公开(公告)号：KR100618907B1

公开(公告)日：2006-09-01

申请号：KR1020050070028

申请日：2005-07-30

Applicant: 삼성전자주식회사

Inventor： 하정환 ,  채윤숙 ,  조한구 ,  강창진 ,  정영재 ,  우상균 ,  류만형

IPC: H01L21/312 ,  H01L21/31 ,  H01L21/027

公开(公告)号：KR1020060083507A

公开(公告)日：2006-07-21

申请号：KR1020050004227

申请日：2005-01-17

Applicant: 삼성전자주식회사

Inventor： 이두열 ,  오석환 ,  하정환 ,  우상균

IPC: H01L21/027 ,  H01L21/324 ,  H01L21/312

CPC classification number: H01L21/0273 ,  G03F7/38

Abstract: 본 발명은 반도체기판상에 일정한 패턴을 형성하기 위한 방법 및 이러한 방법을 이용하여 패턴을 형성하는 장치에 관한 것이다.
본 발명은 반도체기판상에 피식각층이 형성되고 상기 피식각층의 상부면으로 포토레지스트를 도포하여 감광막을 형성하는 단계; 상기 감광막을 마스크를 통과한 광선에 노출하여 노광하는 단계; 상기 반도체기판을 노광후 가열하되 상기 포토레지스트에서 생성되는 이온화입자를 조절함으로써 노광영역의 확산을 제어하는 단계; 상기 감광막을 현상하고 감광막 패턴에 따라 피식각층을 식각하는 단계를 포함하여 이루어지는 것을 특징으로 한다.
본 발명에 의하면, 반도체기판의 패턴 형성시 노광영역의 확산 방향과 확산 정도 등을 정밀하게 제어할 수 있어, 광선에 노출된 노광영역과 노출되지 않은 비노광영역간의 경계를 분명히 할 수 있게 되는 효과가 있다.
반도체기판, 패턴, 식각, 노광, 마스크, 포토레지스트, 광발생제, 산촉매

公开(公告)号：KR1020060060398A

公开(公告)日：2006-06-05

申请号：KR1020040099457

申请日：2004-11-30

Applicant: 삼성전자주식회사

Inventor： 이형래 ,  최상준 ,  하정환 ,  우상균 ,  류만형

IPC: H01L21/027 ,  H01L21/31

CPC classification number: G03F7/091 ,  H01L21/0276

Abstract: 반도체 소자의 반사 방지막 및 이를 이용한 반도체 패턴의 형성 방법을 제공한다. 이 반사 방지막은 반도체 소자의 포토리소그라피 공정시, 빛이 입사된 부분에서 산(acid)을 발생시키는 네가티브(negative) 감광막 아래에 배치된다. 반사 방지막은 빛을 흡수하는 단분자 크로머포어(chromophore), 물 또는/및 현상액에 의해 용해(dissolution) 가능한 수용성 고분자, 및 산(acid) 및 열에 의해 수용성 고분자와 감광막을 교차 결합시키는 가교결합제(crosslinker)를 포함한다. 감광막과 교차 결합된 수용성 고분자는 물 또는/및 현상액에 미용해(non-dissolution)된다.

公开(公告)号：KR100891097B1

公开(公告)日：2009-03-31

申请号：KR1020070086255

申请日：2007-08-27

Applicant: 삼성전자주식회사

Inventor： 김원선 ,  하정환 ,  지성민 ,  정선옥 ,  류만형

IPC: G01N33/53 ,  G01N33/48

CPC classification number: G01N33/54373 ,  B01J19/0046 ,  B01J2219/00432 ,  B01J2219/00443 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00617 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y30/00 ,  C12Q1/6837

Abstract: 프로브를 이용하여 바이오 시료의 성분을 분석하는 바이오칩 및 그 제조 방법이 제공된다. 바이오칩은 기판, 기판 상면 상에 고정된 복수의 프로브, 및 기판의 배면에 형성된 캡핑막을 포함한다.
프로브, 캡핑막, 반사도

公开(公告)号：KR1020090028023A

公开(公告)日：2009-03-18

申请号：KR1020070093281

申请日：2007-09-13

Applicant: 삼성전자주식회사

Inventor： 김원선 ,  하정환 ,  정선옥 ,  지성민 ,  류만형

IPC: G01N33/53 ,  G01N33/50 ,  G01N27/327

CPC classification number: G01N33/588 ,  B01J19/0046 ,  B01J2219/00432 ,  B01J2219/00443 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00617 ,  B01J2219/00621 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00644 ,  B01J2219/00659 ,  B01J2219/00662 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y15/00 ,  B82Y20/00 ,  B82Y30/00 ,  G01N21/6452 ,  G01N33/54386 ,  G02B3/0037

Abstract: A bio-chip is provided to increase a reactivity surface in which a probe is coupled, to increase number of the probe coupled in a probe cell compared with bio-chip to which a same design regulation is applied and to increase detection intensity by amplifying selectively wavelength of light used in data analysis of bio-chip. A bio-chip(1) comprises a substrate(100), a plurality of active pads(120) and a probe(160). The plurality of active pads are formed on the substrate, comprise a surface irregularity(115) and are patterned in order to form a photonic crystal structure. The probe is directly or indirectly coupled to the plurality of active pads. An RMS of surface roughness of the active pad is 0.2 ~ 5nm.

Abstract translation: 提供生物芯片以增加其中探针耦合的反应性表面，以增加与探针细胞相连的探针细胞数量，与使用相同设计规则的生物芯片相比，通过选择性地放大检测强度来增加检测强度 用于生物芯片数据分析的光波长。 生物芯片（1）包括衬底（100），多个有源焊盘（120）和探针（160）。 多个有源焊盘形成在衬底上，包括表面不规则（115）并被图案化以形成光子晶体结构。 探针直接或间接耦合到多个有源焊盘。 有源焊盘表面粗糙度的RMS为0.2〜5nm。

公开(公告)号：KR1020090021614A

公开(公告)日：2009-03-04

申请号：KR1020070086255

申请日：2007-08-27

Applicant: 삼성전자주식회사

Inventor： 김원선 ,  하정환 ,  지성민 ,  정선옥 ,  류만형

IPC: G01N33/53 ,  G01N33/48

CPC classification number: G01N33/54373 ,  B01J19/0046 ,  B01J2219/00432 ,  B01J2219/00443 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00608 ,  B01J2219/00612 ,  B01J2219/00617 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y30/00 ,  C12Q1/6837

Abstract: A method for manufacturing a biochip is provided to improve analysis reliability by preventing a data noise and restraining an undesired coupling phenomenon of linkers or probes on a rear surface of a substrate. A biochip(11) comprises a substrate(100), a plurality of probes(140), and a capping film(150). The plurality of probes are fixed to a front surface(101) of the substrate. The capping film is formed on a rear surface(102) of the substrate. The substrate is a transparent substrate. Reflectance of the capping film is 20% or greater. The capping film can be made of a metal film, a metal nitride film, or a silicon nitride film. The substrate includes a plurality of probe cell areas(I) and non-probes areas(II).

Abstract translation: 提供一种制造生物芯片的方法，通过防止数据噪声并抑制基片后表面上的接头或探针的不期望的耦合现象来提高分析的可靠性。 生物芯片（11）包括基底（100），多个探针（140）和封盖膜（150）。 多个探针固定在基板的前表面（101）上。 覆盖膜形成在基板的后表面（102）上。 基板是透明基板。 覆盖膜的反射率为20％以上。 封盖膜可以由金属膜，金属氮化物膜或氮化硅膜制成。 衬底包括多个探针单元区域（I）和非探针区域（II）。

公开(公告)号：KR1020080109305A

公开(公告)日：2008-12-17

申请号：KR1020070057459

申请日：2007-06-12

Applicant: 삼성전자주식회사

Inventor： 정선옥 ,  최상준 ,  류만형 ,  지성민 ,  하정환 ,  김경선 ,  김원선

IPC: C12Q1/68

CPC classification number: C12Q1/6834 ,  B01J19/0046 ,  B01J2219/00382 ,  B01J2219/00387 ,  B01J2219/00432 ,  B01J2219/00529 ,  B01J2219/00596 ,  B01J2219/00608 ,  B01J2219/00617 ,  B01J2219/00621 ,  B01J2219/00626 ,  B01J2219/00637 ,  B01J2219/00659 ,  B01J2219/00662 ,  B01J2219/00711 ,  B01J2219/00722 ,  B01L3/5027 ,  B01L3/502707 ,  B01L2300/0654 ,  B01L2300/0867 ,  B82Y30/00 ,  C40B50/18 ,  C40B60/08 ,  B01J2219/00605

Abstract: A microarray is provided to reduce the process time by forming a linker coupled with a substrate, and the probe cell region and probe cell isolation area on the substrate. The microarray(101) comprises a substrate(110), a plurality of linkers(120), and the probe(130), wherein the substrate is discriminated into the first area and the second area; the linker is directly coupled to the first area of the substrate, and is not coupled to the second area of the substrate; and the probe is coupled to each linker.

Abstract translation: 提供微阵列以通过形成与底物连接的接头，以及基底上的探针细胞区域和探针细胞隔离区域来减少处理时间。 微阵列（101）包括衬底（110），多个接头（120）和探针（130），其中衬底被区分为第一区域和第二区域; 接头直接耦合到衬底的第一区域，并且不耦合到衬底的第二区域; 并且探针耦合到每个接头。

公开(公告)号：KR1020080075684A

公开(公告)日：2008-08-19

申请号：KR1020070014935

申请日：2007-02-13

Applicant: 삼성전자주식회사

Inventor： 김원선 ,  하정환 ,  지성민 ,  김경선

IPC: C12Q1/68 ,  C12Q1/00

CPC classification number: B01J19/0046 ,  B01J2219/00432 ,  B01J2219/00434 ,  B01J2219/00466 ,  B01J2219/00497 ,  B01J2219/005 ,  B01J2219/00527 ,  B01J2219/00576 ,  B01J2219/00585 ,  B01J2219/00596 ,  B01J2219/00648 ,  B01J2219/00659 ,  B01J2219/00662 ,  B01J2219/00675 ,  B01J2219/00711 ,  B01J2219/00722 ,  B01J2219/00725 ,  B82Y30/00 ,  C12Q1/6837 ,  C12Q1/6841 ,  C12Q2563/155

Abstract: A microarray is provided to couple the increased number of probes per unit area by coupling them on the surface of microparticles with sphere or ellipse shape, and increase the photo intensity detected for identical hybridization intensity due to photonic crystal of microparticles, so that light detection sensitivity of the microarray is improved. A microarray(100) comprises: a substrate(110); a plurality of microparticles(120) located on the substrate, each microparticle being arrayed apart from each other in a single layer and forming photonic crystals; and probes(130) coupled to the microparticles, wherein the microparticle forms photo crystal structure, has inter-particle distance of 150-20,000nm, and diameter of 50-10,000nm or long diameter of 50-10,000nm and contains at least one selected from methyl methacrylate, styrene, dimethyl siloxane, vinyl alcohol, hydroxyl methacrylate, silicon oxide and titanium oxide. Further, the substrate comprises a plurality of probe cell areas and a probe cell separation area for separating the probe cell areas.

Abstract translation: 提供了一种微阵列，通过将它们连接到具有球形或椭圆形状的微粒表面上来连接每单位面积增加的探针，并且增加由于微粒的光子晶体而获得的相同杂交强度检测到的光强度，使得光检测灵敏度 的微阵列得到改善。 微阵列（100）包括：基底（110）; 位于所述基板上的多个微粒（120），每个微粒在单层中彼此分开排列并形成光子晶体; 和耦合到所述微粒的探针（130），其中所述微粒形成光晶体结构，其间距离为150-20,000nm，直径为50-10,000nm或长直径为50-10,000nm，并且包含至少一个选定的 来自甲基丙烯酸甲酯，苯乙烯，二甲基硅氧烷，乙烯醇，羟基甲基丙烯酸酯，氧化硅和氧化钛。 此外，基板包括多个探针单元区域和用于分离探针单元区域的探针单元分离区域。

公开(公告)号：KR100827449B1

公开(公告)日：2008-05-07

申请号：KR1020070012883

申请日：2007-02-07

Applicant: 삼성전자주식회사

Inventor： 지성민 ,  하정환 ,  김경선 ,  김원선 ,  류만형

IPC: C07C205/57 ,  C07C205/34

CPC classification number: C07H19/00 ,  B01J19/0046 ,  B01J2219/00432 ,  B01J2219/00527 ,  B01J2219/00596 ,  B01J2219/00608 ,  B01J2219/00621 ,  B01J2219/00626 ,  B01J2219/00711 ,  B01J2219/00722 ,  B82Y30/00 ,  C07D215/14 ,  C07F9/2408 ,  C07F9/60 ,  C07F9/65515 ,  C07H21/00 ,  C40B50/14 ,  Y02P20/55 ,  Y10T436/143333

Abstract: A photolabile compound, a substrate for an oligomer probe array containing the compound, an oligomer probe array containing the substrate, and their preparation methods are provided to increase the deprotection velocity of a photolabile protecting group, thereby increasing the reaction yield of an oligomer probe array manufacturing process. A photolabile compound is represented by the formula 1, wherein X is a group represented by the formula A (wherein R1 is H, an alkyl group or an acetyl group; and R2 is H, a methyl group, an ethyl group, a propyl group or a phenyl group); and Y is a halogen atom, a hydroxyl group, or a group represented by the formula B (wherein B is an adenine, cytosine, guanine, thymine or uracil group; R3 is H, an amino group, an alkyl group or a phosphine group; R4 is H, a hydroxyl group, -OR5 or -SR5; R5 is an alkyl group, an alkenyl group, an acetal group or a silylether group; R6 is an alkyl group, a phenyl group or a sulfur atom; p is 0-5; and q is 0-10).

Abstract translation: 提供光不稳定化合物，含有该化合物的低聚物探针阵列的底物，含有该底物的低聚物探针阵列及其制备方法，以增加光不稳定保护基团的去保护速度，从而提高低聚物探针阵列的反应产率 制造工艺。 光不稳定化合物由式1表示，其中X为由式A表示的基团（其中R 1为H，烷基或乙酰基; R 2为H，甲基，乙基，丙基 或苯基）; Y是卤素原子，羟基或由式B表示的基团（其中B是腺嘌呤，胞嘧啶，鸟嘌呤，胸腺嘧啶或尿嘧啶基团; R3是H，氨基，烷基或膦基） R4为H，羟基-OR5或-SR5; R5为烷基，烯基，缩醛基或甲硅烷基醚基; R6为烷基，苯基或硫原子; p为0 -5; q为0-10）。

公开(公告)号：KR1020080017765A

公开(公告)日：2008-02-27

申请号：KR1020060079364

申请日：2006-08-22

Applicant: 삼성전자주식회사

Inventor： 김경선 ,  지성민 ,  하정환 ,  김원선 ,  최상준 ,  류만형

IPC: C12Q1/68

CPC classification number: C12Q1/6834 ,  B01J19/0046

Abstract: An oligomer probe array is provided to improve focusing efficiency at exposure by using near-infrared rays having lower energy intensity than ultraviolet rays as exposure source, and form nano probe cell actives, so that it is useful for the microarray and high integration of oligomer probe array. An oligomer probe array comprises: a substrate; an oligomer probe on the substrate; and an active membrane formed as a polymer containing a monomer having a two-photon absorption group, a monomer having a photo-crosslinking functional group and a monomer having a function group capable of coupling with the oligomer probe directly or indirectly, wherein the photo-crosslinking functional group is cinnamoyl group; and the polymer is represented by the formula in which X is a group represented by the structure of an electron donor or electron acceptor-pi electron center-electron donor or electron acceptor, Y is hydroxyl group, aldehyde group, carboxyl group, amino group, amide group, thiol group, halo group or sulfonate group, R1 is hydrogen or C1-4 alkyl group, R2 is C1-4 alkylene group, C1-4 alkoxy group or phenylene group, R3 is C1-8 alkylene group or C1-8 alkoxy group, R4 is hydrogen or methyl group. Further, the active membrane is separated into a plurality of probe cell actives.

Abstract translation: 提供一种低聚物探针阵列，通过使用比紫外线作为曝光源的能量强度低的近红外线，提高曝光时的聚焦效率，形成纳米探针细胞活性物质，从而可用于微阵列和低聚物探针的高度整合 阵列。 低聚物探针阵列包括：基底; 底物上的低聚物探针; 以及作为含有具有双光子吸收基团的单体的聚合物形成的活性膜，具有光交联官能团的单体和能够直接或间接与低聚物探针偶联的官能团的单体，其中， 交联官能团为肉桂酰基; 该聚合物由下式表示，其中X是由电子给体或电子受体-π电子中心 - 电子给体或电子受体的结构表示的基团，Y是羟基，醛基，羧基，氨基， 酰胺基，硫醇基，卤基或磺酸酯基，R 1是氢或C 1-4烷基，R 2是C 1-4亚烷基，C 1-4烷氧基或亚苯基，R 3是C 1-8亚烷基或C 1-8 烷氧基，R4是氢或甲基。 此外，活性膜被分离成多个探针细胞活性物质。