公开(公告)号：US20230324176A1

公开(公告)日：2023-10-12

申请号：US18333821

申请日：2023-06-13

Applicant: INVENSENSE, INC.

Inventor： Doruk Senkal ,  Robert Hennessy ,  Houri Johari-Galle ,  Joseph Seeger

IPC: G01C19/5712 ,  G01C19/5747 ,  G01C19/5762

CPC classification number: G01C19/5712 ,  G01C19/5747 ,  G01C19/5762

Abstract: A dynamically balanced 3-axis gyroscope architecture is provided. Various embodiments described herein can facilitate providing linear and angular momentum balanced 3-axis gyroscope architectures for better offset stability, vibration rejection, and lower part-to-part coupling.

公开(公告)号：US20230192479A1

公开(公告)日：2023-06-22

申请号：US18066802

申请日：2022-12-15

Applicant: INVENSENSE, INC.

Inventor： Joseph Seeger

IPC: B81B7/02 ,  H02M3/07

CPC classification number: B81B7/02 ,  H02M3/07 ,  B81B2201/0221 ,  B81B2201/0257 ,  B81B2203/04 ,  B81B2207/03

Abstract: Embodiments for constant charge or capacitance for capacitive micro-electromechanical system (MEMS) sensors are presented herein. A MEMS device comprises a sense element circuit comprising a bias resistance, a charge-pump, and a capacitive sense element comprising an electrode and a sense capacitance. The charge-pump generates, at a bias resistor electrically coupled to the electrode, a bias voltage that is inversely proportional to a capacitance value comprising a value of the sense capacitance to facilitate maintenance of a nominally constant charge on the electrode. A sensing circuit comprises an alternating current (AC) signal source that generates an AC signal at a defined frequency; and generates, based on the AC signal, an AC test voltage at a test capacitance that is electrically coupled to the electrode. The sense element circuit generates, based on the AC test voltage at the defined frequency, an output signal representing the value of the sense capacitance.

公开(公告)号：US11027967B2

公开(公告)日：2021-06-08

申请号：US16108858

申请日：2018-08-22

Applicant: InvenSense, Inc.

Inventor： Chung-Hsien Lin ,  Joseph Seeger ,  Calin Miclaus ,  Tsung Lin Tang ,  Pei-Wen Yen

IPC: B81B3/00 ,  B81C1/00

Abstract: A sensor includes a substrate, an electrode, a deformable membrane, and a compensating structure. The substrate includes a first side and a second side. The first side is opposite to the second side. The substrate comprises a cavity on the first side. The electrode is positioned at a bottom of the cavity on the first side of the substrate. The deformable membrane is positioned on the first side of the substrate. The deformable membrane encloses the cavity and deforms responsive to external stimuli. The compensation structure is connected to outer periphery of the deformable membrane. The compensation structure creates a bending force that is opposite to a bending force of the deformable membrane responsive to temperature changes and thermal coefficient mismatch.

公开(公告)号：US10794702B2

公开(公告)日：2020-10-06

申请号：US16130695

申请日：2018-09-13

Applicant: INVENSENSE, INC.

Inventor： Doruk Senkal ,  Houri Johari-Galle ,  Joseph Seeger

IPC: G01C19/5712 ,  G01C19/5776 ,  G01C19/5726 ,  G01C25/00

Abstract: A MEMS gyroscope includes a proof mass of a suspended spring mass system that is driven at a drive frequency. The proof mass moves relative to a sense electrode such that an overlap of the proof mass and sense electrode changes during the drive motion. A Coriolis force causes the proof mass to move relative to the sense electrode. The overlap and the movement due to the Coriolis force are sensed, and angular velocity is determined based on the magnitude of a signal generated due to a change in overlap and the Coriolis force.

公开(公告)号：US10649002B2

公开(公告)日：2020-05-12

申请号：US15664521

申请日：2017-07-31

Applicant: INVENSENSE, INC.

Inventor： Matthew Julian Thompson ,  Joseph Seeger ,  Sarah Nitzan

IPC: G01P21/00 ,  G01P15/12 ,  G01L27/00 ,  G01R33/00 ,  G01P15/125

Abstract: Techniques for self-adjusting calibration of offset and sensitivity of a MEMS accelerometer are provided. In one example, a system comprises a first microelectromechanical (MEMS) sensor. The first MEMS sensor comprises: a proof mass coupled to an anchor connected to a reference plane, wherein the proof mass is coupled to the anchor via a first spring and a second spring; a plurality of reference paddles coupled to the anchor; and a plurality of acceleration sensing electrodes disposed on the reference plane, wherein a first area of each of the acceleration sensing electrodes is larger than a second area of each of a plurality of reference electrodes associated with the plurality of reference paddles.

公开(公告)号：US20200057087A1

公开(公告)日：2020-02-20

申请号：US16460901

申请日：2019-07-02

Applicant: INVENSENSE, INC.

Inventor： Joseph Seeger ,  Pradeep Shettigar

IPC: G01P1/00 ,  H03F3/45 ,  G01P15/00

Abstract: Reducing a sensitivity of an electromechanical sensor is presented herein. The electromechanical sensor comprises a sensitivity with respect to a variation of a mechanical-to-electrical gain of a sense element of the electromechanical sensor; and a voltage-to-voltage converter component that minimizes the sensitivity by coupling, via a defined feedback capacitance, a positive feedback voltage to a sense electrode of the sense element—the sense element electrically coupled to an input of the voltage-to-voltage converter component. In one example, the voltage-to-voltage converter component minimizes the sensitivity by maintaining, via the defined feedback capacitance, a constant charge at the sense electrode. In another example, the electromechanical sensor comprises a capacitive sense element comprising a first node comprising the sense electrode. Further, a bias voltage component can apply a bias voltage to a second node of the electromechanical sensor. In yet another example, the electromechanical sensor comprises a piezoelectric sense element.

公开(公告)号：US10451418B2

公开(公告)日：2019-10-22

申请号：US14963526

申请日：2015-12-09

Applicant: InvenSense, Inc.

Inventor： Joseph Seeger

IPC: G01C19/5726 ,  G01C19/5776

Abstract: A system and/or method for utilizing quadrature signals, for example in a MEMS gyroscope, to control drive signal characteristics (e.g., amplitude, etc.). As a non-limiting example, a quadrature signal in a MEMS gyroscope may be isolated and/or processed to generate a drive signal that is used to drive a proof mass. Such a quadrature signal may, for example, be obtained passively as part of general Coriolis signal processing. Also for example, such a quadrature signal may be actively created and/or obtained through the use of electrical and/or mechanical features.

公开(公告)号：US20190033342A1

公开(公告)日：2019-01-31

申请号：US15664521

申请日：2017-07-31

Applicant: INVENSENSE, INC.

Inventor： Matthew Julian Thompson ,  Joseph Seeger ,  Sarah Nitzan

IPC: G01P21/00 ,  G01P15/12 ,  G01L27/00 ,  G01R33/00

Abstract: Techniques for self-adjusting calibration of offset and sensitivity of a MEMS accelerometer are provided. In one example, a system comprises a first microelectromechanical (MEMS) sensor. The first MEMS sensor comprises: a proof mass coupled to an anchor connected to a reference plane, wherein the proof mass is coupled to the anchor via a first spring and a second spring; a plurality of reference paddles coupled to the anchor; and a plurality of acceleration sensing electrodes disposed on the reference plane, wherein a first area of each of the acceleration sensing electrodes is larger than a second area of each of a plurality of reference electrodes associated with the plurality of reference paddles.

公开(公告)号：US09863769B2

公开(公告)日：2018-01-09

申请号：US14678774

申请日：2015-04-03

Applicant: InvenSense, Inc.

Inventor： Ozan Anac ,  Joseph Seeger

IPC: G01C19/5712 ,  G01C19/56 ,  G01C19/5747 ,  G01C19/42 ,  G01C15/14

CPC classification number: G01C19/5712

Abstract: In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.

公开(公告)号：US20180002162A1

公开(公告)日：2018-01-04

申请号：US15620619

申请日：2017-06-12

Applicant: InvenSense, Inc.

Inventor： Matthew Thompson ,  Joseph Seeger

IPC: B81B3/00

CPC classification number: B81B3/0086 ,  B81B7/02 ,  B81B2201/014 ,  B81B2201/0214 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/0271 ,  B81B2201/0292 ,  B81B2201/036 ,  B81B2203/0118 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2207/012 ,  B81C2203/0792 ,  H01H1/0036

Abstract: A system and/or method for utilizing MEMS switching technology to operate MEMS sensors. As a non-limiting example, a MEMS switch may be utilized to control DC and/or AC bias applied to MEMS sensor structures. Also for example, one or more MEMS switches may be utilized to provide drive signals to MEMS sensors (e.g., to provide a drive signal to a MEMS gyroscope).