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公开(公告)号：DE60236019D1
公开(公告)日：2010-05-27
申请号：DE60236019
申请日：2002-12-18
Applicant: MARINER ACQUISITION CO LLC , RUDOLPH TECHNOLOGIES INC
Inventor： SNOW DONALD B , STROM JOHN T , KRAFT RAYMOND H
Abstract: A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.
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公开(公告)号：AT464535T
公开(公告)日：2010-04-15
申请号：AT02806181
申请日：2002-12-18
Applicant: RUDOLPH TECHNOLOGIES INC , MARINER ACQUISITION COMPANY LL
Inventor： SNOW DONALD , STROM JOHN , KRAFT RAYMOND
Abstract: A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.
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公开(公告)号：SG11201408664YA
公开(公告)日：2015-01-29
申请号：SG11201408664Y
申请日：2013-06-27
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： STEFANCZYK WOJCIECH , KANE JAMES FRANCIS , COLGAN MICHAEL , ABONDOLO JAMES
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公开(公告)号：SG193874A1
公开(公告)日：2013-10-30
申请号：SG2013067939
申请日：2009-09-10
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： DOE RODNEY , STROM JOHN T
Abstract: Abstract PROBE MARK INSPECTIONProbe mark inspection involves a recipe based on unique image characteristics or combinations of unique image characteristics. Result images are correlated with a reference created to determine which image characteristic or combination of image characteristics provides an improved contrast.Figure 5b
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公开(公告)号：SG11201805283UA
公开(公告)日：2018-07-30
申请号：SG11201805283U
申请日：2016-12-23
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： FITZGERALD WAYNE
IPC: H01L21/78 , H01L21/02 , H01L21/76 , H01L21/764
Abstract: A method for monitoring and controlling a substrate singulation process is described. Device edges are imaged and identified for analysis. Discrepancies in device edges are noted and used to modify a singulation process and to monitor the operation of singulation processes for anomalous behavior.
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Patent Agency Ranking
公开(公告)号：SG10201607779QA
公开(公告)日：2016-11-29
申请号：SG10201607779Q
申请日：2012-10-17
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： PINKNEY TIMOTHY , BISHOP ROBERT
Abstract: A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.
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公开(公告)号：AU2012326276B2
公开(公告)日：2016-02-04
申请号：AU2012326276
申请日：2012-10-17
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： BISHOP ROBERT , PINKNEY TIMOTHY
IPC: G01N21/956 , G02B27/40
Abstract: A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.
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公开(公告)号：SG11201507587QA
公开(公告)日：2015-10-29
申请号：SG11201507587Q
申请日：2014-02-05
Applicant: RUDOLPH TECHNOLOGIES INC , UNIV COLORADO REGENTS
Inventor： MURRAY TODD , MEHENDALE MANJUSHA , KOTELYANSKII MICHAEL , MAIR ROBIN , MUKUNDHAN PRIYA , MURRAY TODD , MEHENDALE MANJUSHA , KOTELYANSKII MICHAEL , MAIR ROBIN , MUKUNDHAN PRIYA
IPC: H01L21/66
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公开(公告)号：SG188094A1
公开(公告)日：2013-03-28
申请号：SG2013007521
申请日：2009-01-30
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： LE TUAN D
Abstract: HIGH RESOLUTION EDGE INSPECTIONSystems and methods of inspection for a substrate. At least two images of a selected portion of the substrate edge are captured using an optical imaging system, and each characterized by a discrete focal distance setting of the optical imaging system. A composite image of the substrate edge is formed from the at least two images. Defect(s) are identified in the composite image. Some optical systems can include at least one optical element having an optical power and a focusing mechanism for modifying a focal distance of the optical system.FIG. 2
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公开(公告)号：SG173755A1
公开(公告)日：2011-09-29
申请号：SG2011059540
申请日：2010-02-17
Applicant: RUDOLPH TECHNOLOGIES INC
Inventor： BALAK SCOTT A , SUN GANG
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