公开(公告)号：DE10333782A1

公开(公告)日：2004-03-18

申请号：DE10333782

申请日：2003-07-24

Applicant: INTEL CORP

Inventor： WANG LI-PENG ,  BAR-SADEH EYAL ,  RAO VALLURI ,  HECK JOHN ,  MA QING ,  TRAN QUAN ,  TALALYEVSKY ALEXANDER ,  GINSBURG EYAL

IPC: H03H9/24 ,  H03H3/02 ,  H03H9/56 ,  H03H9/15 ,  H03H9/54

Abstract: A film bulk acoustic resonator filter (10) may be formed with a plurality of interconnected series and shunt film bulk acoustic resonators (38) formed on the same membrane (35). Each of the film bulk acoustic resonators (38) may be formed from a common lower conductive layer which is defined to form the bottom electrode (32) of each film bulk acoustic resonator (38). A common top conductive layer may be defined to form each top electrode (36) of each film bulk acoustic resonator (38). A common piezoelectric film layer (34), that may or may not be patterned, forms a continuous or discontinuous film.

公开(公告)号：AU2003218453A1

公开(公告)日：2003-10-20

申请号：AU2003218453

申请日：2003-03-27

Applicant: INTEL CORP

Inventor： MA QING ,  RAO VALLURI ,  WANG LI-PENG ,  TRAN QUAN ,  HECK JOHN

IPC: B81B7/00 ,  B81C3/00

公开(公告)号：AU2002323494A1

公开(公告)日：2003-04-07

申请号：AU2002323494

申请日：2002-08-30

Applicant: INTEL CORP

Inventor： YAMAKAWA MINEO ,  KIRCH STEVEN ,  RAO VALLURI ,  BERLIN ANDREW ,  NEUBAUER GABI

IPC: G01N21/65 ,  B01L3/00 ,  C12M1/00 ,  C12M1/34 ,  C12N15/00 ,  C12Q1/44 ,  C12Q1/68 ,  G01N33/53 ,  G01N33/543 ,  G01N37/00 ,  B01J19/00