Fluid flow channel structure and its manufacturing method
    35.
    发明专利
    Fluid flow channel structure and its manufacturing method 有权
    流体通道结构及其制造方法

    公开(公告)号:JP2009074651A

    公开(公告)日:2009-04-09

    申请号:JP2007246021

    申请日:2007-09-21

    Abstract: PROBLEM TO BE SOLVED: To provide an easy-to-process and inexpensive-to-manufacture fluid flow channel structure with a simple constitution and suitable for a light weight. SOLUTION: Wire materials 14 and 16 with predetermined patterns are arranged between a first block member 10 and a second block member 12, and by integrating the first block member 10, the second block member 12, the wire material 14, and the wire material 16, an airtight or liquid-tight fluid flow channel is formed between these members. COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供具有简单构造并且适合于轻量化的易于制造和廉价制造的流体流动通道结构。

    解决方案:具有预定图案的线材14和16布置在第一块构件10和第二块构件12之间,并且通过将第一块构件10,第二块构件12,线材14和 线材16,在这些构件之间形成气密或液密流体流动通道。 版权所有(C)2009,JPO&INPIT

    PROCESS FOR COLLECTIVE MANUFACTURING OF SMALL VOLUME HIGH PRECISION MEMBRANES AND CAVITIES
    38.
    发明申请
    PROCESS FOR COLLECTIVE MANUFACTURING OF SMALL VOLUME HIGH PRECISION MEMBRANES AND CAVITIES 审中-公开
    集中制造小容量高精密膜和CAVIQU的过程

    公开(公告)号:WO2007128705A1

    公开(公告)日:2007-11-15

    申请号:PCT/EP2007/054106

    申请日:2007-04-26

    Abstract: The invention relates to a process for collective manufacturing of cavities and/or membranes (24), with a given thickness d, in a wafer said to be a semiconductor on insulator layer, comprising at least one semiconducting surface layer with a thickness d on an insulating layer, this insulating layer itself being supported on a substrate, this process comprising: - etching of the semiconducting surface layer with thickness d, the insulating layer forming a stop layer, to form said cavities and/or membranes in the surface layer.

    Abstract translation: 本发明涉及一种用于集体制造具有给定厚度d的空腔和/或膜(24)的方法,其中所述晶片被称为绝缘体上半导体层,包括至少一个具有厚度d的半导体表面层 绝缘层本身被支撑在基底上,该方法包括: - 蚀刻具有厚度d的半导体表面层,绝缘层形成停止层,以在表面层中形成所述空腔和/或膜。

    SWITCH STRUCTURES OR THE LIKE BASED ON A THERMORESPONSIVE POLYMER
    39.
    发明申请
    SWITCH STRUCTURES OR THE LIKE BASED ON A THERMORESPONSIVE POLYMER 审中-公开
    基于热敏性聚合物的开关结构或类似结构

    公开(公告)号:WO2006057797A3

    公开(公告)日:2006-08-10

    申请号:PCT/US2005040198

    申请日:2005-11-03

    Inventor: CHEE CHOONG KOOI

    Abstract: Briefly, in accordance with one embodiment of the invention, a switch structure or the like such as a valve, motor, or optical switch, may be constructed based on a thermoresponsive polymer. At a first temperature the thermoresponsive polymer may be in a first volume state, and at a second temperate the thermoresponsive polymer may be in a second volume state. The change in volume of the thermoresponsive polymer may be operative to push or pull the mechanical structures of the switch, valve, motor, optical switch, and so on, to effectuate operation of the structures.

    Abstract translation: 简而言之,根据本发明的一个实施例,可以基于热敏感聚合物构造诸如阀,马达或光开关的开关结构等。 在第一温度下,热响应性聚合物可以处于第一体积状态,并且在第二温度下,温度响应性聚合物可以处于第二体积状态。 温度敏感聚合物的体积变化可用于推动或拉动开关,阀,电动机,光开关等的机械结构以实现结构的操作。

    MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS
    40.
    发明申请
    MICROELECTROMECHANICAL FLEXIBLE MEMBRANE ELECTROSTATIC VALVE DEVICE AND RELATED FABRICATION METHODS 审中-公开
    微电子机电柔性膜静电阀装置及相关制造方法

    公开(公告)号:WO0222492A8

    公开(公告)日:2003-11-20

    申请号:PCT/US0128608

    申请日:2001-09-14

    Abstract: A MEMS valve device driven by electrostatic forces is provided. The MEMS valve device includes a substrate having an aperture formed therein, a substrate electrode, a moveable membrane that overlies the aperture and has an electrode element and a biasing element. Additionally, at least one resiliently compressible dielectric layer is provided to insure electrical isolation between the substrate electrode and electrode element of the moveable membrane. In operation, a voltage differential is established between the substrate electrode and the electrode element of the moveable membrane to move the membrane relative to the aperture to thereby controllably adjust the portion of the aperture that is covered by the membrane. In another embodiment the resiliently compressible dielectric layer(s) have a textured surface; either at the valve seat, the valve seal or at both surfaces. In another embodiment of the invention a pressure-relieving aperture is defined within the substrate and is positioned to underlie the moveable membrane.

    Abstract translation: 提供由静电力驱动的MEMS阀装置。 MEMS阀装置包括其中形成有孔的基板,基板电极,覆盖在孔上并具有电极元件和偏置元件的可移动膜。 此外,提供至少一个可弹性压缩介电层以确保基板电极和可移动​​膜的电极元件之间的电隔离。 在操作中,在基板电极和可移动​​膜的电极元件之间建立电压差以使膜相对于孔移动,从而可控地调节由膜覆盖的孔的部分。 在另一个实施例中,弹性可压缩介电层具有纹理表面; 无论是在阀座,阀门密封件还是在两个表面。 在本发明的另一个实施例中,压力释放孔限定在衬底内并且被定位成可移动膜的下面。

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