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61.发明公开잔류응력 및 압전구동력을 이용한 초소형 전기 기계시스템 고주파 스위치 失效射频MEMS开关采用残余应力和压电驱动力，包括弹性支撑构件，下电极，PIEZO薄膜，上电极，臂和高频输入电极和输出电极
公开(公告)号：KR1020040103039A
公开(公告)日：2004-12-08
申请号：KR1020030034923
申请日：2003-05-30
Applicant: 전자부품연구원
IPC: H01H59/00
Abstract: PURPOSE: An RF MEMS switch is provided to maintain switch operation even without applying voltages to a driving unit, by controlling the residual stress generated during manufacturing process. CONSTITUTION: An RF MEMS switch comprises an elastic support member(14), a lower electrode(15), a piezo-thin film, an upper electrode(17), an armature(13), and a high frequency input electrode(11) and a high frequency output electrode(12). The elastic support member supports thin films stacked into layers. The lower electrode is formed on the elastic support member. The piezo-thin film is formed on the lower electrode so as to induce driving forces. The upper electrode is formed on the piezo-thin film. The armature is formed beneath an end of the elastic support member, and controls electrical connection and disconnection of the high frequency input electrode and output electrode. The high frequency input electrode and output electrode unit are spaced apart from the armature for electrical insulation.
Abstract translation: 目的：提供RF MEMS开关，通过控制制造过程中产生的残余应力，即使不向驱动单元施加电压，也可以保持开关操作。 构成：RF MEMS开关包括弹性支撑构件（14），下电极（15），压电薄膜，上电极（17），电枢（13）和高频输入电极（11） 和高频输出电极（12）。 弹性支撑构件支撑层叠的薄膜。 下电极形成在弹性支撑构件上。 压电薄膜形成在下电极上以引起驱动力。 上电极形成在压电薄膜上。 电枢形成在弹性支撑构件的端部下方，并且控制高频输入电极和输出电极的电连接和断开。 高频输入电极和输出电极单元与衔铁隔开以进行电绝缘。
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公开(公告)号：KR100327619B1
公开(公告)日：2002-03-15
申请号：KR1020000006053
申请日：2000-02-09
IPC: G01P15/08
Abstract: 본 발명의 반도체 실리콘 가속도센서는 측정하고자 하는 외부가속도가 발생하였을 때 가속도 크기에 비례하는 힘을 발생시키는 중앙 부분의 X, Y축 대칭으로 이루어진 네 부분의 진동질량부(20)와, 상기 진동질량을 지지대에 연결하고 쉽게 움직일 수 있도록 해주는 스프링부(22)와, 진동질량의 가속도에 비례하는 변위의 크기를 전기적 신호로 변환시켜주는 진동질량에 있는 빗살모양의 이동전극부(24) 및 외측 지지대에 위치하는 고정전극부(26)로 구성되어 진다.
본 발명에 의하면 타축가속도에 의해 센서구조물이 움직이더라도 이것이 구조적으로 자체 상쇄됨으로써 센서의 최종출력에는 영향을 미치지 않을 뿐만 아니라, 과대변위에 따른 센서파손을 막을 수 있다.-
公开(公告)号：KR1020010086618A
公开(公告)日：2001-09-15
申请号：KR1020000006053
申请日：2000-02-09
IPC: G01P15/08
CPC classification number: G01P15/10 , B06B1/045 , G01P15/125 , G01P15/18
Abstract: PURPOSE: An apparatus composed of a semiconductor silicon for sensing an acceleration is provided to prevent a damage due to the overrange without interfering the final output of a sensor by compensating for a displacement in itself even if the structure of the sensor is moved. CONSTITUTION: Four vibration-mass unit(20) generate a force proportional to the magnitude of an acceleration when an external acceleration to be measured is generated, wherein the center of each vibration-mass unit is composed of crossed X and Y axes. A spring unit(22) connects the vibration-mass units(20) to a supporting member to make it to easily be moved. A mobile electrode(24) converts into an electrical signal the magnitude of a displacement proportional to the acceleration of the vibration-mass units(20). The mobile electrode(24) is provided on the vibration-mass units(20) and a fixed electrode(26) is placed on an outer supporting member.
Abstract translation: 目的：提供一种由用于感测加速度的半导体硅组成的装置，以便即使传感器的结构移动，也可以通过补偿位移本身来防止由于超范围造成的损坏而不干扰传感器的最终输出。 构成：当产生要测量的外部加速度时，四个振动质量单元（20）产生与加速度的大小成比例的力，其中每个振动质量单元的中心由交叉的X和Y轴组成。 弹簧单元（22）将振动质量单元（20）连接到支撑构件以使其容易地移动。 移动电极（24）将与振动质量单元（20）的加速度成比例的位移的大小转换为电信号。 移动电极（24）设置在振动质量单元（20）上，固定电极（26）被放置在外部支撑构件上。
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Patent Agency Ranking
公开(公告)号：KR101215919B1
公开(公告)日：2012-12-27
申请号：KR1020100078321
申请日：2010-08-13
Applicant: 전자부품연구원
CPC classification number: G01L9/12 , G01L9/0042 , G01L9/0073 , G01L19/0076 , H01L29/66007 , H01L29/84
Abstract: 본발명은압력검출시공동이외의영역에서잡음으로작용하는기생정전용량을최소화하여미소센서를구현할수 있는정전용량형압력센서및 그의제조방법을제공하는데그 목적이있다. 이를위해, 본발명은하부전극으로기능하는기판과, 상기기판상에형성된제1 절연막과, 상기제1 절연막상에형성된공동과, 상기공동과연통하는개구부를가지며, 상기공동을덮도록상기제1 절연막상에형성된제2 절연막과, 상기개구부를매개로상기개구부와상기공동의일부가매립되도록전도성재질로형성된밀봉막과, 상기공동과중첩되도록상기제2 절연막상에형성된상부전극을포함하는정전용량형압력센서를제공한다. 따라서, 본발명에의하면, 공동을형성한후 상기공동의양측부에전도성재질로밀봉막을앵커(anchor) 형상으로형성하고, 상기밀봉막과전기적으로분리되어상기공동과중첩되는상부전극을형성하여압력검출시실질적으로영향을미치는공동영역을상기밀봉막을통해특정영역으로제한함으로써압력검출시공동이외의영역에서잡음으로작용하는기생정전용량을최소화하여미소센서를구현할수 있다.
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公开(公告)号：KR101090739B1
公开(公告)日：2011-12-08
申请号：KR1020090037974
申请日：2009-04-30
Applicant: 전자부품연구원
IPC: G01N27/12 , H01L21/203
Abstract: 반도체기판; 상기반도체기판상에형성되는마이크로히터층; 상기마이크로히터상에형성되는감지전극층; 상기감지전극상부에형성되는감지물질층을포함하고, 상기감지물질층은상기감지전극층상에미리형성된촉매층을이용하여상기감지전극층상에직접성장되어형성되는것을특징으로하는마이크로가스센서및 그제조방법을제공한다.
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公开(公告)号：KR1020110055974A
公开(公告)日：2011-05-26
申请号：KR1020090112622
申请日：2009-11-20
Applicant: 전자부품연구원
Abstract: PURPOSE: A capsule endoscope and a driving method thereof are provided to stably pick up an image in a small intestine by minimizing the power consumption of a capsule endoscope. CONSTITUTION: A switching unit(300) switches drive power. The drive power is provided from a power supply unit(400). An image pickup driver(200) picks up the images of a digestive organ in real time. A drive power supply controller(100) measures the pH of the digestive organ. The drive power supply controller compares the measured pH with a reference pH and controls the switching unit and the drive power.
Abstract translation: 目的：提供一种胶囊型内窥镜及其驱动方法，通过使胶囊型内窥镜的功耗最小化来稳定地取出小肠中的图像。 构成：开关单元（300）切换驱动电源。 驱动功率由电源单元（400）提供。 图像拾取驱动器（200）实时拾取消化器官的图像。 驱动电源控制器（100）测量消化器官的pH值。 驱动电源控制器将测量的pH与参考pH进行比较，并控制开关单元和驱动功率。
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公开(公告)号：KR1020100073431A
公开(公告)日：2010-07-01
申请号：KR1020080132102
申请日：2008-12-23
Applicant: 전자부품연구원
CPC classification number: A61M15/003 , A61J3/07 , A61K9/4808 , A61K9/50 , A61M31/002 , A61M2205/35 , A61M2205/3673
Abstract: PURPOSE: A capsule type dispensing device and a dosing method thereof are provided, which can make medicine directly approach a target affected part in the living body. CONSTITUTION: A capsule type dispensing device comprises: a medicine maintenance unit and a circuit maintenance unit; and a blocking wall installed between the medicine maintenance unit and circuit maintenance unit. The circuit maintenance unit includes: a power supply unit(17) supplying the power to the circuit; a communications unit(16) receiving a drug release signal from the outside; and a controller(15) for controlling the drug release. In the medicine maintenance unit, a drug release outlet for drug release is formed.
Abstract translation: 目的：提供一种胶囊型分配装置及其配药方法，其可以使药物直接接近生物体内的目标受影响部位。 一种胶囊型分配装置，包括：药物维护单元和电路维护单元; 以及安装在药物维护单元和电路维护单元之间的阻塞壁。 电路维护单元包括：向电路供电的电源单元（17）; 从外部接收药物释放信号的通信单元（16）; 以及用于控制药物释放的控制器（15）。 在药物维持单元中，形成用于药物释放的药物释放出口。
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公开(公告)号：KR1020080114023A
公开(公告)日：2008-12-31
申请号：KR1020070063168
申请日：2007-06-26
Applicant: 전자부품연구원
CPC classification number: H01L21/02603 , B82Y10/00 , H01L21/0228 , H01L21/02532 , H01L21/28556 , H01L21/324
Abstract: The method for manufacturing nanowires is provided to use the silicon nano wire that does not completely float as the sacrificial layer and to manufacture the nanowire which has the stress-proof in the material deposition. The nanowire manufacturing method comprises as follows. A step is for making the silicon nano wire. A step is for evaporating the material for making the nanowire in the silicon nano wire. A step is for removing the silicon nano wire. The silicon nano wire is connected to the silicon substrate(200) by the silicon or the oxide film.
Abstract translation: 提供了制造纳米线的方法，以使用不完全浮动的硅纳米线作为牺牲层，并制造在材料沉积中具有抗应力的纳米线。 纳米线的制造方法如下。 制造硅纳米线的一个步骤。 一个步骤是蒸发硅纳米线中的纳米线材料。 一步是去除硅纳米线。 硅纳米线通过硅或氧化物膜连接到硅衬底（200）。
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