公开(公告)号：WO2004066337A1

公开(公告)日：2004-08-05

申请号：PCT/JP2004/000294

申请日：2004-01-16

Applicant: 浜松ホトニクス株式会社 ,  杉山 浩之 ,  赤井 義朗 ,  酒井 四郎

Inventor： 杉山 浩之 ,  赤井 義朗 ,  酒井 四郎

IPC: H01J9/12

CPC classification number: C22B26/10 ,  C22B5/04 ,  C23C14/14 ,  C23C14/243 ,  H01J1/35 ,  H01J9/12 ,  H01J2201/32 ,  H01J2201/3426

Abstract: An alkali metal generating agent (1) for use in forming a photoelectric surface emitting a photoelectron corresponding to an incident light or a secondary electron emission surface emitting a secondary electron corresponding to an incident electron, which comprises an oxidizing agent comprising at least one tungstate having an alkali metal ion as a counter cation and a reducing agent for reducing the above cation. The above metal generating agent (1), which includes a tungstate having weaker oxidizing power than that of a chromate, undergoes slower oxidation-reduction reaction, which results in easier reaction rate control as compared to a conventional technique using a chromate, leading to the generation of an alkali metal with good stability.

Abstract translation: 一种用于形成发光对应于入射光的光电子的光电面的碱金属发生剂（1）或发射对应于入射电子的二次电子的二次电子发射表面，该氧化剂包括至少一种具有至少一个钨酸盐的钨酸盐， 作为抗衡阳离子的碱金属离子和还原上述阳离子的还原剂。 与使用铬酸盐的常规技术相比，上述具有比铬酸盐的氧化能力弱的钨酸盐的金属发生剂（1）经历较慢的氧化还原反应，这导致更容易的反应速率控制，导致 一代碱金属具有良好的稳定性。

公开(公告)号：WO01054157A1

公开(公告)日：2001-07-26

申请号：PCT/JP2001/000213

申请日：2001-01-16

IPC: H01J1/34 ,  H01J1/32 ,  H01J1/35 ,  H01J40/06 ,  H01J43/06 ,  H01J43/08 ,  H01J43/10 ,  H01J43/18

CPC classification number: B82Y10/00 ,  H01J1/35 ,  H01J43/06 ,  H01J43/10 ,  H01J2201/30469 ,  H01J2201/32 ,  H01J2201/3426 ,  Y10S977/952

Abstract: A cathode (5) for emitting photoelectrons or secondary electrons comprises a nickel electrode substrate (5c) with an aluminum layer (5b) deposited on it; an intermediate layer (5a) consisting of carbon nanotubes formed on the aluminum layer; and an alkaline metal layer (5d) formed on the intermediate layer (5a) and composed, for example, of particles of an alkali antimony compound that either emits photoelectrons in response to incident light or emits secondary electrons in response to incident electrons. The decrease in defect density of the particles reduces the probability of recombination of electron and hole remarkably, thus increasing quantum efficiency.

Abstract translation: 用于发射光电子或二次电子的阴极（5）包括沉积有铝层（5b）的镍电极基板（5c） 由形成在所述铝层上的碳纳米管构成的中间层（5a） 以及形成在中间层（5a）上的碱金属层（5d），其由例如响应于入射光发射光电子的碱锑化合物颗粒构成，或者响应入射电子发射二次电子。 颗粒的缺陷密度的降低降低了电子和空穴的显着复合的可能性，从而提高了量子效率。

公开(公告)号：WO98050934A1

公开(公告)日：1998-11-12

申请号：PCT/IL1998/000202

申请日：1998-04-28

IPC: H01J9/12 ,  H01J1/34 ,  H01J40/06

CPC classification number: H01J1/34 ,  H01J2201/3426

Abstract: This invention discloses a thin-film-coated photocathode, including a photocathode formed of first material consisting of potassium cesium antimonide and a thin-film coating of a second material consisting of cesium bromide (CsBr).

Abstract translation: 本发明公开了一种薄膜涂覆的光电阴极，其包括由铯铯铯组成的第一材料和由溴化铯（CsBr）组成的第二材料的薄膜涂层形成的光电阴极。

公开(公告)号：US20190108966A1

公开(公告)日：2019-04-11

申请号：US16150675

申请日：2018-10-03

Applicant: KLA-TENCOR CORPORATION

Inventor： Gildardo R. Delgado ,  Rudy F. Garcia ,  Katerina Ioakeimidi ,  Frances Hill ,  Michael E. Romero

IPC: H01J37/06 ,  H01J37/28 ,  H01J19/24

CPC classification number: H01J37/073 ,  G02B27/0927 ,  H01J1/3044 ,  H01J1/34 ,  H01J19/24 ,  H01J37/06 ,  H01J37/26 ,  H01J37/28 ,  H01J40/06 ,  H01J40/18 ,  H01J2201/30411 ,  H01J2201/30449 ,  H01J2201/3048 ,  H01J2201/308 ,  H01J2201/3423 ,  H01J2201/3425 ,  H01J2201/3426 ,  H01J2237/06333 ,  H01J2237/24521 ,  H01J2237/24592 ,  H01J2237/2817 ,  H01L21/67288

Abstract: A photocathode structure, which can include an alkali halide, has a protective film on an exterior surface of the photocathode structure. The protective film includes ruthenium. This protective film can be, for example, ruthenium or an alloy of ruthenium and platinum. The protective film can have a thickness from 1 nm to 20 nm. The photocathode structure can be used in an electron beam tool like a scanning electron microscope.

公开(公告)号：US20060152154A1

公开(公告)日：2006-07-13

申请号：US10542233

申请日：2004-01-16

Applicant: Hiroyuki Sugiyama ,  Yoshiro Akai ,  Shirou Sakai

Inventor： Hiroyuki Sugiyama ,  Yoshiro Akai ,  Shirou Sakai

IPC: H01J31/50

CPC classification number: C22B26/10 ,  C22B5/04 ,  C23C14/14 ,  C23C14/243 ,  H01J1/35 ,  H01J9/12 ,  H01J2201/32 ,  H01J2201/3426

Abstract: The present invention relates to an alkali metal generating agent and others for formation of a photo-cathode or a secondary-electron emitting surface capable of stably generating an alkali metal. The alkali metal generating agent is used in formation of a photo-cathode for emitting a photoelectron corresponding to incident light, or in formation of a secondary-electron emitting surface for emitting secondary electrons corresponding to an incident electron. Particularly, the alkali metal generating agent contains at least an oxidizer comprising at least one molybdate with an alkali metal ion as a counter cation, and a reducer for reducing the ion. An alkali metal generating device comprises at least the alkali metal generating agent and a case housing it, and the case is provided with a discharge port for discharging the vapor of the alkali metal.

Abstract translation: 本发明涉及一种用于形成能够稳定产生碱金属的光阴极或二次电子发射表面的碱金属发生剂等。 碱金属发生剂用于形成用于发射对应于入射光的光电子的光阴极，或者形成用于发射对应于入射电子的二次电子的二次电子发射表面。 特别地，碱金属发生剂至少包含含有至少一种具有碱金属离子的钼酸盐作为抗衡阳离子的氧化剂和用于还原离子的还原剂。 碱金属发生装置至少包括碱金属发生剂和容纳它的壳体，并且壳体设置有用于排出碱金属的蒸气的排出口。

公开(公告)号：US5619100A

公开(公告)日：1997-04-08

申请号：US234158

申请日：1994-04-28

Applicant: Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

Inventor： Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

IPC: H01J9/12 ,  H01J9/18 ,  H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J43/18

CPC classification number: H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J9/12 ,  H01J9/18 ,  H01J2201/32 ,  H01J2201/3426

Abstract: A photomultiplier is constituted by a photocathode and an electron multiplier having a typical structure in which a dynode unit having a plurality of dynode plates stacked in an incident direction of photoelectrons, an anode plate, and an inverting dynode plate are sequentially stacked. Through holes for injecting a metal vapor are formed in the inverting dynode plate to form secondary electron emitting layers on the surfaces of dynodes supported by the dynode plates, and the photocathode. With this structure, the secondary electron emitting layers are uniformly formed on the surfaces of the dynodes. Therefore, variations in output signals obtained from anodes can be reduced regardless of the positions of the photocathode.

Abstract translation: 光电倍增管由具有典型结构的光电阴极和电子倍增器构成，其中依次堆叠具有沿光电子的入射方向堆叠的多个倍增极板的倍增电极单元，阳极板和反相倍增极板。 用于注入金属蒸汽的通孔形成在反相倍增器板中，以在由倍增极板和光电阴极支撑的倍增极的表面上形成二次电子发射层。 利用这种结构，二次电子发射层均匀地形成在倍增电极的表面上。 因此，无论光电阴极的位置如何，可以减少从阳极获得的输出信号的变化。

公开(公告)号：US5572089A

公开(公告)日：1996-11-05

申请号：US234153

申请日：1994-04-28

Applicant: Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

Inventor： Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

IPC: H01J9/12 ,  H01J9/18 ,  H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22

CPC classification number: H01J43/12 ,  H01J43/04 ,  H01J43/10 ,  H01J43/22 ,  H01J9/12 ,  H01J9/18 ,  H01J2201/32 ,  H01J2201/3426

Abstract: A photomultiplier includes a photocathode and an electron multiplier. A typical structure of the electron multiplier is obtained such that a dynode unit constituted by stacking a plurality of dynode plates in the incident direction of photoelectrons, an anode plate, and an inverting dynode plate are stacked. The anode plate has electron through holes at a predetermined portion to cause secondary electrons emitted from the dynode unit to pass therethrough. Each electron through hole has a diameter on the inverting dynode plate side larger than that on the dynode unit side, thereby increasing the capture area of the secondary electrons orbit-inverted by the inverting dynode plate.

Abstract translation: 光电倍增管包括光电阴极和电子倍增器。 获得电子倍增器的典型结构，使得在光电子的入射方向上堆叠多个倍增极板构成的倍增电极单元，阳极板和反相倍增极板堆叠。 阳极板在预定部分具有电子通孔，以使从倍增极单元发射的二次电子通过。 每个电子通孔的反转倍增极板侧的直径大于倍增极单元侧的直径，从而增加由反相倍增极板轨道反转的二次电子的捕获面积。

公开(公告)号：US5557166A

公开(公告)日：1996-09-17

申请号：US457744

申请日：1995-06-01

Applicant: Yasushi Watase ,  Hiroaki Washiyama ,  Toshio Ikuma

Inventor： Yasushi Watase ,  Hiroaki Washiyama ,  Toshio Ikuma

IPC: H01J40/06 ,  H01J1/34 ,  H01J43/06 ,  H01J43/08 ,  H01J40/16

CPC classification number: H01J43/06 ,  H01J1/34 ,  H01J2201/3426

Abstract: The photocathode according to this invention is characterized in that an aluminium thin film is formed on a substrate, and then an antimony thin layer is deposited directly on the aluminium thin film and is activated by an alkali metal. It is especially preferable that the antimony thin layer is deposited in a thickness of 15 .mu.g/cm.sup.2 to 45 .mu.g/cm.sup.2 and is activated by an alkali metal. Such reflection-type photocathode is applicable to photomultipliers. Among functions which are considered to be done by the Al film. which is in direct contact with the Sb layer, a first one is to prevent the alloying between the Sb layer and the substrate (e.g., Ni), and a second one is to augment a reflectance of light to be detected.

Abstract translation: 根据本发明的光电阴极的特征在于在基板上形成铝薄膜，然后将锑薄层直接沉积在铝薄膜上并被碱金属活化。 特别优选的是，锑薄层以15g / cm 2至45g / cm 2的厚度沉积，并被碱金属活化。 这种反射型光电阴极适用于光电倍增管。 被认为是由Al电影完成的功能。 其与Sb层直接接触，第一种是防止Sb层和衬底（例如Ni）之间的合金化，第二种是增加要检测的光的反射率。

公开(公告)号：US5532551A

公开(公告)日：1996-07-02

申请号：US234020

申请日：1994-04-28

Applicant: Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

Inventor： Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

IPC: H01J40/04 ,  H01J9/12 ,  H01J9/18 ,  H01J43/04 ,  H01J43/06 ,  H01J43/10 ,  H01J43/12 ,  H01J43/20 ,  H01J43/22

CPC classification number: H01J9/12 ,  H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J9/18 ,  H01J2201/32 ,  H01J2201/3426

Abstract: A photomultiplier has a focusing electrode plate for supporting focusing electrodes, provided between a photocathode and a dynode unit. Since the focusing electrode plate has holding springs which are integrally formed with the focusing electrode plate, resistance-welding becomes unnecessary to prevent field discharge. A concave portion is formed in a main surface of the focusing electrode plate to arrange an insulating member sandwiched between the focusing electrode plate and the photoelectron incidence side of the dynode unit and partially in contact with the concave portion. With this structure, discharge between the focusing electrode plate and the dynode unit can be prevented.

Abstract translation: 光电倍增管具有聚焦电极板，用于支撑聚光电极，设置在光电阴极和倍增极单元之间。 由于聚焦电极板具有与聚焦电极板一体形成的保持弹簧，所以不需要电阻焊接以防止场放电。 在聚焦电极板的主表面上形成有凹部，将绝缘构件夹在聚光电极板和倍增极单元的光电子入射侧之间，并与凹部部分接触。 利用这种结构，可以防止聚焦电极板和倍增极单元之间的放电。

公开(公告)号：US5491380A

公开(公告)日：1996-02-13

申请号：US234152

申请日：1994-04-28

Applicant: Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

Inventor： Hiroyuki Kyushima ,  Koji Nagura ,  Yutaka Hasegawa ,  Eiichiro Kawano ,  Tomihiko Kuroyanagi ,  Akira Atsumi ,  Masuya Mizuide

IPC: H01J9/12 ,  H01J9/18 ,  H01J43/04 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22

CPC classification number: H01J43/10 ,  H01J43/04 ,  H01J43/12 ,  H01J43/22 ,  H01J9/12 ,  H01J9/18 ,  H01J2201/32 ,  H01J2201/3426

Abstract: A photomultiplier which can be easily made compact has a dynode unit having a plurality of dynode plates stacked in an electron incident direction in a vacuum container fabricated by a housing and a base member integrally formed with the housing. Each dynode plate is constituted by welding at least two plates overlapping each other. The welding positions do not overlap each other in the stacking direction of the dynode plates. With this structure, field discharge at the welding portions between the dynode plates can be prevented to reduce noise.

Abstract translation: 可以容易地制造的光电倍增器具有在由壳体和与壳体一体形成的基座构件制造的真空容器中具有堆叠在电子入射方向上的多个倍增极板的倍增电极单元。 每个倍增极板通过焊接彼此重叠的至少两个板构成。 焊接位置在倍增极板的层叠方向上不重叠。 利用这种结构，可以防止倍增极板之间的焊接部分的场放电以减少噪声。