Abstract:
Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.
Abstract:
PROBLEM TO BE SOLVED: To provide an easy-to-process and inexpensive-to-manufacture fluid flow channel structure with a simple constitution and suitable for a light weight. SOLUTION: Wire materials 14 and 16 with predetermined patterns are arranged between a first block member 10 and a second block member 12, and by integrating the first block member 10, the second block member 12, the wire material 14, and the wire material 16, an airtight or liquid-tight fluid flow channel is formed between these members. COPYRIGHT: (C)2009,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide an elastomer valve structure constructed thin and operating with a minor force and to be fabricated easily compared with processing a silicon substrate, and also to provide a pumping system using the elastomer valve structure. SOLUTION: A first flow channel 30 and a second flow channel 32 laid thereon intersecting perpendicularly are formed in an elastomer block. A diaphragm 25 to form an apex of the first flow channel 30 separates the two flow channels from each other, and forms at the same time, the bottom of the second flow channel 32. The diaphragm 25 repeats the cycle of downward deflection and restitution with variation of the pressure in the second flow channel 32, and thereby the first flow channel 30 constitutes a valve operating system of linear motions. COPYRIGHT: (C)2007,JPO&INPIT
Abstract:
The invention relates to a process for collective manufacturing of cavities and/or membranes (24), with a given thickness d, in a wafer said to be a semiconductor on insulator layer, comprising at least one semiconducting surface layer with a thickness d on an insulating layer, this insulating layer itself being supported on a substrate, this process comprising: - etching of the semiconducting surface layer with thickness d, the insulating layer forming a stop layer, to form said cavities and/or membranes in the surface layer.
Abstract:
Briefly, in accordance with one embodiment of the invention, a switch structure or the like such as a valve, motor, or optical switch, may be constructed based on a thermoresponsive polymer. At a first temperature the thermoresponsive polymer may be in a first volume state, and at a second temperate the thermoresponsive polymer may be in a second volume state. The change in volume of the thermoresponsive polymer may be operative to push or pull the mechanical structures of the switch, valve, motor, optical switch, and so on, to effectuate operation of the structures.
Abstract:
A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.