微致动器及其制造方法,以及微驱动阀

    公开(公告)号:CN1572717A

    公开(公告)日:2005-02-02

    申请号:CN200410046586.1

    申请日:2004-06-11

    Abstract: 本发明公开了一种微致动器及其制造方法,以及一种微驱动阀。该微驱动阀包括:在其中部具有一个流体入口的第一阀套;与第一阀套装配在一起以在其中形成一个空间部分并具有一个与第一阀套的流体入口相连通的流体出口的第二阀套;一个安装在该空间部分并在其一侧具有一个微通道用于与流体出口相连通的薄板;多个微驱动构件靠近薄板安装,用于通过有选择的开启和关闭薄板的微通道将从第一阀套的流体入口引入的流体排放到第二阀套的流体出口;一个安装在薄板上用于支撑微动件的微动件悬架;一个安装在微动件上的线圈;一个距线圈一定间隙安装的磁铁;及一个形成于薄板上用于为线圈提供电源的电极部分。

    MIKROMECHANISCHE KOMPONENTE UND VERFAHREN ZU IHRER HERSTELLUNG

    公开(公告)号:EP3174689A1

    公开(公告)日:2017-06-07

    申请号:EP15745164.2

    申请日:2015-07-14

    Abstract: The invention relates to a method for producing micromechanical components (1), wherein a liquid starting material (2) which can be cured by means of irradiation is applied onto a substrate, and a partial volume (21) of the starting material is cured by means of a local irradiation process using a first radiation source in order to produce at least one three-dimensional structure. The three-dimensional structure delimits at least one closed cavity (10), in which at least one part of the liquid starting material (2) is enclosed. The invention further relates to a micromechanical component that contains a liquid starting material (2), which is partly cured by means of irradiation, and at least one cavity (10), in which the liquid starting material (2) is enclosed.

    Abstract translation: 本发明涉及一种用于制造微机械部件(1)的方法,其中通过照射可以固化的液体原料(2)被施加到基板上,并且部分体积(21)的原材料通过 为了产生至少一个三维结构,使用第一辐射源的局部照射过程的装置。 三维结构限定了至少一个封闭空腔(10),其中封闭了液体原料(2)的至少一部分。 本发明还涉及一种微机械部件,该微机械部件含有通过照射而部分固化的液体原料(2)和至少一个封闭液体原料(2)的空腔(10)。

    Methods and apparatus for actuating displays
    46.
    发明公开
    Methods and apparatus for actuating displays 有权
    VERFAHREN UND VORRICHTUNG ZURBETÄTIGUNGVON ANZEIGEN

    公开(公告)号:EP2287110A2

    公开(公告)日:2011-02-23

    申请号:EP10176478.5

    申请日:2006-02-23

    Applicant: Pixtronix Inc.

    Abstract: A display apparatus comprises a modulator for selectively interacting with light in an optical path to form an image on the display apparatus. A controllable first electrostatic actuator provides a first mechanical support for the modulator, the first mechanical support providing a supportive connection from a first location on the modulator to a surface over which the modulator is supported. A second mechanical support provides a supportive connection from a second location on the modulator to the surface. The first electrostatic actuator drives the modulator in a plane substantially parallel to the surface.

    Abstract translation: 显示装置包括用于选择性地与光路中的光相互作用以在显示装置上形成图像的调制器。 可调节的第一静电致动器为调制器提供第一机械支撑,第一机械支撑件提供从调制器上的第一位置到支撑调制器的表面的支撑连接。 第二机械支撑件提供从调制器上的第二位置到表面的支撑连接。 第一静电致动器驱动调制器在大致平行于表面的平面中。

    A method for fabricating a capacitor and a capacitor
    47.
    发明公开
    A method for fabricating a capacitor and a capacitor 有权
    Verfahren zur Herstellung eines Kondensators und Kondensator

    公开(公告)号:EP2023357A1

    公开(公告)日:2009-02-11

    申请号:EP07015541.1

    申请日:2007-08-07

    Abstract: The method comprises fabricating a layer stack on a substrate, the layer stack comprising at least two electrically conducting layers and at least one electrically insulating layer arranged between the two electrically conducting layers, and displacing a first portion of the layer stack away from its original position, the first portion comprising an edge portion of the layer stack, and bending the first portion back towards a second portion of the layer stack. The bending may comprise a rolling-up of the first portion of the layer stack.

    Abstract translation: 该方法包括在衬底上制造层叠层,所述层堆叠包括至少两个导电层和布置在两个导电层之间的至少一个电绝缘层,以及使层堆叠的第一部分远离其原始位置 所述第一部分包括所述层堆叠的边缘部分,并且将所述第一部分向所述层堆叠的第二部分弯曲。 弯曲可以包括层叠体的第一部分的卷起。

    Microelectromechanical actuators including sinuous beam structures
    48.
    发明公开
    Microelectromechanical actuators including sinuous beam structures 审中-公开
    含有微机械致动器sinusformige振动杆结构

    公开(公告)号:EP1170248A3

    公开(公告)日:2003-03-12

    申请号:EP01305660.1

    申请日:2001-06-29

    Abstract: In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet. The bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point of intersection responsive to at least one of compressive force and tensile force on the first and second beams. Related methods are also described.

    Mems variable optical attenuator
    49.
    发明公开
    Mems variable optical attenuator 有权
    MEMS变速器选择器Abschwächer

    公开(公告)号:EP1089109A2

    公开(公告)日:2001-04-04

    申请号:EP00307696.5

    申请日:2000-09-06

    Abstract: A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.

    Abstract translation: 提供了能够在全光范围内进行光衰减的MEMS(微机电系统)可变光衰减器。 MEMS可变光衰减器包括微电子衬底,MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。 可变光衰减器能够使其光轴平行且垂直于衬底的光束衰减。 此外,本发明的MEMS致动器可以包括MEMS致动器的阵列,其能够向光学快门提供更大的位移距离,并且因此具有更宽的光学衰减范围。 在本发明的一个实施例中,MEMS致动器包括热拱形梁致动器。 此外,本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。 该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。 热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。 在激活时,热双压电晶片截取光束的路径,并提供所需的光衰减水平。 本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。

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