Aerogel-bases mold for MEMS fabrication and formation thereof
    54.
    发明授权
    Aerogel-bases mold for MEMS fabrication and formation thereof 有权
    用于MEMS制造和形成的基于气凝胶的模具

    公开(公告)号:US08851442B2

    公开(公告)日:2014-10-07

    申请号:US12017944

    申请日:2008-01-22

    Abstract: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.

    Abstract translation: 本发明涉及用作至少部分微机电特征的模具的图案化气凝胶基层。 气凝胶的密度小于MEMS制造中使用的典型材料的密度,例如多晶硅,氧化硅,单晶硅,金属,金属合金等。 因此,可以以明显高于在较致密的材料中形成结构特征的速率的速率在气凝胶层中形成结构特征。 本发明还包括一种图案化气凝胶层以产生这种基于气凝胶的模具的方法。 本发明还包括使用基于气凝胶的模具制造微机电特征的方法。 该方法包括将致密材料层直接沉积在已经形成在气凝胶层中的微机电特征的至少一部分的轮廓上。

    Aerogel-Bases Mold for MEMS Fabrication and Formation Thereof
    55.
    发明申请
    Aerogel-Bases Mold for MEMS Fabrication and Formation Thereof 有权
    用于MEMS制造和形成的基于气凝胶的模具

    公开(公告)号:US20090184088A1

    公开(公告)日:2009-07-23

    申请号:US12017944

    申请日:2008-01-22

    Abstract: The invention is directed to a patterned aerogel-based layer that serves as a mold for at least part of a microelectromechanical feature. The density of an aerogel is less than that of typical materials used in MEMS fabrication, such as poly-silicon, silicon oxide, single-crystal silicon, metals, metal alloys, and the like. Therefore, one may form structural features in an aerogel-based layer at rates significantly higher than the rates at which structural features can be formed in denser materials. The invention further includes a method of patterning an aerogel-based layer to produce such an aerogel-based mold. The invention further includes a method of fabricating a microelectromechanical feature using an aerogel-based mold. This method includes depositing a dense material layer directly onto the outline of at least part of a microelectromechanical feature that has been formed in the aerogel-based layer.

    Abstract translation: 本发明涉及用作至少部分微机电特征的模具的图案化气凝胶基层。 气凝胶的密度小于MEMS制造中使用的典型材料的密度,例如多晶硅,氧化硅,单晶硅,金属,金属合金等。 因此,可以以明显高于在较致密的材料中形成结构特征的速率的速率在气凝胶层中形成结构特征。 本发明还包括一种图案化气凝胶层以产生这种基于气凝胶的模具的方法。 本发明还包括使用基于气凝胶的模具制造微机电特征的方法。 该方法包括将致密材料层直接沉积在已经形成在气凝胶层中的微机电特征的至少一部分的轮廓上。

    가역적 전극반응을 이용한 전기삼투펌프 및 이를 이용한 유체 펌핑 시스템
    57.
    发明授权
    가역적 전극반응을 이용한 전기삼투펌프 및 이를 이용한 유체 펌핑 시스템 有权
    使用可逆电极反应的电动泵和使用其的流体泵送系统

    公开(公告)号:KR101305149B1

    公开(公告)日:2013-09-12

    申请号:KR1020130004361

    申请日:2013-01-15

    Inventor: 신운섭

    CPC classification number: B81B3/0035 B81B7/02 B81B2201/036 B81B2201/05

    Abstract: PURPOSE: An electro-osmosis pump using a reversible electrode reaction and a fluid pumping system using the same are provided to transfer a large amount of fluid for a long time while the size and a configuration of the electro-osmosis pump are intactly maintained. CONSTITUTION: An electro-osmosis pump (10) using a reversible electrode reaction includes a transfer line, a first check valve, a second check valve, a pumping line, and a separator. The transfer line provides a passage for transferring a target fluid (16) from a container to the outside. The first and second check valves are installed to be spaced from the transfer line respectively and prevent the target fluid flowing to a reverse direction of a transferring direction. The pumping line is connected to a part of the transferring line between the first and second check valves. The electro-osmosis pump provides a pumping force to the pumping line. The separator separates the electro-osmosis pump from the target fluid and transmits the pumping force to the target fluid. [Reference numerals] (14) Power providing unit

    Abstract translation: 目的:提供使用可逆电极反应的电渗透泵和使用该电渗透泵的流体泵送系统,以在电渗透泵的尺寸和构造完好保持的情况下长时间转移大量流体。 构成:使用可逆电极反应的电渗泵(10)包括传输线,第一止回阀,第二止回阀,泵送管线和分离器。 传送线提供用于将目标流体(16)从容器传送到外部的通道。 第一止回阀和第二止回阀分别安装成与传送管线分开,并防止目标流体沿传送方向反向流动。 泵送线连接到第一和第二止回阀之间的输送管线的一部分。 电渗泵为泵送管线提供泵送力。 分离器将电渗泵与目标流体分离,并将泵送力传递到目标流体。 (附图标记)(14)供电单元

    가변성 미세패턴을 구비한 미세구조체 제조방법
    58.
    发明公开
    가변성 미세패턴을 구비한 미세구조체 제조방법 有权
    具有可变微尺寸的精细结构的制造方法

    公开(公告)号:KR1020140015211A

    公开(公告)日:2014-02-06

    申请号:KR1020130089033

    申请日:2013-07-26

    Abstract: Provided is a fabrication method for fine structures with variable micropatterns including: a step of forming a mixture containing photochromic materials and curable materials; a step of providing the mixture for a microfluidic tube; a step of forming variable micropatterns by applying patterned energy to a desired spot of the mixture and hardening the mixture; and a step of forming fine structures by injecting curable materials and applying additional energy to the microfluidic tube. [Reference numerals] (AA) Start; (BB) End; (S1) Forming a mixture containing photochromic materials and curable materials; (S2) Providing the mixture for a microfluidic tube; (S3) Forming variable micropatterns by applying patterned energy to a desired spot of the mixture and hardening the mixture; (S4) Forming fine structures by injecting curable materials and applying additional energy to the microfluidic tube

    Abstract translation: 提供了一种具有可变微图案的精细结构的制造方法,包括:形成含有光致变色材料和可固化材料的混合物的步骤; 提供微流体管的混合物的步骤; 通过将图案化的能量施加到混合物的所需点并硬化混合物来形成可变微图案的步骤; 以及通过注射可固化材料并向微流体管施加附加能量来形成精细结构的步骤。 (附图标记)(AA)开始; (BB)结束; (S1)形成含有光致变色材料和可固化材料的混合物; (S2)提供微流体管的混合物; (S3)通过将图案化的能量施加到混合物的所需点并硬化混合物来形成可变微图案; (S4)通过注射可固化材料并向微流体管施加额外的能量来形成精细结构

    전기 삼투 현상을 이용하여 나선 유동을 발생하는마이크로 채널 및 그 제조 방법
    60.
    发明公开
    전기 삼투 현상을 이용하여 나선 유동을 발생하는마이크로 채널 및 그 제조 방법 无效
    使用电致发光的微通道生成螺旋流动及其制造方法

    公开(公告)号:KR1020030012724A

    公开(公告)日:2003-02-12

    申请号:KR1020010047135

    申请日:2001-08-04

    Abstract: PURPOSE: A micro channel generating a helical flow using electroosmosis and a method for manufacturing the same are provided to generate three-dimensional helical flow of an electrolyte. CONSTITUTION: A micro channel(100) having surface potential includes helical surface potential patterns composed of a plurality of first potential patterns(102) arranged on the upper wall surface inside the micro channel at regular gaps; a plurality of second surface potential patterns(104) arranged on the lower wall surface inside the micro channel at regular gaps to be connected to both ends of the first surface potential pattern; and a plurality of third potential patterns(108) arranged on the side wall surface inside the micro channel connecting the first surface potential patterns with the second surface potential patterns.

    Abstract translation: 目的:提供使用电渗法产生螺旋流的微通道及其制造方法,以产生电解质的三维螺旋流。 构成:具有表面电位的微通道(100)包括螺旋形表面电位图案,其由以规则间隙布置在微通道内的上壁表面上的多个第一电位图案(102)组成; 多个第二表面电势图案(104),其以规则的间隙布置在所述微通道内的所述下壁表面上,以连接到所述第一表面电位图案的两端; 以及布置在所述微通道内的所述侧壁表面上的多个第三电位图案(108),其将所述第一表面电位图案与所述第二表面电位图案连接。

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