-
公开(公告)号：KR1020020026555A
公开(公告)日：2002-04-10
申请号：KR1020027001202
申请日：2000-06-01
Applicant: 한국과학기술연구원
IPC: H01L21/28
CPC classification number: H01L21/76856 , H01L21/28568 , H01L21/76838 , H01L21/76859 , H01L21/76862 , H01L21/76864 , H01L2221/1078
Abstract: PURPOSE: A platinum electrode structure and method for enhancing adhesion between semiconductor substrate and platinum electrode are provided to enhance the adhesion of a Pt thin film by depositing Ti on a semiconductor substrate and modifying the surface of Ti with ion beam of low energy (a few keV), thereby to restrict the influence of an interface resulting from temperature increases. CONSTITUTION: A platinum electrode structure for a semiconductor comprises a semiconductor substrate, a TiN/Ti gradient layer formed at an upper portion of the substrate, and a Pt thin film formed at an upper portion of the gradient layer. A method of enhancing adhesion between a semiconductor substrate and a platinum electrode comprises depositing a Ti seed layer on the semiconductor substrate, forming a TiN/Ti gradient layer by irradiating nitrogen ion beam and injecting reaction gas to the surface of the Ti seed layer, and depositing a Pt thin film on the TiN/Ti gradient layer.
Abstract translation: 目的：提供一种用于增强半导体衬底和铂电极之间的粘附性的铂电极结构和方法，以通过在半导体衬底上沉积Ti来改善Pt薄膜的粘附，并用低能量的离子束（几个 keV），从而限制由温度升高引起的界面的影响。 构成：用于半导体的铂电极结构包括半导体衬底，在衬底的上部形成的TiN / Ti梯度层和形成在梯度层的上部的Pt薄膜。 一种增强半导体衬底和铂电极之间的粘附性的方法包括在半导体衬底上沉积Ti种子层，通过照射氮离子束并将反应气体注入Ti籽晶层的表面形成TiN / Ti梯度层，以及 在TiN / Ti梯度层上沉积Pt薄膜。
-
Patent Agency Ranking52.发明公开이온 보조 반응법을 이용한 폴리올레핀 또는 열가소성수지의 표면 개질과 이를 이용한 나일론수지의 강인화방법 및 고분자 블렌드 조성물 失效使用离子辅助反应的聚烯烃或热塑性树脂的表面改性，粗化尼龙树脂和大分子混合组合物的方法
公开(公告)号：KR1020010048934A
公开(公告)日：2001-06-15
申请号：KR1019990053818
申请日：1999-11-30
Applicant: 한국과학기술연구원
IPC: C08J7/00
Abstract: PURPOSE: A surface reforming of polyolefin or thermoplastic resin using ion assist reaction, method for toughened nylon resin is provided to give compatibility and improve interface adhesive property in manufacturing polyolefin resin, thermoplastic resin and blend of nylon by inducing functional group in polyolefin resin or thermoplastic resin. CONSTITUTION: The surface reforming of polyolefin or thermoplastic resin using ion assist reaction, method for toughened nylon resin is characterized by functionating surface of polyolefin resin powder or thermoplastic resin powder by adding reactivity gas in irradiating ion beam to polyolefin resin or thermoplastic resin powder; blending polyolefin resin powder or thermoplastic resin powder functioned of surface with nylon resin. In this method, quantity of irradiative ion beam ranges from 1*10¬15 to 1* 10¬17ions/cm2, irradiative current density is 2microA/cm¬2, acceleration energy of irradiative ion beam is 1KeV, irradiative ion is oxygen or hydrogen, additive reactivity gas is oxygen and injection quantity of reactivity gas is 0.2-6m/min.
Abstract translation: 目的：提供使用离子辅助反应的聚烯烃或热塑性树脂的表面改性，增韧的尼龙树脂的方法，通过在聚烯烃树脂或热塑性塑料中诱导官能团来提供制造聚烯烃树脂，热塑性树脂和尼龙混合物的相容性和改善界面粘合性 树脂。 构成：使用离子辅助反应的聚烯烃或热塑性树脂的表面改性，增韧尼龙树脂的方法的特征在于，通过向聚烯烃树脂或热塑性树脂粉末照射离子束添加反应性气体，使聚烯烃树脂粉末或热塑性树脂粉末的表面发生功能化; 将聚烯烃树脂粉末或热塑性树脂粉末与尼龙树脂共同作用。 在该方法中，照射离子束的量为1×10 15〜1×10 17 / cm 2，照射电流密度为2微安/厘米2，照射离子束的加速能为1KeV，照射离子为氧或氢 ，添加反应性气体为氧气，反应气体的注入量为0.2-6m / min。
-
公开(公告)号：KR1020010013156A
公开(公告)日：2001-02-26
申请号：KR1019997011139
申请日：1998-11-21
Applicant: 한국과학기술연구원
IPC: C23C4/00
CPC classification number: C23C16/30 , B05D1/62 , B05D5/083 , B05D2201/00 , B05D2203/30 , C23C16/503
Abstract: PURPOSE: A method for surface-processing by plasma polymerization of a surface of a metal by using a DC discharge plasma is provided, to form a polymer with hydrophilicity or hydrophobicity on the surface of the metal. CONSTITUTION: The method comprises the steps of: positioning an anode electrode which is substantially of metal to be surface-processed and a cathode electrode in a chamber; maintaining a pressure in the chamber at a predetermined vacuum level; blowing an unsaturated aliphatic hydrocarbon monomer gas or a fluorine-containing monomer gas at a predetermined pressure and a non-polymerizable gas at a predetermined pressure into the chamber; and applying a voltage to the electrodes in order to obtain a DC discharge, whereby to obtain a plasma consisting of positive and negative ions and radicals generated from the unsaturated aliphatic hydrocarbon monomer gas or the fluorine containing monomer gas and the non-polymerizable gas, and then forming a polymer with hydrophilicity or hydrophobicity on the surface of the anode electrode by plasma deposition.
Abstract translation: 目的：提供通过使用DC放电等离子体通过等离子体聚合金属表面进行表面处理的方法，以在金属的表面上形成具有亲水性或疏水性的聚合物。 构成：该方法包括以下步骤：将基本上要被表面处理的金属和阴极电极的阳极电极定位在腔室中; 将腔室中的压力保持在预定的真空度; 将预定压力的不饱和脂族烃单体气体或含氟单体气体以预定压力的不可聚合气体吹入室中; 向电极施加电压以获得DC放电，从而获得由不饱和脂族烃单体气体或含氟单体气体和非聚合气体产生的正离子和负离子和自由基组成的等离子体，以及 然后通过等离子体沉积在阳极电极的表面上形成具有亲水性或疏水性的聚合物。
-
公开(公告)号：KR100247559B1
公开(公告)日：2000-03-15
申请号：KR1019970005645
申请日：1997-02-24
Applicant: 주식회사 삼양홀딩스 , 한국과학기술연구원
IPC: H05K3/00
Abstract: 본 발명은 불소계수지 함유 지지체를 이용한 인쇄회로 기판의 제조방법에 관한 것으로서, 더욱 상세하게는 불소계 수지로서 특히 폴리테트라플루오로에틸렌을 이용하여 만든 기판지지체의 표면을 개질시킨 후 그 위에 회로패턴마스크를 씌우고 스퍼터링 또는 열증착으로 구리를 접착시켜 회로를 구성하므로써, 종래에 비해 간단한 공정으로 정밀하게 회로를 형성시키면서 에칭용액에 의한 환경오염을 방지할 수 있는 개선된 인쇄회로기판을 제조하는 방법에 관한 것이다.
-
-
公开(公告)号：KR1019960037742A
公开(公告)日：1996-11-19
申请号：KR1019960011994
申请日：1996-04-19
Applicant: 한국과학기술연구원
Abstract: 본 발명은 진공 상태하에, 반응성 가스를 고분자, 세라믹, ITO 또는 유리 표면에 직접 불어 넣어주면서, 에너지를 가진 이온 입자를 고분자, 세라믹, ITO 또는 유리 표면에 조사하여 그 표면의 접촉각을 감소시켜 고분자, 세라믹, ITO 또는 유리 표면을 개질하는 방법에 관한 것이다. 본 발명에 따른 표면 개질 방법은 재료 표면의 접촉각을 크게 감소시킴으로서 수성 물감의 번집 증가, 다른 물질과의 접착력 증가 및 빛의 산란 방지 등을 가져올 수 있어 고분자, 세라믹, ITO 또는 유리의 응용 분야에서 널리 이용될 수 있다.
-
-
-
-
-
Search Results
56
records
(took 0.023 seconds)
