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公开(公告)号：KR1020070061109A
公开(公告)日：2007-06-13
申请号：KR1020060046522
申请日：2006-05-24
Applicant: 한국전자통신연구원
IPC: B81B3/00
CPC classification number: B81B3/0035 , B81B3/0018 , B81B2201/036 , B81B2201/054
Abstract: A thermo-pneumatic micro valve with a membrane is provided to be applied for pumping liquid in a flow control chamber in a predetermined direction through a continuous heating and cooling. A thermo-pneumatic micro valve with a membrane includes a plurality of channels, a flow control chamber(102), a pressure control chamber(107), a pair of temperature control units(105,106), and a membrane(101). The channels are connected with the flow control chamber. The flow control chamber controls the flow and an amount of the fluid in the channels. The pressure control chamber is wrapped by a side wall formed in a second substrate, a top of which is wrapped by the membrane, a bottom of which is wrapped by a temperature control substrate(108). The temperature control unit controls a temperature of a medium of the pressure control chamber. The membrane controls the flow of the fluid of the channels.
Abstract translation: 提供具有膜的热气动微型阀，用于通过连续的加热和冷却将预定方向上的液体泵送到流量控制室中。 具有膜的热气动微型阀包括多个通道，流量控制室（102），压力控制室（107），一对温度控制单元（105,106）和膜（101）。 通道与流量控制室连接。 流量控制室控制通道中的流量和流量。 压力控制室被形成在第二衬底中的侧壁包裹，第二衬底的顶部被膜包裹，其底部被温度控制衬底（108）包裹。 温度控制单元控制压力控制室的介质的温度。 膜控制通道流体的流动。
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公开(公告)号：KR100701152B1
公开(公告)日：2007-03-28
申请号：KR1020050120164
申请日：2005-12-08
Applicant: 한국전자통신연구원
Abstract: A monolithic MEMS(Micro-Electro Mechanical System) sensor without a step and a method of fabricating the same are provided to use a quality high temperature deposited layer for an MEMS since formation of a membrane is performed before a metal wiring process of a reading circuit. In a monolithic MEMS sensor without a step, an MEMS is formed on a left side of a substrate(10) as a first region. A reading circuit(50) is formed on a right side of the substrate as a second region. The MEMS includes a protection layer(20), a membrane(40), an insulation layer(41), and a sensor electrode(60) on the substrate. The protection layer is formed of a silicon oxide layer or a silicon nitride layer. The membrane is formed on a top of the protection layer as a silicon nitride layer or a silicon oxide layer. The insulation layer is formed of a silicon oxide layer. The sensor electrode is formed of a conductive material on the insulation layer. And, a sacrificial layer burying a trench is removed by an etching path(70).
Abstract translation: 提供了没有台阶的单片MEMS（微电子机械系统）传感器及其制造方法，以使用用于MEMS的优质高温沉积层，因为在读取电路的金属布线处理之前执行膜的形成 。 在没有台阶的单片MEMS传感器中，MEMS作为第一区域形成在基板（10）的左侧。 读取电路（50）形成在基板的右侧作为第二区域。 MEMS在衬底上包括保护层（20），膜（40），绝缘层（41）和传感器电极（60）。 保护层由氧化硅层或氮化硅层形成。 膜作为氮化硅层或氧化硅层形成在保护层的顶部上。 绝缘层由氧化硅层形成。 传感器电极由绝缘层上的导电材料形成。 并且，通过蚀刻路径（70）去除埋入沟槽的牺牲层。
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公开(公告)号：KR1020050063355A
公开(公告)日：2005-06-28
申请号：KR1020030094749
申请日：2003-12-22
Applicant: 한국전자통신연구원
IPC: G02B26/00
CPC classification number: G02B26/001 , G02B2006/12109
Abstract: 본 발명은 파브리-페로 형태의 파장가변 필터에 관한 것으로, 하부 반사경, 하부 반사경 상부에 광축이 일치되도록 위치된 상부 반사경, 하부 반사경 상부에 위치되며 양측 종단부가 스페이서를 통해 하부 반사경에 고정된 구동체, 구동체의 양측 종단부에 각각 형성된 전극들, 구동체의 중앙부와 상부 반사경을 연결하는 막대구조체, 막대구조체 양측의 하부 반사경에 스페이서를 통해 각각 고정된 고정수단들, 막대구조체와 고정수단들을 연결하며 회전축 역할을 하는 탄성체들을 포함한다. 열팽창이나 전자기력, 혹은 외부의 힘에 의해 구동체의 휨이 발생되면, 탄성체를 회전축으로 지렛대 역할을 하는 막대구조체의 반대편에 연결된 반사경이 구동된다. 따라서 파장가변 범위가 기존보다 넓고 낮은 전력으로 구동할 수 있다. 또한, 두 반사경이 가까워지는 방향과 멀어지는 방향으로 양방향 구동이 가능하며, 구동체와 반사경이 분리되어 있어 전류에 의한 빛의 흡수 및 굴절률 변화가 최소화된다.
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公开(公告)号：KR1020050046030A
公开(公告)日：2005-05-18
申请号：KR1020030079987
申请日：2003-11-13
Applicant: 한국전자통신연구원
IPC: G02B26/00
CPC classification number: G02B6/29358 , G02B6/29395
Abstract: 본 발명은 미소기전집적시스템(MEMS: Micro-Electro-Mechanical System) 형태의 파장가변 필터에 관한 것으로, 광축이 정렬된 두 개의 광섬유 혹은 광 도파로, 상기 광섬유 혹은 광 도파로 앞단에서 빛을 모아주는 두 개의 렌즈, 하나의 기판에 형성된 두 개 혹은 그 이상의 반사경, 적어도 하나의 상기 반사경을 지지하는 열구동체를 포함하며, 전류의 흐름에 따른 열구동체의 열팽창에 의해 상기 반사경이 구동된다. 반사경들이 하나의 기판에 모두 형성되므로 서로 다른 기판에 형성된 반사경을 조립하는 구조에 비하여 제작 과정이 간단하고 초기 공진 파장을 정밀하게 조절할 수 있으며, 열구동체에 직접 전류를 흘려 열팽창시키므로 적은 소모 전력으로 구동이 가능하다. 또한, 반사경을 움직이는 데 정전력을 이용하지 않으므로 반사경들 사이의 고착 현상이 일어나지 않아 정전구동에 의한 파장가변 필터에 비하여 더 넓은 범위의 파장가변이 가능하며, 평면 형태의 반사경이 서로 평행하게 배열되므로 광정렬이 쉽고 선폭이 일정하며 삽입 손실이 적다.
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公开(公告)号：KR100469644B1
公开(公告)日：2005-02-02
申请号：KR1020020010426
申请日：2002-02-27
Applicant: 한국전자통신연구원
IPC: B81C1/00
Abstract: PURPOSE: A micro pump and a manufacturing method thereof are provided to allow for a mass production and reduction of manufacturing costs, while permitting silicon semiconductor elements to be integrated on a single chip. CONSTITUTION: A micro pump comprises a lower substrate(100); a heat generating layer formed into a predetermined pattern on the lower substrate so as to generate a heat and control the pressure of the fluid; a cavity(170) formed on the heat generating layer; membranes(140,150,160) formed on the cavity in such a manner that the membranes expand by the heat generated from the heat generating layer; a fluid transfer path(230) including the membranes and an upper substrate as a boundary; and the upper substrate which is patterned to form the boundary of the fluid transfer path. The membranes expands by heating a certain part of the heat generating layer formed beneath a fluid outlet port(310), and the fluid is transferred by using expansions of the membranes.
Abstract translation: 目的：提供一种微型泵及其制造方法，以允许批量生产和降低制造成本，同时允许硅半导体元件集成在单个芯片上。 构成：微型泵包括下基板（100）; 在下基板上形成预定图案的发热层，以产生热量并控制流体的压力; 形成在发热层上的空腔（170） 以这样的方式在腔上形成膜（140,150,160），使得膜通过发热层产生的热量而膨胀; 包括膜和上基板作为边界的流体传输路径（230） 以及被图案化以形成流体传输路径的边界的上基板。 通过加热形成在流体出口端口（310）下方的发热层的特定部分来使膜膨胀，并且通过使用膨胀的膜来转移流体。
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Patent Agency Ranking
公开(公告)号：KR100455691B1
公开(公告)日：2004-11-06
申请号：KR1020020081472
申请日：2002-12-18
Applicant: 한국전자통신연구원
IPC: G02B26/08
CPC classification number: G02B26/0841 , B81B3/0062 , B81B2201/042 , Y10S359/904
Abstract: A multi-step landing micro-mirror, a method for manufacturing the same, and a multi-step landing micro-mirror array are disclosed. The multi-step landing micro-mirror comprises a trench formed in a substrate and having N-1 steps in one side wall thereof; N plates rotated in or on the trench; and 2N springs for connecting the plates to each other; wherein the N plates are composed of an outermost first plate, a second plate connected with the first plate by the spring and located in the first plate, . . . , and a N-th plate connected with a (N-1)-th plate by the spring and located in the (N-1)-th plate, wherein when voltages are applied to the N plates and the trench, respectively, the first plate is subjected to a first landing with a predetermined rotation angle on a first step of the trench due to the constant voltage, the second plate is subjected to a second landing with the predetermined rotation angle on a second step of the trench, . . . , the N-th plate is subjected to a N-th landing with the predetermined rotation angle on the other side wall of the trench. Accordingly, the low voltage driving can be performed by performing the multi-step driving during the electrostatic force is applied, the elastic force of the spring for supporting the mirror can be enhanced, therefore the reliability of the optical switch can be improved.
Abstract translation: 公开了多级落地微镜，其制造方法以及多级落地微镜阵列。 多级落地微镜包括：形成在衬底中并在其一个侧壁中具有N-1个台阶的沟槽; 在沟内或沟上旋转的N个板; 以及用于将这些板彼此连接的2N弹簧; 其中所述N个板由最外侧的第一板，通过所述弹簧与所述第一板连接且位于所述第一板中的第二板构成。 。 。 以及通过弹簧与第（N-1）板连接并且位于第（N-1）板中的第N板，其中当电压分别施加到N板和沟槽时， 由于所述恒定电压，所述第一板在所述沟槽的第一台阶上经受具有预定旋转角度的第一降落，所述第二板在所述沟槽的第二台阶上以所述预定旋转角度经受第二降落。 。 。 ，第N个板在沟槽的另一个侧壁上以预定旋转角度进行第N次着陆。 因此，通过在施加静电力期间执行多步驱动可以执行低电压驱动，可以增强用于支撑反射镜的弹簧的弹力，因此可以提高光开关的可靠性。
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公开(公告)号：KR100450756B1
公开(公告)日：2004-10-01
申请号：KR1020020033720
申请日：2002-06-17
Applicant: 한국전자통신연구원
IPC: G02B26/08
Abstract: PURPOSE: An optical signal switch array for optical communication is provided to drive easily a reflection mirror by arranging a digital switch type reflection mirror between an optical signal input part and an optical signal output part. CONSTITUTION: An optical signal switch array for optical communication includes an optical signal input part(100), a switching array part(200), and an optical signal output part(300). The optical signal input part(100) includes a plurality of optical signal transferring grooves having the predetermined stepped parts and a plurality of optical fibers located on the optical signal transferring grooves. A plurality of digital switch type reflection mirrors are arranged in matrix on a gradient surface of the switching array part(200) in order to control the optical signals by changing the direction of the optical signals of the optical signal input part(100). The optical signal output part(300) receives and outputs the reflected optical signals of the switching array part(200).
Abstract translation: 目的：提供一种用于光通信的光信号开关阵列，通过在光信号输入部分和光信号输出部分之间设置数字开关型反射镜，容易地驱动反射镜。 用于光通信的光信号开关阵列包括光信号输入部分（100），开关阵列部分（200）和光信号输出部分（300）。 光信号输入部分（100）包括具有预定阶梯部分的多个光信号传送槽和位于光信号传送槽上的多个光纤。 为了通过改变光信号输入部分（100）的光信号的方向来控制光信号，在开关阵列部分（200）的梯度表面上以矩阵形式布置多个数字开关型反射镜。 光信号输出部（300）接收并输出开关阵列部（200）的反射光信号。
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公开(公告)号：KR1020040054434A
公开(公告)日：2004-06-25
申请号：KR1020020081472
申请日：2002-12-18
Applicant: 한국전자통신연구원
IPC: G02B26/08
CPC classification number: G02B26/0841 , B81B3/0062 , B81B2201/042 , Y10S359/904
Abstract: PURPOSE: A multi-level landing type micro-mirror, a fabricating method thereof, and a multi-level landing type micro-mirror array are provided to improve the switching reliability by reinforcing a spring of the micro-mirror. CONSTITUTION: A trench is formed on a substrate. Stepped portions of N-1 number are formed on one side of the trench. Plates(20-23) of N number are rotated at a top part and an inner part of the trench. Springs(24-26) of 2N number are used for connecting the plates of N number to each other. The plates are formed with the first plate to the N-th plate. The plates are connected each other by the springs. The first plate is landed on the first stepped portion. The second plate is landed on the second stepped portion. The N-th plate is landed on the N-th stepped portion.
Abstract translation: 目的：提供多级着陆式微型镜，其制造方法和多级着陆型微镜阵列，以通过加强微镜的弹簧来提高切换的可靠性。 构成：在衬底上形成沟槽。 N-1号的阶梯部分形成在沟槽的一侧。 N号的板（20-23）在沟槽的顶部和内部部分旋转。 2N号的弹簧（24-26）用于将N号的盘相互连接。 板形成有第一板到第N个板。 板通过弹簧彼此连接。 第一板落在第一台阶上。 第二板落在第二台阶部分上。 第N台落在第N台阶上。
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公开(公告)号：KR1020040045636A
公开(公告)日：2004-06-02
申请号：KR1020020073471
申请日：2002-11-25
Applicant: 한국전자통신연구원
CPC classification number: G09G3/3648
Abstract: PURPOSE: A switching device and an electronic circuit apparatus having the same are provided to be capable of improving the reliability of the device and enhancing speed characteristics. CONSTITUTION: A switching device is provided with an insulation substrate, the first region(110) formed on one side of the insulation substrate, and the second region(120) formed on the other side of the insulation substrate. At this time, the first and second region are spaced apart from each other. The first and second region are shrunk and expanded according to the intensity of laser beam. Preferably, the first and second region are made of chalcogenide. Preferably, the first and second region are made of Ge-Sb-Te material. Preferably, the first and second region are capable of being connected with each other in an expansion state.
Abstract translation: 目的：提供一种开关装置和具有该开关装置的电子电路装置，以能够提高装置的可靠性并提高速度特性。 构成：开关装置设置有绝缘基板，形成在绝缘基板的一侧的第一区域（110）和形成在绝缘基板的另一侧的第二区域（120）。 此时，第一和第二区域彼此间隔开。 第一和第二区域根据激光束的强度而缩小和扩大。 优选地，第一和第二区域由硫族化物制成。 优选地，第一和第二区域由Ge-Sb-Te材料制成。 优选地，第一和第二区域能够在膨胀状态下彼此连接。
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公开(公告)号：KR1020030088773A
公开(公告)日：2003-11-20
申请号：KR1020020026698
申请日：2002-05-15
Applicant: 한국전자통신연구원
IPC: C12Q1/68
CPC classification number: B01J19/0046 , B01J2219/00434 , B01J2219/00527 , B01J2219/00529 , B01J2219/00596 , B01J2219/00605 , B01J2219/00608 , B01J2219/00659 , B01J2219/00675 , B01J2219/00677 , B01J2219/00689 , B01J2219/00711 , B01J2219/00722 , B82Y30/00 , C40B40/06 , C40B60/14 , G02F1/133528 , G02F1/13454 , G02F1/13725 , G02F1/216 , G02F2203/12 , G03F7/70291 , G03F7/7035 , H01L27/146
Abstract: PURPOSE: A programmable mask and a method for fabricating a biomolecule array using the same are provided. A high density biomolecule array is fabricated by selectively irradiating UV to sample substrate. CONSTITUTION: A programmable mask comprises a lower substrate(100a) comprising a polysilicone thin layer transistor, a lower pixel electrode(117) consisting of transparent electrode connected to drain electrode(112) of the thin layer transistor and an orientation film(116) in the upper part, and a polarizing plate(120a) in the lower part; an upper substrate(100b) comprising a UV shade, a protection and insulation film, an upper pixel electrode(119) consisting of transparent electrode and an orientation film(116) in the lower part, and a polarizing plate(120b) in the upper part; liquid crystal being inserted between the upper and lower substrates and selectively transmitting light according to electric signal; and an operating circuit on the lower substrate, wherein the operating circuit is formed with the polysilicone thin layer transistor simultaneously and positioned in the same plane as the pixel region.
Abstract translation: 目的：提供可编程掩模和使用其制造生物分子阵列的方法。 通过选择性地将UV照射到样品基底上来制造高密度生物分子阵列。 构成：可编程掩模包括由多晶硅薄层晶体管构成的下基板（100a），由与薄层晶体管的漏电极（112）连接的透明电极组成的下像素电极（117）和位于薄膜晶体管 上部和下部的偏振片（120a）; 上部基板（100b），其具有紫外线遮挡，保护绝缘膜，下部的透明电极和取向膜（116）构成的上部像素电极（119）和上部的偏振片（120b） 部分; 液晶插入在上下基板之间，并根据电信号有选择地发射光; 以及下基板上的工作电路，其中所述工作电路与所述多硅薄层晶体管同时形成并且与所述像素区域位于同一平面。
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