컬러 투사 모아레 기법을 이용한 3차원 형상 측정 장치 및 방법
    61.
    发明公开
    컬러 투사 모아레 기법을 이용한 3차원 형상 측정 장치 및 방법 有权
    使用彩色投影光线技术进行三维图形化的装置和方法

    公开(公告)号:KR1020100041026A

    公开(公告)日:2010-04-22

    申请号:KR1020080100004

    申请日:2008-10-13

    Abstract: PURPOSE: An apparatus and a method for measuring three dimensional shape using color projection moire technique are provided, which can improve measurement speed by measuring phase information calculated by the grid pattern. CONSTITUTION: An apparatus for measuring three dimensional shape using color projection moire technique comprises a computer(14), a projector(10), and a color CCD camera(12). The computer generates three RGB patterns with different grid gaps using an internally stored program. The projector projects the RGB pattern to a measurement object(11). The color CCD camera obtains the RGB pattern projected to the measurement object as an image. The apparatus for measuring three dimensional shape measures the phase information measured through the CCD camera.

    Abstract translation: 目的:提供一种使用彩色投影云纹技术测量三维形状的装置和方法,其可以通过测量由网格图案计算的相位信息来提高测量速度。 构成:使用彩色投影莫尔技术测量三维形状的装置包括计算机(14),投影仪(10)和彩色CCD照相机(12)。 计算机使用内部存储的程序生成具有不同网格间隙的三个RGB模式。 投影机将RGB图案投影到测量对象(11)。 彩色CCD相机获得作为图像投影到测量对象的RGB图案。 用于测量三维形状的装置测量通过CCD照相机测量的相位信息。

    형상 측정장치 및 그 방법
    62.
    发明公开
    형상 측정장치 및 그 방법 有权
    用于测量形状的装置和方法

    公开(公告)号:KR1020090025971A

    公开(公告)日:2009-03-11

    申请号:KR1020070091213

    申请日:2007-09-07

    CPC classification number: G01B11/2441

    Abstract: A shape measuring apparatus and method are provided to improve the measurement precision by using a plurality of laser devices outputting interference signal for detecting the wavelength of the generated beam. A shape measuring apparatus comprises a plurality of laser devices(111,116) which generate beams, emit the specific frequency beam among the generated beams, and output interference signal for detecting the wavelength of the generated beam; and a controller(120) which detects the wavelength of the generated beam from the outputted interference signal and controls the laser devices based on the detected wavelength.

    Abstract translation: 提供一种形状测量装置和方法,通过使用多个激光装置输出用于检测所产生的光束的波长的干涉信号来提高测量精度。 一种形状测量装置,包括产生光束的多个激光装置(111,116),在产生的光束之间发射特定频率波束,并输出用于检测所产生的波束的波长的干扰信号; 以及控制器(120),其根据所输出的干扰信号检测所生成的光束的波长,并根据所检测的波长控制激光装置。

    열팽창계수 측정 간섭계 및 그 방법
    63.
    发明授权
    열팽창계수 측정 간섭계 및 그 방법 失效
    열팽창계수측정간섭계및그방법

    公开(公告)号:KR100875489B1

    公开(公告)日:2008-12-22

    申请号:KR1020070042722

    申请日:2007-05-02

    Abstract: A thermal expansion coefficient measuring interferometer and a method thereof are provided to measure thermal expansion coefficient more accurately by measuring the minute length change of a measurement object according to the temperature change. A thermal expansion coefficient measuring interferometer comprises a polarization beam splitter(220) and a plurality of corner cube prisms(232,234,236). The polarization beam splitter reflects and transmits a first beam and a second beam according to the polarization component so that the first beam is split into a third beam and a fourth beam and the second beam into a fifth beam and a sixth beam. The corner cube prism changes the beam path of the incident beam if at least one of the third beam and the sixth beam enters from the polarization beam splitter.

    Abstract translation: 提供一种热膨胀系数测量干涉仪及其方法,通过根据温度变化测量测量对象的微小长度变化来更精确地测量热膨胀系数。 热膨胀系数测量干涉仪包括偏振分束器(220)和多个隅角棱镜(232,234,236)。 偏振分束器根据偏振分量反射和发送第一光束和第二光束,使得第一光束被分成第三光束和第四光束,而第二光束被分成第五光束和第六光束。 如果第三光束和第六光束中的至少一个从偏振分束器进入,则角锥棱镜改变入射光束的光束路径。

    3차원 좌표측정 장치 및 방법
    64.
    发明公开
    3차원 좌표측정 장치 및 방법 失效
    用于测量三维坐标的装置和方法

    公开(公告)号:KR1020080107168A

    公开(公告)日:2008-12-10

    申请号:KR1020070055145

    申请日:2007-06-05

    CPC classification number: G01B11/24 G01B11/03 G01B11/04 G01B11/2441

    Abstract: An apparatus and a method for measuring three dimensional coordinates are provided to measure a moving pate of an object, to obtain a wide measurement range and to measure three dimensional coordinates rapidly of the object with high resolution. A light generator(410) generates the light. A reference optical fiber irradiates the generated light. An object optical fiber is installed in the object to be measured and irradiates the light. A plurality of optical detectors(441,449) detects an interference pattern generated by the light irradiated in the reference optical fiber(420) and the object light fiber(430). An operation unit(450) calculates 3D position vector of the object to be measured from a plurality of detected interference pattern.

    Abstract translation: 提供了一种用于测量三维坐标的装置和方法,以测量物体的运动状态,获得宽的测量范围,并以高分辨率快速测量物体的三维坐标。 光发生器(410)产生光。 参考光纤照射所产生的光。 物体光纤安装在待测物体中并照射光。 多个光检测器(441,449)检测由在基准光纤(420)和物体光纤(430)中照射的光产生的干涉图案。 操作单元(450)从多个检测到的干涉图案计算待测物体的3D位置矢量。

    열팽창계수 측정 간섭계
    65.
    发明公开
    열팽창계수 측정 간섭계 无效
    用于测量热膨胀系数的干涉仪

    公开(公告)号:KR1020080097627A

    公开(公告)日:2008-11-06

    申请号:KR1020070042727

    申请日:2007-05-02

    Abstract: An interferometer for measuring thermal expansion coefficient can calculate the amount of length change of a measurement object more accurately without an error due to the deformation of the glass plate according to temperature. An interferometer for measuring thermal expansion coefficient includes a measurement target system(250), an optical system(210), and a vacuum chamber(200). The measurement target system comprises a measurement object(254) and a reference plate(255) on which the measurement object is loaded. The optical system splits incident light, modulates the frequency of the split light, and projects the modulated light to the measurement object and the reference plate respectively. The optical system also couples the respective light reflected from the measurement object and the reference plate, and detects the beat signal generated due to the interference generated in the optical coupling. The vacuum chamber maintains the vacuum condition with the measurement target system and optical system installed inside.

    Abstract translation: 用于测量热膨胀系数的干涉仪可以更准确地计算测量对象的长度变化量,而不会由于玻璃板根据温度的变形而产生误差。 用于测量热膨胀系数的干涉仪包括测量目标系统(250),光学系统(210)和真空室(200)。 测量对象系统包括测量对象(254)和参考板(255),测量对象被加载到其上。 光学系统分离入射光,调制分光的频率,并将调制光分别投射到测量对象和参考板。 光学系统还耦合从测量对象和参考板反射的各个光,并且检测由于在光耦合中产生的干扰而产生的拍频信号。 真空室保持真空状态,测量目标系统和光学系统安装在内部。

    오염 입자 검사를 위한 차동 영상 이미징 장치 및 측정 방법

    公开(公告)号:KR101890161B1

    公开(公告)日:2018-08-21

    申请号:KR1020160049965

    申请日:2016-04-25

    Abstract: 본발명은암시야조명현미경시스템및 암시야조명현미경의동작방법을제공한다. 본발명의일 실시예에따른암시야현미경은광학박막에의한산란광을관측한다. 상기암시야현미경의동작방법은상기광학박막에제1 조명광을조사하고상기광학박막으로부터산란된광을수집하여제1 조명영상을제공하는단계; 상기광학박막에상기제1 조명광과동일한광경로를통하여제2 조명광을조사하고상기광학박막으로부터산란된광을수집하여제2 조명영상을제공하는단계; 및상기제1 조명영상과상기제2 조명영상의차이로구성된차동영상을제공하는단계를포함한다. 상기제1 조명광은상기광학박막에대하여투과광을증가시키는조건으로선택되고, 상기제2 조명광은상기광학박막에대하여반사광을증가시키는조건으로선택된다.

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