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    OPTICAL MODULE
    52.
    发明公开
    OPTICAL MODULE 审中-公开
    OPTISCHES MODUL

    公开(公告)号：EP3054580A1

    公开(公告)日：2016-08-10

    申请号：EP14851073.8

    申请日：2014-09-08

    Applicant: Hamamatsu Photonics K.K.

    Inventor： WARASHINA Yoshihisa

    IPC: H02N1/00

    CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/0163 ,  G01J3/26 ,  G02B6/29395 ,  G02B26/001 ,  G02B26/0841 ,  H02N1/008

    Abstract: An optical module 1A includes a semiconductor substrate 2, an electrostatic actuator 10 including a fixed portion 11 fixed to the semiconductor substrate 2 and a movable portion 12 moved with respect to the fixed portion 11 by an electrostatic force generated between the movable portion and the fixed portion 11, a first spring portion 20 connected to the movable portion 12 and having a first spring constant K1, a second spring portion 30 connected between the first spring portion 20 and the semiconductor substrate 2 and having a second spring constant K2 greater than the first spring constant K1, and a movable mirror 5 which is an optical component connected to a connection portion 13 between the first spring portion 20 and the second spring portion 30. Thereby, an optical module capable of stably operating an optical component with high precision using an electrostatic actuator is realized.

    Abstract translation: 光学模块1A包括半导体衬底2，静电致动器10，其包括固定在半导体衬底2上的固定部分11和通过在可动部分和固定部分之间产生的静电力相对于固定部分11移动的可移动部分12。 连接到可移动部分12并且具有第一弹簧常数K1的第一弹簧部分20，连接在第一弹簧部分20和半导体基板2之间并且具有大于第一弹簧常数K1的第二弹簧常数K2的第二弹簧部分30。 弹簧常数K1，以及与第一弹簧部20和第二弹簧部30之间的连接部13连接的光学部件的可动镜5.由此，能够以高精度稳定地使用光学部件， 实现静电致动器。

    MICROFABRICATION
    54.
    发明公开
    MICROFABRICATION 审中-公开
    一种制备微腔的具有限定轮廓过程

    公开(公告)号：EP1940733A2

    公开(公告)日：2008-07-09

    申请号：EP06808341.9

    申请日：2006-10-20

    Applicant: BAE Systems plc

    Inventor： HUCKER, Martyn, John ,  WARSOP, Clyde

    IPC: B81C5/00

    CPC classification number: B81C1/00103 ,  B81B2201/038 ,  B81B2203/033 ,  B81B2203/0376 ,  B81B2203/0384 ,  B81C2201/034

    Abstract: A method of forming a surface of micrometer dimensions conforming to a desired contour for a MEMS device, the method comprising providing a crystalline silicon substrate with a recess in an upper surface, providing a thinner layer of crystalline silicon over the upper surface of the substrate, fusion bonding the layer to the substrate under vacuum conditions, and applying heat to the layer and applying atmospheric pressure on the layer, such as to plastically deform the diaphragm within the recess to the desired contour. The substrate may form the fixed electrode of an electrostatic MEMS actuator, operating on the zip principle.

    Microelectromechanical actuators including sinuous beam structures
    58.
    发明公开
    Microelectromechanical actuators including sinuous beam structures 审中-公开
    Mikromechanische Aktuatoren，正弦形式Schwingstabstrukturen enthaltende

    公开(公告)号：EP1170248A2

    公开(公告)日：2002-01-09

    申请号：EP01305660.1

    申请日：2001-06-29

    Applicant: JDS Uniphase Corporation

    Inventor： Hill, Edward Arthur ,  Dhuler, Vijaykumar Rudrappa ,  Cowen, Allen Bruce ,  Mahadevan, Ramaswamy ,  Wood, Robert L

    IPC: B81B3/00

    CPC classification number: B81B3/0051 ,  B81B2201/038 ,  B81B2203/0109 ,  B81B2203/056 ,  H01H1/0036 ,  H01H61/00 ,  H01H2061/006

    Abstract: In embodiments of the present invention, a microelectromechanical actuator includes a beam having respective first and second ends attached to a substrate and a body disposed between the first and second ends having a sinuous shape. The body includes a portion operative to engage a object of actuation and apply a force thereto in a direction perpendicular to the beam responsive to at least one of a compressive force and a tensile force on the beam. The sinuous shape may be sinusoidal, e.g., a shape approximating a single period of a cosine curve or a single period of a sine curve. The beam may be thermally actuated or driven by another actuator. In other embodiments, a rotary actuator includes first and second beams, a respective one of which has first and second ends attached to a substrate and a body disposed between the first and second ends. Each body includes first and second oppositely inflected portions. The bodies of the first and second beams intersect one another at points at which the first and second oppositely inflected portions of the first and second bodies meet. The bodies of the first and second beams are operative to engage the object of actuation and rotate the object of actuation around the point of intersection responsive to at least one of compressive force and tensile force on the first and second beams. Related methods are also described.

    Abstract translation: 在本发明的实施例中，微机电致动器包括具有附接到基板的相应的第一端和第二端的梁，以及设置在具有弯曲形状的第一端和第二端之间的主体。 主体包括可操作地接合致动对象的部分，并且响应于梁上的压缩力和拉力中的至少一个，沿垂直于梁的方向施加力。 弯曲形状可以是正弦的，例如，近似于余弦曲线的单个周期或正弦曲线的单个周期的形状。 梁可以由另一致动器热致动或驱动。 在其他实施例中，旋转致动器包括第一和第二梁，其相应的一个具有附接到基板的第一和第二端以及设置在第一和第二端之间的主体。 每个主体包括第一和第二相对弯曲的部分。 第一和第二梁的主体在第一和第二主体的第一和第二相对弯曲部分相交的点处彼此相交。 第一和第二梁的主体可操作以接合致动对象，并响应于第一和第二梁上的压缩力和拉力中的至少一个而使作动点绕交点旋转。 还描述了相关方法。

    PROCEDE DE FABRICATION D'UNE PIECE MICROMECANIQUE
    59.
    发明公开
    PROCEDE DE FABRICATION D'UNE PIECE MICROMECANIQUE 审中-公开

    公开(公告)号：EP3412625A1

    公开(公告)日：2018-12-12

    申请号：EP17174415.4

    申请日：2017-06-05

    Applicant: Nivarox-FAR S.A.

    Inventor： Cretenet, Davy

    IPC: B81C99/00

    CPC classification number: B81C99/008 ,  B81B2201/035 ,  B81B2201/038

    Abstract: L'invention se rapporte à un procédé de fabrication d'une pièce mécanique (51) comportant les étapes suivantes :
    - se munir (3) d'un substrat (53) en un matériau micro-usinable ;
    - graver (5) par photolithographie, dans la totalité de l'épaisseur dudit substrat, un motif (50) comportant ladite pièce avec au moins un pont de matière (57) ;
    caractérisé en ce qu'il comporte en outre les étapes suivantes :
    - réaliser (13) une fragilisation à coeur du pont de matière (91) afin de former une amorce de rupture (91) le long d'une ligne de rupture (L) du pont de matière (57) ;
    - libérer (11) la pièce (51) du substrat (53) afin de la monter dans un dispositif.

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