Abstract:
A device for holding a specimen holder, the device including a body with a slot formed therein. The slot includes an interior for receiving the specimen holder which may be a flat disk with edges and a pair of opposing sides. The disk may be made of a resilient deformable material. The slot may be sized to receive the specimen holder through an open top end and may taper from top bottom, such that the bottom end of the slot is smaller than the specimen holder. The slot further configured to contact the specimen holder along edges of the specimen holder and to allow some sideways deformation of the specimen holder without either side of the specimen holder distant from the edges coming into contact with the interior of the slot.
Abstract:
A method of ion implantation comprising: providing a plasma within a plasma region of a chamber; positively biasing a first grid plate, wherein the first grid plate comprises a plurality of apertures; negatively biasing a second grid plate, wherein the second grid plate comprises a plurality of apertures; flowing ions from the plasma in the plasma region through the apertures in the positively-biased first grid plate; flowing at least a portion of the ions that flowed through the apertures in the positively-biased first grid plate through the apertures in the negatively-biased second grid plate; and implanting a substrate with at least a portion of the ions that flowed through the apertures in the negatively-biased second grid plate.
Abstract:
A method for wafer bonding two substrates activated by ion implantation is disclosed. An in situ ion bonding chamber allows ion activation and bonding to occur within an existing process tool utilized in a manufacturing process line. Ion activation of at least one of the substrates is performed at low implant energies to ensure that the wafer material below the thin surface layers remains unaffected by the ion activation.
Abstract:
A method for wafer bonding two substrates activated by ion implantation is disclosed. An in situ ion bonding chamber allows ion activation and bonding to occur within an existing process tool utilized in a manufacturing process line. Ion activation of at least one of the substrates is performed at low implant energies to ensure that the wafer material below the thin surface layers remains unaffected by the ion activation.
Abstract:
Methods and apparatus for providing and processing serial tissue sections. In one example, an "automatic tape collecting lathe ultramicrotome" (ATLUM) slices a block of tissue sample having various geometries into a continuous ribbon of thin tissue, or multiple thin tissue sections, and disposes the sliced thin tissue on an appropriate substrate to facilitate subsequent imaging of the sliced thin tissue. Closed-loop control of section thickness of the sliced thin tissue sections or ribbons is implemented to produce thinner sliced tissue sections or ribbons and tightly regulate thickness. Thin tissue sections or ribbons may be particularly processed/prepared to facilitate imaging with a scanning electron microscope (SEM). Collected thin tissue sections or ribbons may be used to create UltraThin Section Libraries (UTSLs) that allow for fully automated, time-efficient imaging in the SEM to faciliate expansive tissue studies.
Abstract:
A device, method and system for preparing and storing samples for microscopic analysis is disclosed. The device provides a reservoir that can be attached to a displacement pipette thereby filling the reservoir with reagents desired for preparing the samples for microscopic analysis. In some embodiments, the specimen may be contained on a transmission electron microscope (TEM) grid. In other embodiments, the sample may be a light microscope (LM) specimen or a scanning electron microscope (SEM) specimen. In yet another embodiment, the invention provides a method of preparing samples for microscopic examination including a device for preparing TEM grids with, a device for preparing TEM, SEM or LM specimens with and a device for storing both grids and specimens in. In yet another embodiment, the invention provides a system for tracking the preparation, analysis and histological evaluation of multiple samples while also providing for their long term storage.
Abstract:
An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.