Abstract:
The invention relates to a semiconductor device for electro-optic applications of the type including at least a rare-earth ions doped P/N junction integrated on a semiconductor substrate. This device may be used to obtain laser action in Silicon and comprises a cavity or a waveguide and a coherent light source obtained incorporating the rare-earth ions, and specifically Erbium ions, in the depletion layer of said P/N junction. The junction may be for instance the base-collector region of a bipolar transistor and is reverse biased.
Abstract:
Power electronic device (30) integrated on a semiconductor substrate (100) of a first type of conductivity comprising a plurality of elemental units, each elemental unit comprising: a body region (40) of a second type of conductivity realised on a semiconductor layer (20) of the first type of conductivity formed on the semiconductor substrate (100), a column region (50) of the first type of conductivity realised in said semiconductor layer (20) below the body region (40), wherein the semiconductor layer (20) comprises a plurality of semiconductor layers (21, 22, 23, 24), overlapped on each other, wherein the resistivity of each layer is different from that of the other layers and in that said column region (50) comprises a plurality of doped sub-regions (51, 52, 53, 54), each realised in one of said semiconductor layers (21, 22, 23, 24), wherein the amount of charge of each doped sub-regions (51, 52, 53, 54) balances the amount of charge of the semiconductor layer (21, 22, 23, 24) wherein each doped sub-region (51, 52, 53, 54) is realised.
Abstract:
Method for manufacturing electronic devices on a semiconductor substrate (1, 1a; 10, 11) with wide band gap comprising the steps of: forming a screening structure (3a, 20) on said semiconductor substrate (1, 1a; 10, 11) comprising at least a dielectric layer (2, 20) which leaves a plurality of areas of said semiconductor substrate (1, 1a; 10, 11) exposed, carrying out at least a ion implantation of a first type of dopant in said semiconductor substrate (1, 1a; 10, 11) to form at least a first implanted region (4, 40), carrying out at least a ion implantation of a second type of dopant in said semiconductor substrate (1, 1a; 10, 11) to form at least a second implanted region (6, 6c; 60, 61) inside said at least a first implanted region (4, 40), carrying out an activation thermal process of the first type and second type of dopant with low thermal budget suitable to complete said formation of said at least first and second implanted regions (4, 40; 6, 60).
Abstract:
Method of manufacturing an edge structure for a high voltage semiconductor device, comprising a first step of forming a first semiconductor layer (41) of a first conductivity type, a second step of forming a first mask (37) over the top surface of the first semiconductor layer (41), a third step of removing portions of the first mask (37) in order to form at least one opening (51) in it, a fourth step of introducing dopant of a second conductivity type in the first semiconductor layer (41) through the at least one opening (51), a fifth step of completely removing the first mask (37) and of forming a second semiconductor layer (42) of the first conductivity type over the first semiconductor layer (41), a sixth step of diffusing the dopant implanted in the first semiconductor layer (41) in order to form a doped region (220) of the second conductivity type in the first and second semiconductor layers (41, 42). The second step up to the sixth step are repeated at least one time in order to form a final edge structure comprising a number of superimposed semiconductor layers (41, 42, 43, 44, 45, 46) of the first conductivity type and at least two columns of doped regions (220, 230, 240, 250, 260) of the second conductivity type, the columns being inserted in the number of superimposed semiconductor layers (41, 42, 43, 44, 45, 46) and formed by means of superimposition of the doped regions (220, 230, 240, 250, 260) subsequently implanted through the mask openings, the column near the high voltage semiconductor device being deeper than the column farther to the high voltage semiconductor device.
Abstract:
The high-gain photodetector (1) is formed in a semiconductor-material body (5) which houses a PN junction (13, 14) and a sensitive region (19) that is doped with rare earths, for example erbium (Er). The PN junction (13, 14) forms an acceleration and gain region (13, 14) separate from the sensitive region (19). The PN junction is reverse-biased and generates an extensive depletion region accommodating the sensitive region (19). Thereby, the incident photon having a frequency equal to the absorption frequency of the used rare earth crosses the PN junction (13-14), which is transparent to light, can be captured by an erbium ion in the sensitive region (19), so as to generate a primary electron, which is accelerated towards the PN junction by the electric field present, and can, in turn, generate secondary electrons by impact, according to an avalanche process. Thereby, a single photon can give rise to a cascade of electrons, thus considerably increasing detection efficiency.