract: Silicon nanocrystals are applied as storage layer ( 6 ) and removed using spacer elements ( 11 ) laterally with respect to the gate electrode ( 5 ). By means of an implantation of dopant, source/drain regions ( 2 ) are fabricated in a self-aligned manner with respect to the storage layer ( 6 ). The portions of the storage layer ( 6 ) are interrupted by the gate electrode ( 5 ) and the gate dielectric ( 4 ), so that a central portion of the channel region ( 3 ) is not covered by the storage layer ( 6 ). This memory cell is suitable as a multi-bit flash memory cell in a virtual ground architecture.

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