公开(公告)号：US20170089785A1

公开(公告)日：2017-03-30

申请号：US15371913

申请日：2016-12-07

Applicant: Kionix, Inc.

Inventor： Scott G. Adams ,  Charles W. Blackmer ,  Kristin J. Lynch

IPC: G01L9/00 ,  B81C1/00 ,  B81B3/00 ,  G01L13/00 ,  G01P15/08

CPC classification number: G01L9/003 ,  B81B3/0072 ,  B81B2201/0264 ,  B81B2207/012 ,  B81C1/00 ,  B81C1/00047 ,  B81C1/00666 ,  B81C2201/0167 ,  B81C2201/017 ,  G01L9/0027 ,  G01L9/0055 ,  G01L9/0073 ,  G01L9/008 ,  G01L9/0082 ,  G01L13/00 ,  G01L13/02 ,  G01P15/006 ,  G01P15/08 ,  H01L21/00

Abstract: Techniques are described herein that perform pressure sensing using pressure sensor(s) that include deformable pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. A deformable pressure vessel is a pressure vessel that has at least one curved portion that is configured to structurally deform (e.g., bend, shear, elongate, etc.) based on a pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel.

公开(公告)号：US09465044B2

公开(公告)日：2016-10-11

申请号：US13735815

申请日：2013-01-07

Applicant: Kionix, Inc.

Inventor： Erik Anderson

IPC: G01P3/44 ,  G06F17/00

CPC classification number: G01P3/44 ,  G06F17/00

Abstract: A system and method for estimating angular velocity are provided. The system and method use an accelerometer and magnetometer to estimate an angular velocity in place of a gyroscope in 9-axis sensor fusion to estimate angular orientation. The final angular velocity estimate is constructed from two partially independent angular velocity estimates, one using only magnetometer measurements and the other using only accelerometer measurements. The unobservable portion of each partial angular velocity estimate is provided by a projection from a third complete estimate that uses both accelerometer and magnetometer data.

Abstract translation: 提供了一种用于估计角速度的系统和方法。 该系统和方法使用加速度计和磁力计估计9轴传感器融合中的陀螺仪的角速度来估计角度定向。 最终角速度估计由两个部分独立的角速度估计构成，一个仅使用磁强计测量，另一个仅使用加速度计测量。 每个部分角速度估计的不可观察部分由来自使用加速度计和磁力计数据的第三完整估计的投影提供。

公开(公告)号：US20150276532A1

公开(公告)日：2015-10-01

申请号：US14224535

申请日：2014-03-25

Applicant: Kionix, Inc.

Inventor： Scott G. Adams

IPC: G01L9/00 ,  H01G13/00 ,  H01G5/40

CPC classification number: G01L9/0073 ,  G01L9/0086 ,  G01L9/0095 ,  G01L13/021 ,  G01L13/028 ,  H01G5/40 ,  H01G13/00 ,  Y10T29/43

Abstract: Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop.

Abstract translation: 本文描述了使用压力容器进行基于电容的压力感测的技术。 压力容器是具有限定空隙的横截面的物体。 该空隙具有基于空腔中的空腔压力的变化而变化的形状，其中压力容器的至少一部分悬浮在其中并且压力容器内的容器压力。 压力容器可以形成为封闭环的形状（例如，沿着垂直于横截面的路径），导致环形压力容器。 例如，压力容器的一端可以连接到压力容器的另一端以形成封闭环。

公开(公告)号：US20140297212A1

公开(公告)日：2014-10-02

申请号：US13855341

申请日：2013-04-02

Applicant: KIONIX, INC.

Inventor： Erik ANDERSON

IPC: G01C25/00

CPC classification number: G01C25/005 ,  G01C17/38

Abstract: A method for compensating for a misalignment angle between an accelerometer and a magnetometer includes applying a corrective rotation to collected accelerometer data or magnetometer data based on an estimated misalignment angle between an axis of the accelerometer and an axis of the magnetometer. The method further includes estimating a gravity vector using the corrected accelerometer data and estimating a magnetic field vector using the corrected magnetometer data. Additionally, the method includes calculating a characteristic that is a function of a calculated angle between the estimated gravity vector and the estimated magnetic field. The method also includes calculating a figure of merit over the plurality of times that is a function of the characteristic, and dynamically adjusting the estimated misalignment angle during ordinary use of the electronic device such that the figure of merit converges to a value as the electronic device rotates.

Abstract translation: 用于补偿加速度计和磁力计之间的不对准角度的方法包括基于加速度计的轴线与磁力计的轴线之间的估计的未对准角度对所收集的加速度计数据或磁力计数据进行校正旋转。 该方法还包括使用校正的加速度计数据估计重力矢量并使用校正的磁力计数据估计磁场矢量。 此外，该方法包括计算作为估计重力矢量和估计磁场之间的计算角度的函数的特性。 该方法还包括计算作为特征的函数的多次的品质因数，并且在电子设备的普通使用期间动态地调整估计的未对准角，使得品质因数收敛到电子装置的值 旋转

公开(公告)号：CA2595755C

公开(公告)日：2012-02-07

申请号：CA2595755

申请日：2006-11-16

Applicant: KIONIX INC

Inventor： ADAMS SCOTT G ,  MILLER SCOTT A ,  SHEN-EPSTEIN JUNE ,  EPSTEIN KEITH

IPC: G01P15/18 ,  G01P15/125 ,  H01L21/00

Abstract: In an embodiment of the present invention there is provided a micro-electromechanical (MEMS) accelerometer, including a substrate, a first sensor and a second sensor. The first sensor is configured to measure an acceleration along a first axis parallel to a plane of the substrate. The second sensor is configured to measure an acceleration along an axis perpendicular to the plane of the substrate. The second sensor comprises a first beam, a second beam and a single support structure. The single support structure supports the first and second beams relative to the substrate, wherein the first and second beams circumscribe the first sensor. In another embodiment, the MEMS accelerometer can include a third sensor configured to measure the acceleration along the axis perpendicular to the plane of the substrate. A MEMS accelerometer according to an embodiment of the invention can be insensitive to changes in temperature and/or stresses imposed on the packaging unit.

公开(公告)号：DE60044782D1

公开(公告)日：2010-09-16

申请号：DE60044782

申请日：2000-09-13

Applicant: KIONIX INC ,  MILLISENSOR SYSTEMS AND ACTUAT

Inventor： ADAMS SCOTT G ,  GROVES JAMES ,  CARDARELLI DONATO ,  CARROLL RAYMOND ,  DAUWALTER CHARLES R

IPC: G01C19/56 ,  H01L29/84

公开(公告)号：HK1095781A1

公开(公告)日：2007-05-18

申请号：HK07102903

申请日：2004-12-13

Applicant: ADVION BIOSYSTEMS INC ,  KIONIX INC

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N27/62 ,  B01D20090101 ,  B01D15/08 ,  G01N20090101 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J49/04

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

公开(公告)号：HK1066863A1

公开(公告)日：2005-04-01

申请号：HK04109844

申请日：2004-12-13

Applicant: ADVION BIOSCIENCES INC ,  KIONIX INC

Inventor： MOON JAMES E ,  SCHULTZ GARY A ,  CORSO THOMAS N ,  DAVIS TIMOTHY J ,  GALVIN GREGORY J ,  LOWES STEPHEN

IPC: G01N20060101 ,  B01D20060101 ,  G01N27/62 ,  B01D15/08 ,  G01N30/60 ,  G01N30/72 ,  G01N37/00 ,  H01J20060101 ,  H01J49/04

Abstract: An electrospray device, a liquid chromatography device and an electrospray-liquid chromatography system are disclosed. The electrospray device comprises a substrate defining a channel between an entrance orifice on an injection surface and an exit orifice on an ejection surface, a nozzle defined by a portion recessed from the ejection surface surrounding the exit orifice, and an electrode for application of an electric potential to the substrate to optimize and generate an electrospray; and, optionally, additional electrode(s) to further modify the electrospray. The liquid chromatography device comprises a separation substrate defining an introduction channel between an entrance orifice and a reservoir and a separation channel between the reservoir and an exit orifice, the separation channel being populated with separation posts perpendicular to the fluid flow; a cover substrate bonded to the separation substrate to enclose the reservoir and the separation channel adjacent the cover substrate; and, optionally, electrode(s) for application of a electric potential to the fluid. The exit orifice of the liquid chromatography device may be homogeneously interfaced with the entrance orifice of the electrospray device to form an integrated single system. An array of multiple systems may be fabricated in a single monolithic chip for rapid sequential fluid processing and generation of electrospray for subsequent analysis, such as by positioning the exit orifices of the electrospray devices near the sampling orifice of a mass spectrometer.

公开(公告)号：AU2002358289A8

公开(公告)日：2004-07-22

申请号：AU2002358289

申请日：2002-12-26

Applicant: ADAMS SCOTT ,  KIONIX INC ,  MILLER SCOTT

Inventor： MILLER SCOTT A

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/316 ,  H01L21/762 ,  H01L21/00

Abstract: A method of manufacturing an insulating micro-structure by etching a plurality of trenches in a silicon substrate and filling said trenches with insulating materials. The trenches are etched and then oxidized until completely or almost completely filled with silicon dioxide. Additional insulating material is then deposited as necessary to fill any remaining trenches, thus forming the structure. When the top of the structure is metallized, the insulating structure increases voltage resistance and reduces the capacitive coupling between the metal and the silicon substrate. Part of the silicon substrate underlying the structure is optionally removed further to reduce the capacitive coupling effect. Hybrid silicon-insulator structures can be formed to gain the effect of the benefits of the structure in three-dimensional configurations, and to permit metallization of more than one side of the structure.

公开(公告)号：AU2002358289A1

公开(公告)日：2004-07-22

申请号：AU2002358289

申请日：2002-12-26

Applicant: KIONIX INC ,  MILLER SCOTT A

Inventor： MILLER SCOTT A

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/316 ,  H01L21/762 ,  H01L21/00

Abstract: A method of manufacturing an insulating micro-structure by etching a plurality of trenches in a silicon substrate and filling said trenches with insulating materials. The trenches are etched and then oxidized until completely or almost completely filled with silicon dioxide. Additional insulating material is then deposited as necessary to fill any remaining trenches, thus forming the structure. When the top of the structure is metallized, the insulating structure increases voltage resistance and reduces the capacitive coupling between the metal and the silicon substrate. Part of the silicon substrate underlying the structure is optionally removed further to reduce the capacitive coupling effect. Hybrid silicon-insulator structures can be formed to gain the effect of the benefits of the structure in three-dimensional configurations, and to permit metallization of more than one side of the structure.