公开(公告)号：US2184386A

公开(公告)日：1939-12-26

申请号：US18150537

申请日：1937-12-24

Applicant: RCA CORP

Inventor： HANSELL CLARENCE W

IPC: H01J13/20 ,  H01J61/00

CPC classification number: H01J13/20 ,  H01J61/00 ,  H01J2893/0063 ,  H01J2893/0092

公开(公告)号：KR1020160071231A

公开(公告)日：2016-06-21

申请号：KR1020140178713

申请日：2014-12-11

Applicant: 삼성전자주식회사

Inventor： 김욱래 ,  하시모토코헤이 ,  기무라노부유키 ,  전병환

IPC: H01J65/04 ,  H01J37/244 ,  H01J37/05 ,  H05G2/00 ,  H01L21/027 ,  G01N21/88

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B21/06 ,  G02B21/082 ,  G02B21/16 ,  G02B27/141 ,  G03F7/70616 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008 ,  G01N21/88 ,  H01J37/05 ,  H01J37/244 ,  H01J2893/0063 ,  H01L21/027

Abstract: 본발명의기술적사상은아크방전램프를이용한플라즈마광원에서의문제점을해결할수 있는플라즈마광원, 및고 휘도의균일한광을제공할수 있는조명광학계및 검사장치를제공한다. 그플라즈마광원은펄스레이저를발생시키는펄스레이저발생기; 적외선연속파(Continuous Wave: CW) 레이저를발생시키는 CW 레이저발생기; 상기펄스레이저는투과하거나반사시키고, 상기적외선 CW 레이저는반사하거나투과시키는제1 다이크로익미러(dichroic mirror); 상기펄스레이저에의해플라즈마가점화(ignition)되고상기적외선 CW 레이저에의해플라즈마가유지되며, 상기플라즈마에의해생성된플라즈마광을방출하는챔버; 및상기펄스레이저와상기적외선 CW 레이저는투과시키고상기플라즈마광을반사시키는제2 다이크로익미러;를포함한다.

Abstract translation: 本发明提供一种能够通过使用电弧放电灯，能够提供高亮度的均匀光的照明光学系统和检查装置来解决等离子体光源的问题的等离子体光源。 等离子体光源包括：产生脉冲激光的脉冲激光发生器; 产生红外CW激光的连续波（CW）激光发生器; 第一分色镜，其传送或反射脉冲激光并反射或透射红外CW激光; 通过脉冲激光器点燃等离子体的腔室通过红外CW激光器维持等离子体并发射由等离子​​体产生的等离子体光; 以及第二分色镜，其传输脉冲激光和红外CW激光并反射等离子体光。

公开(公告)号：KR101036860B1

公开(公告)日：2011-05-25

申请号：KR1020100126826

申请日：2010-12-13

Applicant: 박범규

Inventor： 박범규

IPC: F21V21/116 ,  F21V33/00 ,  F21S8/08 ,  F21W111/02 ,  F21W131/103

CPC classification number: F21V21/116 ,  F21S8/085 ,  F21V33/0056 ,  F21W2111/02 ,  F21W2131/103 ,  H01J2893/0063 ,  Y02B20/72

Abstract: PURPOSE: A streetlight using a plasma lamp is provided to obtain visibility by irradiating light from the plasma lamp to a pillar type light guide. CONSTITUTION: A power source(10) includes a plasma generator in a body(11) which is buried in the surface. A lighting unit(20) includes a light guide(21) which guide light by the plasma generated from the power source. A sound unit(30) includes a speaker(31) installed on the lighting unit. A reflector is formed on the upper side of the plasma generator. The reflector is airtightly connected to the light guide with a connector.

Abstract translation: 目的：提供使用等离子体灯的路灯，通过将等离子体灯的光照射到柱状导光体来获得可视性。 构成：电源（10）包括埋在表面中的主体（11）中的等离子体发生器。 照明单元（20）包括通过由电源产生的等离子体引导光的导光体（21）。 声音单元（30）包括安装在照明单元上的扬声器（31）。 反射器形成在等离子体发生器的上侧。 反射器用连接器气密地连接到光导。

公开(公告)号：KR1020140043114A

公开(公告)日：2014-04-08

申请号：KR1020147000517

申请日：2012-06-08

Applicant: 에꼴레 폴리테크닉

Inventor： 실라소리바프헝치셰크프헝수아 ,  말카빅토아흐망 ,  플라코알레산드로페데리코 ,  벨체바미나아이바노바 ,  카할리수벤두

IPC: H05G2/00 ,  H05H1/22

CPC classification number: H05G2/006 ,  A61B6/40 ,  H01J37/32009 ,  H01J37/32669 ,  H01J2237/152 ,  H01J2893/0063 ,  H05G2/00 ,  H05G2/001 ,  H05G2/003 ,  H05G2/008 ,  H05H1/22 ,  H05H1/54 ,  H05H2277/10 ,  H05H2277/11 ,  H05H2277/113

Abstract: 본 발명은 유체 제트를 발생시키기 위한 방법 및 장치뿐만 아니라 상기 유체 제트를 플라즈마로 변환시키기 위한 방법 및 시스템과 상기 시스템의 용도에 관한 것이다. 본 발명에 따르면, 상기 방법은 고압의 급속 솔레노이드 밸브(5)와 그런 후 상기 솔레노이드 밸브의 배출구 개구에 실장된 파이프(7)를 이용해 서브밀리미터 크기이고 원자밀도가 10
20 /㎤ 보다 큰 펄스형 유체 제트(F)를 발생하는 동작을 포함하는 것을 특징으로 한다. 본 발명은 플라즈마 발생기 분야에 이용될 수 있다.

Abstract translation: 一种用于产生脉冲射流的方法和装置，并将射流转换成等离子体。 该方法包括使用高压快速电磁阀和安装在电磁阀的出口上的管道，以产生尺寸为亚毫米的脉冲流体射流，其原子密度大于1020cm- 3。

公开(公告)号：US20240304435A1

公开(公告)日：2024-09-12

申请号：US18591686

申请日：2024-02-29

Applicant: KLA Corporation

Inventor： Ilya Bezel ,  Amir Torkaman

IPC: H01J61/02 ,  H01J61/12

CPC classification number: H01J61/025 ,  H01J61/12 ,  H01J2893/0063

Abstract: A LSP broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source may include a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure for generation of broadband light. The light source may include a tapered window configured to transmit broadband light through an aperture within a wall of the gas containment structure, the tapered window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect light impinging on a peripheral portion of the tapered window away from a portion of the gas containment structure to protect the portion of the gas containment structure.

公开(公告)号：US20230162968A1

公开(公告)日：2023-05-25

申请号：US17968444

申请日：2022-10-18

Applicant: Roland Gesche ,  Sundarajan Mutialu ,  Joachim Scherer

Inventor： Roland Gesche ,  Sundarajan Mutialu ,  Joachim Scherer

IPC: H01J65/04 ,  H01J61/32

CPC classification number: H01J65/044 ,  H01J61/322 ,  H01J2893/0063

Abstract: A plasma light with at least one non-rotating light bulb is disclosed. The light includes a conducting cavity structure with a radiation source input port and a light bulb. The geometry of the cavity is designed to generate electrical fields with time-dependent geometrical designed orientation within parts of the light bulb, while the direction of the radiation fields from the radiation source port caused by a microwave generator to the input port fields is stationary.

公开(公告)号：US10008378B2

公开(公告)日：2018-06-26

申请号：US15069242

申请日：2016-03-14

Applicant: Excelitas Technologies Corp.

Inventor： Rudi Blondia

IPC: G01J5/02 ,  G01N21/05 ,  H01J61/54 ,  H01J61/10 ,  H01J65/04 ,  H01J9/24 ,  H01J61/073 ,  H01J61/16 ,  H01J61/30 ,  H01J61/40 ,  H01J61/28

CPC classification number: H01J61/54 ,  H01J9/247 ,  H01J61/073 ,  H01J61/10 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/40 ,  H01J65/04 ,  H01J2893/0063

Abstract: A sealed high intensity illumination device configured to receive a laser beam from a laser light source and method for making the same are disclosed. The device includes a sealed cylindrical chamber configured to contain an ionizable medium. The chamber has a cylindrical wall, with an ingress and an egress window disposed opposite the ingress window. A tube insert is disposed within the chamber formed of an insulating material. The insert is configured to receive the laser beam within the insert inner diameter.

公开(公告)号：US09642233B2

公开(公告)日：2017-05-02

申请号：US14123791

申请日：2012-06-08

Applicant: Soriba Franciszek (François) Sylla ,  Victor Armand Malka ,  Alessandro Federico Flacco ,  Mina Ivanova Veltcheva ,  Subhendu Kahaly

Inventor： Soriba Franciszek (François) Sylla ,  Victor Armand Malka ,  Alessandro Federico Flacco ,  Mina Ivanova Veltcheva ,  Subhendu Kahaly

IPC: H05G2/00 ,  H05H1/54 ,  H01J37/32 ,  A61B6/00 ,  H05H1/22

CPC classification number: H05G2/006 ,  A61B6/40 ,  H01J37/32009 ,  H01J37/32669 ,  H01J2237/152 ,  H01J2893/0063 ,  H05G2/00 ,  H05G2/001 ,  H05G2/003 ,  H05G2/008 ,  H05H1/22 ,  H05H1/54 ,  H05H2277/10 ,  H05H2277/11 ,  H05H2277/113

Abstract: A method and apparatus for generating a pulsed jet of fluid, and transforming the jet into a plasma. The method includes using a high-pressure rapid solenoid valve, and a pipe mounted on an outlet opening of the solenoid valve to produce a pulsed fluid jet which is sub-millimetric in size, and the atomic density of which is more than 1020 cm−3.

公开(公告)号：US06989629B1

公开(公告)日：2006-01-24

申请号：US11040627

申请日：2005-01-21

Applicant: Leonard E. Klebanoff ,  Daniel J. Rader ,  William T. Silfvast

Inventor： Leonard E. Klebanoff ,  Daniel J. Rader ,  William T. Silfvast

IPC: H01J9/00 ,  H01J61/04

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916 ,  H01J2893/0063

Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

Abstract translation: 用于通过热电泳和静电沉积减轻由放电源产生和分散的碎片的运输的方法和装置。 一个构件位于与放电源的前电极相邻并用于建立其与前电极之间的温度差。 通过在构件和前电极之间流动气体，建立温度梯度，该温度梯度可用于根据热梯度的方向将颗粒碎片热沉沉在构件或前电极上。 在构件和前电极之间建立电场可以通过静电沉积来帮助颗粒沉积。

公开(公告)号：US06888297B2

公开(公告)日：2005-05-03

申请号：US10325997

申请日：2002-12-19

Applicant: Leonard E. Klebanoff ,  William T. Silfvast ,  Daniel J. Rader

Inventor： Leonard E. Klebanoff ,  William T. Silfvast ,  Daniel J. Rader

IPC: G03F7/20 ,  H05G2/00 ,  H01J61/04 ,  G21G4/00

CPC classification number: H05G2/003 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70916 ,  H01J2893/0063

Abstract: Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.

Abstract translation: 用于通过热电泳和静电沉积减轻由放电源产生和分散的碎片的运输的方法和装置。 一个构件位于与放电源的前电极相邻并用于建立其与前电极之间的温度差。 通过在构件和前电极之间流动气体，建立温度梯度，该温度梯度可用于根据热梯度的方向将颗粒碎片热沉沉在构件或前电极上。 在构件和前电极之间建立电场可以通过静电沉积来帮助颗粒沉积。