公开(公告)号：KR1020030044167A

公开(公告)日：2003-06-09

申请号：KR1020010074818

申请日：2001-11-29

Applicant: 삼성전자주식회사

Inventor： 송훈

IPC: B81B7/00

CPC classification number: B81B7/02 ,  B81B2201/01 ,  B81B2201/03 ,  B81C1/00015

Abstract: PURPOSE: An actuator used in a micro electro mechanical system, and tweezers and a switch utilizing the same are provided to reduce power consumption, to improve an operational speed and to easily fabricate the actuator by fabricating each beam of the actuator with the same material. CONSTITUTION: An actuator used in a micro electro mechanical system(100) includes a pair of beams(110,120), which are made of the same material. Lengths of the beams(110,120) are different from each other. The beams(110,120) are parallel aligned to each other. The beams(110,120) are made of metal having a predetermined thermal coefficient, such as copper. Upper ends of the beams(110,120) are fixed to each other by means of a fixing section(130). The fixing section(130) is integrally formed with the beams(110,120). A pair of power supplying terminals(111,121) is formed at a lower end of the beams(110,120).

Abstract translation: 目的：在微机电系统中使用的致动器，以及镊子和使用其的开关，以减少功耗，提高操作速度，并通过用相同的材​​料制造致动器的每个梁来容易地制造致动器。 构成：用于微机电系统（100）的致动器包括由相同材料制成的一对梁（110,120）。 梁（110,120）的长度彼此不同。 梁（110,120）彼此平行对准。 梁（110,120）由具有预定热系数的金属制成，例如铜。 梁（110,120）的上端通过固定部分（130）彼此固定。 固定部分（130）与梁（110,120）一体地形成。 一对供电端子（111,121）形成在梁（110,120）的下端。

公开(公告)号：KR1020060113105A

公开(公告)日：2006-11-02

申请号：KR1020050035981

申请日：2005-04-29

Applicant: 한국과학기술원

Inventor： 조영호 ,  이재용 ,  한원

IPC: B81B3/00

CPC classification number: B81B3/0062 ,  B81B3/0064 ,  B81B2201/03

Abstract: An actuator in serial multi-interconnection is provided to control the increase degree of a total driving distance by differently setting the driving distance of each micro actuator. In an actuator in serial multi-interconnection, micro actuators(110,120) include elastic bodies(111,121), displacement generators(113,123), and mass bodies(112,122). The elastic bodies are connected to the micro actuators at a fixed end or a front end. The displacement generators deform the elastic bodies as much as individual driving distances. The mass bodies are moved by the distance generator as much as the individual driving distances, and return to origin positions by the elastic bodies.

Abstract translation: 提供串联多重互连的致动器，以通过不同地设置每个微致动器的驱动距离来控制总行驶距离的增加程度。 在串联多重互连的致动器中，微致动器（110,120）包括弹性体（111,121），位移发生器（113,123）和质量体（112,122）。 弹性体在固定端或前端连接到微致动器。 位移发生器使弹性体像单独的行驶距离一样变形。 质量体被距离发生器移动到与各个行驶距离一样多的位置，并且通过弹性体返回原点位置。

公开(公告)号：KR1020050049933A

公开(公告)日：2005-05-27

申请号：KR1020030083705

申请日：2003-11-24

Applicant: 한국과학기술연구원

Inventor： 김병규 ,  강현재 ,  남궁영우

IPC: B81B7/02

CPC classification number: B81B7/02 ,  B81B2201/03 ,  G06F3/041

Abstract: 본 발명은 미세 조작 방법 및 그 시스템에 관한 것으로, 특히 미세 부품 조작에 있어서 수동 조작, 자동 조작 및 원격 조종 조작을 선택적으로 실시할 수 있는 하이브리드 타입 미세 조작 방법 및 그 시스템에 관한 것이다.
본 발명에 의한 하이브리드 타입 미세 조작 방법 및 그 시스템은 미세 조작에 있어서 역각 정보를 제공할 뿐만 아니라 3차원의 가상 영상을 제공함으로써, 파손되기 쉬운 미세 조작 대상물의 파손을 방지할 수 있어서 미세 조작을 보다 정밀하고 효율적으로 할 수 있도록 한다.
또한, 미세 조작 대상물 정보에 따라 조작 방법을 적절히 선택할 수 있어서, 미세 조작을 신속하게 진행하면서도 미세 조작을 안정적으로 수행할 수 있기 때문에 미세 조작의 신뢰성 및 효율성을 높일 수 있다. 또한, 본 발명은 종래의 미세 조작이 수동으로 진행됨에 따른 미세 조작 기술 습득의 어려움을 해결하며, 미세 조작 과정에 있어서 조작 미숙 등으로 인한 손떨림 등의 노이즈가 발생하는 경우 동적으로 비례 계수를 변화시켜 상기 노이즈를 제거함으로써 조작자의 숙련도에 따른 미세 조작 결과의 편차로 인한 문제점을 해결하여 보다 안정적이고 효율적으로 미세 조작을 수행할 수 있도록 한다.

公开(公告)号：KR1020030027435A

公开(公告)日：2003-04-07

申请号：KR1020010060682

申请日：2001-09-28

Applicant: 광주과학기술원

Inventor： 이종현 ,  권호남

IPC: B81B5/00

CPC classification number: B81B5/00 ,  B81B3/0062 ,  B81B2201/03 ,  B81B2203/01 ,  B81B2203/06

Abstract: PURPOSE: A micro driver is provided to obtain high strength and long distance driving characteristic by installing five or six articulating units including two driving bars and two driven bars. CONSTITUTION: A micro driver(100) includes two drive amplifying bars(111,112), two driven bars(121,122) and five rotating articulated units(151,152,161,162,17). The driven bars(121,122) are connected to each other by means of a rotating articulated unit(17). The drive amplifying bars(111,112) are rotatably connected to the other end of the driven bars(121,122) through the rotating articulated units(161,162). The drive amplifying bars(111,112) are arranged parallel to each other while forming a predetermined interval. Free ends of the drive amplifying bars(111,112) are rotatably fixed to a substrate by means of rotating articulated units(151,152).

Abstract translation: 目的：通过安装五个或六个铰接单元，包括两个驱动杆和两个驱动杆，提供一个微型驱动器，以获得高强度和长距离的驾驶特性。 构成：微型驱动器（100）包括两个驱动放大杆（111,112），两个从动杆（121,122）和五个旋转铰接单元（151,152,161,162,17）。 从动杆（121,122）通过旋转铰接单元（17）彼此连接。 驱动放大杆（111,112）通过旋转铰接单元（161,162）可旋转地连接到从动杆（121,122）的另一端。 驱动放大杆（111,112）彼此平行地布置，同时形成预定间隔。 驱动放大杆（111,112）的自由端通过旋转铰接单元（151,152）可旋转地固定到基板。

公开(公告)号：KR1020010051498A

公开(公告)日：2001-06-25

申请号：KR1020000065928

申请日：2000-11-07

Applicant: 제이디에스 유니페즈 코오포레이션

Inventor： 우드로버트엘. ,  더들리부르스더블유.

IPC: B81B7/02

CPC classification number: B81C1/00333 ,  B81C2203/0136 ,  B81B7/0032 ,  B81B3/0018 ,  B81B7/02 ,  B81B2201/01 ,  B81B2201/0242 ,  B81B2201/03 ,  B81C1/00349 ,  B81C1/00476

Abstract: PURPOSE: A method for encapsulating microelectromechanical(MEMS) structures is provided which the MEMS structures are formed on a substrate and encapsulated prior to packaging thereof. CONSTITUTION: A MEMS microrelay(200) is typically formed on a substrate(210) and comprises, for example, an active actuator(220), a relay structure(230), and a passive actuator(240). In some cases, the structures forming the microrelay further include associated bond pads(250) at which the necessary electrical connections to the structures are established.The bonding pads forms electrical contact points providing the necessary electrical power for the active actuator or the connections to the relay structure. Typically, the operation of a MEMS device, such as the MEMS microrelay described, requires mechanical motion of components of the microrelay for the device to operate as intended.

Abstract translation: 目的：提供一种用于封装微机电（MEMS）结构的方法，其中MEMS结构形成在衬底上并在其包装之前被封装。 构成：MEMS微型继电器（200）通常形成在衬底（210）上，并且包括例如主动致动器（220），中继结构（230）和无源致动器（240）。 在一些情况下，形成微型继电器的结构还包括相关联的接合焊盘（250），在该接合焊盘处形成与结构的必要的电连接。接合焊盘形成电接触点，为主动致动器提供必要的电力或者连接至 继电器结构。 通常，诸如所描述的MEMS微型继电器之类的MEMS器件的操作需要微型继电器的部件的机械运动，以使器件根据预期进行操作。

公开(公告)号：KR1020010049190A

公开(公告)日：2001-06-15

申请号：KR1020000000270

申请日：2000-01-05

Applicant: (주) 인텔리마이크론즈 ,  재단법인서울대학교산학협력재단

Inventor： 김용권 ,  김재흥

IPC: B81C1/00

CPC classification number: B81C1/00015 ,  B81B3/0021 ,  B81B2201/03 ,  B81C2201/0101

Abstract: PURPOSE: A microactuator and a method for manufacturing the same are provided to manufacture the microactuator in a simple manner and maintain linearity in even case of moving in two-dimension. CONSTITUTION: A method for manufacturing a microactuator includes the steps of anodic-bonding a silicon substrate and a glass substrate by heating, thinning the exposed surface of the silicon substrate by lapping and polishing, applying a photosensitive film to the exposed surface of the silicon substrate and radiating light to the photosensitive film, developing the photosensitive film, etching the silicon substrate by using RIE(Reactive ion etching) for forming positioning controllers, removing polymer and the photosensitive film for completing positioning controller pattern, and wet-etching the glass substrate by making the positioning controllers as a mask and using HF solution.

Abstract translation: 目的：提供微致动器及其制造方法，以简单的方式制造微致动器，并且即使在二维移动的情况下也保持线性。 构成：微致动器的制造方法包括以下步骤：通过加热使硅衬底和玻璃衬底进行阳极结合，通过研磨和抛光来稀释硅衬底的暴露表面，将光敏膜施加到硅衬底的暴露表面 并且将光照射到感光膜上，使感光膜显影，利用用于形成定位控制器的RIE（反应离子蚀刻），去除聚合物和感光膜来完成定位控制器图案，并通过以下步骤湿法蚀刻玻璃衬底，来蚀刻硅衬底 使定位控制器作为掩模，并使用HF解决方案。