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    MEANS FOR ACHIEVING UNIFORMITY OF EMISSION OF A LARGE AREA ELECTRON SOURCE
    51.
    发明申请
    MEANS FOR ACHIEVING UNIFORMITY OF EMISSION OF A LARGE AREA ELECTRON SOURCE 审中-公开
    实现大面积电子源均匀排放的手段

    公开(公告)号：WO01024217A1

    公开(公告)日：2001-04-05

    申请号：PCT/US2000/026389

    申请日：2000-09-26

    IPC: H01J1/36 ,  H01J3/02 ,  H01J37/077

    CPC classification number: H01J1/36 ,  H01J3/025 ,  H01J37/077 ,  H01J2237/31779

    Abstract: The invention pertains to electron exposure equipment useful for exposing, treating and processing coatings and other materials by a cold cathode gas discharge electron source having a broad uniform emitting area. The apparatus has a vacuum chamber; a large surface area cathode in the vacuum chamber and means for applying a negative voltage to the cathode and causing the cathode to issue electrons toward a target in the vacuum chamber. An anode is positioned between the cathode and the target. The anode is formed of an electrically conductive grid having an array of apertures therethrough extending from a center of the grid to an edge of the grid. In one embodiment the apertures have a progressively increasing area from the center of the grid to the edge of the grid. In another embodiment the anode has a progressively decreasing thickness from the center of the grid to the edge of the grid. In yet another embodiment the anode has both progressively increasing area from the center of the grid to the edge of the grid. A voltage is applied to the anode which is positive relative to the voltage applied to the cathode.

    Abstract translation: 本发明涉及用于通过具有宽均匀发射面积的冷阴极气体放电电子源对涂层和其它材料进行曝光，处理和加工的电子曝光设备。 该装置具有真空室; 真空室中的大的表面积阴极和用于向阴极施加负电压并使阴极向真空室中的靶发射电子的装置。 阳极位于阴极和靶之间。 阳极由导电栅格形成，其具有从栅极的中心延伸到栅格的边缘的孔的阵列。 在一个实施例中，孔具有从栅格的中心到栅格的边缘的逐渐增加的面积。 在另一个实施例中，阳极从网格的中心到网格边缘的厚度逐渐减小。 在另一个实施例中，阳极具有从栅格的中心到栅格的边缘的逐渐增加的面积。 对阳极施加电压，阳极相对于施加到阴极的电压为正。

    PLASMA X-RAY TUBE, IN PARTICULAR FOR X-RAY PREIONIZING GAS LASERS, PROCESS FOR PRODUCING X-RAY RADIATION WITH SAID X-RAY TUBE AND USE OF SAID X-RAY TUBE
    52.
    发明申请
    PLASMA X-RAY TUBE, IN PARTICULAR FOR X-RAY PREIONIZING GAS LASERS, PROCESS FOR PRODUCING X-RAY RADIATION WITH SAID X-RAY TUBE AND USE OF SAID X-RAY TUBE 审中-公开
    等离子体X射线管，特别是用于X射线辐射气体激光的方法，用于产生具有X射线管的X射线辐射的过程和使用X射线管

    公开(公告)号：WO1989010004A1

    公开(公告)日：1989-10-19

    申请号：PCT/EP1989000383

    申请日：1989-04-10

    Applicant: SIEMENS AKTIENGESELLSCHAFT

    Inventor： SIEMENS AKTIENGESELLSCHAFT ,  FRIEDE, Dirk ,  CIRKEL, Hans-Jürgen ,  BAUMGARTL, Rudolf ,  SCHMUTZLER, Matthias

    IPC: H01J35/00

    CPC classification number: H01S3/09716 ,  H01J3/025 ,  H01J17/40 ,  H01J33/00 ,  H01J35/06 ,  H01J35/08 ,  H01J2235/186

    Abstract: A plasma X-ray tube with high electron stream densities, in particular for preionizing gas lasers, is based on the principle of the production of electrons by emission of secondary electrons through ion bombardment. A thin initiating wire (6) is stretched along the longitudinal axis of the tube. After a positive tension impulse is applied to the initiating wire (6), free electrons fly over spiral paths onto the thin wire. On helicoidal flight paths, the electrons cover trajectories which are greater than the length of the free middle trajectory of impact ionization; they thus produce additional charged particles. A high-voltage pulse applied to the anode of a cylindrical cathode (3) extending sideways into the plasma chamber (1) increases the density of the charged particles by interaction with the metallic walls (5b, 5c, 5d, 5e, 5f). A negative high-voltage pulse on the solid, wide accelerating cathode (7) extracts positive ions from the cylindrical cathode (1') by suction through a grating (9); when they strike the accelerating cathode (7), said positive ions eject electrons from the metal, which are emitted by the cathode (7), accelerated towards the grating (9) and shot through the drift or plasma space (1) onto the X-ray target (12), a thin metal film or layer covering a window.

    PLASMA X-RAY TUBE, IN PARTICULAR FOR X-RAY PREIONIZING OF GAS LASERS, AND USE AS ELECTRON GUN
    53.
    发明申请
    PLASMA X-RAY TUBE, IN PARTICULAR FOR X-RAY PREIONIZING OF GAS LASERS, AND USE AS ELECTRON GUN 审中-公开
    等离子X射线管，特别是用于X射线辐射气体激光，并用作电子枪

    公开(公告)号：WO1989010003A1

    公开(公告)日：1989-10-19

    申请号：PCT/EP1989000375

    申请日：1989-04-07

    Applicant: SIEMENS AKTIENGESELLSCHAFT ,  FRIEDE, Dirk ,  BRÜCKNER, Volker ,  BAUMGARTL, Rudolf ,  CIRKEL, Hans-Jürgen

    Inventor： SIEMENS AKTIENGESELLSCHAFT

    IPC: H01J35/00

    CPC classification number: H05G2/003 ,  H01J3/025 ,  H01J17/40 ,  H01J33/00 ,  H01S3/09716

    Abstract: In the preferred application for preionizing TE lasers, in particular excimer lasers, the plasma X-ray tube (ER), which can also be referred to as single-chamber ion tube, has an elongated, box-shaped housing (G) including in its inside an also elongated cylindrical cathode (K) of generally U-shaped cross-section, the open end of which faces the X-ray target in the form of a gastight film. An elongated wire-shaped initiating electrode (11) is arranged between X-ray target (1) and cylindrical cathode (K). An electrical field is generated around the initiating electrode (11) by applying thereto a positive voltage or voltage pulse. The field thus generated forces the electrons which are present because of the ambient radiation to form long spiral paths, thus ionising gas atoms. Electron avalanches develop and initiate the wire discharge. Ions (i+) are extracted from the low-pressure plasma (3) by applying to the cylindrical cathode (K) a beam potential of typically between 60 kV and a maximum of 120 kV, and accelerated against the cylindrical cathode (K). On impact of the ions from the cylindrical cathode (K), secondary electrons are emitted and accelerated in the opposite direction, thus forming the electron beam (E), which on striking the X-ray target (1) creates the X-ray bremsstrahlung (X). Said plasma X-ray tube is also basically suitable as an electron gun: for this application, the film used as an electron window covering the window opening in the target holding wall need only be designed so as to be accordingly radiolucent to electron beams.

    Abstract translation: 在用于预先激发TE激光器，特别是准分子激光器的优选应用中，也可以称为单室离子管的等离子体X射线管（ER）具有细长的箱形壳体（G），其包括 其内部还具有大致U形横截面的也是细长的圆柱形阴极（K），其开口端以气密膜的形式面向X射线靶。 在X射线靶（1）和圆柱形阴极（K）之间布置细长的线状起始电极（11）。 通过向其施加正电压或电压脉冲，在起动电极（11）周围产生电场。 因此产生的场强迫由于环境辐射而存在的电子形成长的螺旋路径，从而电离气体原子。 电子雪崩开发和启动电线放电。 通过向圆柱形阴极（K）施加通常在60kV至最大120kV之间的波束电势，并且相对于圆柱形阴极（K）加速，从低压等离子体（3）中提取离子（i +）。 在来自圆柱形阴极（K）的离子的冲击下，二次电子在相反方向发射和加速，从而形成电子束（E），其在X射线靶（1）上产生X射线bre致辐射 （X）。 所述等离子体X射线管也基本上适合作为电子枪：对于这种应用，用作覆盖目标保持壁中的窗口的电子窗的膜仅需要设计成相应地射入电子束。

    KANALFUNKENQUELLE ZUR ERZEUGUNG EINES STABIL GEBÜNDELTEN ELEKTRONENSTRAHLS
    59.
    发明公开
    KANALFUNKENQUELLE ZUR ERZEUGUNG EINES STABIL GEBÜNDELTEN ELEKTRONENSTRAHLS 有权
    信道无线电SOURCE产生稳定的聚焦的电子束

    公开(公告)号：EP1479090A2

    公开(公告)日：2004-11-24

    申请号：EP03702521.0

    申请日：2003-01-24

    Applicant: Forschungszentrum Karlsruhe GmbH

    Inventor： SCHULTEISS, Christoph ,  BUTH, Lothar-Heinz-Otto

    IPC: H01J37/077

    CPC classification number: H01J3/025 ,  H01J1/025 ,  H05H1/52

    Abstract: The invention relates to a channel spark source, triggered by gas discharge, for generating stable, focussed electron beams. Said source is characterised by a gas supply with a pressure differential of 10-4 Pascal between the hollow cathode and the channel outlet, so that the multiplication of the charge carriers in the trigger plasma ignites a hollow cathode gas discharge in a reliable manner and that the beam exits the system without a predisposition for instability or for touching and damaging the internal channel of the system.

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