公开(公告)号：EP2105727A1

公开(公告)日：2009-09-30

申请号：EP09250792.0

申请日：2009-03-20

Applicant: JEOL Ltd.

Inventor： Nishiyama, Hidetoshi ,  Koizumi, Mitsuru

IPC: G01N23/225 ,  H01J37/20 ,  H01J37/26 ,  H01J37/28

CPC classification number: G01N23/2251 ,  G01N23/2204 ,  G01N2223/307 ,  G01N2223/612 ,  G01N2223/637 ,  H01J37/20 ,  H01J37/228 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/182 ,  H01J2237/2004 ,  H01J2237/244 ,  H01J2237/2808

Abstract: Method and apparatus capable of well observing or inspecting a liquid sample (20). The apparatus, for example a scanning electrode microscope, can be maintained and serviced better than heretofore. The apparatus has a film (32) including a first surface (32a) to hold the liquid sample (20) thereon, a vacuum chamber (11) for reducing the pressure of an ambient in contact with a second surface (32b) of the film (32), primary beam irradiation means (1) connected with the vacuum chamber (11) and irradiating the sample with a primary beam (7) via the film (32), signal detection means (4) for detecting a secondary signal produced from the sample (20) in response to the beam irradiation (7), a partitioning plate (14) for partially partitioning off the space between the film (32) and the primary beam irradiation means (1) in the vacuum chamber (11), and a vacuum gauge (15) for detecting the pressure inside the vacuum chamber (11).
Damage to the film is detected by a pressure increase inside the vacuum chamber. After detecting such a pressure increase the partitioning member is moved in the path of the irradiating beam in order to prevent sample material to spill into the irradiation means.

Abstract translation: 方法和能够很好观察或检查的液体样品（20）装置。 的装置，例如扫描电极显微镜，可以维护和服务比以前更好。 该装置具有一个膜（32）包括第一表面（32A）以保持液体样品（20）在其上，在真空室（11），用于与膜的第二面（32B）减少接触的环境的压力 （32），主光束照射单元（1）与所述真空室（11）连接，并且经由膜照射主光束（7）的样品（32）中，信号检测器，用于检测从产生的次级信号的装置（4） 响应于所述光束照射（7）的样品（20），分隔板（14），用于在真空室中部分分隔从薄膜（32）和初级束照射设备（1）之间的空间（11）， 和真空计（15），用于检测所述真空室（11）内的压力。 损坏膜是通过在真空室内部的压力增加来检测。 检测寻求的压力增加分隔构件设置在照射光束的路径移动，以防止样品材料溢出到照射装置之后。

公开(公告)号：EP1978355A1

公开(公告)日：2008-10-08

申请号：EP07707104.1

申请日：2007-01-19

Applicant: Juridical Foundation Osaka Industrial Promotion Organization ,  Osaka University

Inventor： KUWABATA, Susumu ,  TORIMOTO, Tsukasa

IPC: G01N23/225 ,  G01N1/28 ,  G01N23/04 ,  H01J37/20

CPC classification number: G01N23/225 ,  G01N1/30 ,  H01J37/20 ,  H01J2237/0044 ,  H01J2237/2004

Abstract: An object of the present invention is to provide a medium; a specimen; a method for preparing the specimen; a method for observing the specimen; a sample cell; and an electron microscope capable of easily solving the problem of charge-up and further capable of observing a real shape or the like of a sample with a SEM, a TEM or the like. For the purpose of achieving the above-described object, the present invention uses an electrical conductivity-imparting liquid medium, for use in a microscope, which includes an ionic liquid as an essential component thereof and is impregnated into the entirety of a SEM or TEM sample or applied to the observation surface of a SEM or TEM sample to impart electrical conductivity at least to the observation surface of the sample. According to the present invention, the charge built up on the sample surface can be released simply by impregnating or coating the sample with the ionic liquid, and hence the problem of charge-up can be easily solved. Further, even when a sample impregnated or coated with the ionic liquid is placed under vacuum, the ionic liquid is not evaporated from the sample, and hence a biological sample can be observed as it is in an original shape.

Abstract translation: 本发明的一个目的是提供一种介质; 样本; 用于制备样品的方法; 用于观察标本的方法; 样品池; 和上能够解决轻松的过度充电的麻烦并且还能够观察真实形状等用SEM，TEM一个或类似物的样品的电子显微镜。 为了实现上述目的的目的，本发明使用的导电性赋予液体培养基中，用在显微镜，在离子液体包括作为其必要成分，并浸渍到SEM或TEM的整体性 样品或施加到SEM或TEM样品的表面观察到赋予导电性至少与样品的观察面。 。根据本发明，建立了样品表面上的电荷，可以简单地通过浸渍或涂覆与离子液体样品释放，并​​因此充了麻烦可以容易地解决。 此外，即使当浸渍或与离子液体涂布的样品放置在真空下，离子液体不从样品蒸发，因此生物样品可以观察到，因为它是在到原来的形状。

公开(公告)号：EP1796133A3

公开(公告)日：2007-09-19

申请号：EP06012530.9

申请日：2006-06-19

Applicant: Lee, Bing-Huan

Inventor： Chao, Chih-Yu ,  Hsien, Wen-Jiunn

IPC: H01J37/26 ,  H01J37/20

CPC classification number: H01J37/26 ,  B01L3/508 ,  B01L2300/0822 ,  B01L2300/14 ,  H01J37/20 ,  H01J2237/2004

Abstract: A specimen box for an electron microscope capable of observing a general specimen or a live cell is formed of a housing (11). The housing includes a receiving chamber (16) formed therein and at least one view hole (17) formed on each of a top side thereof and a bottom side thereof and communicating with the receiving chamber and coaxially aligned with the other. The distance between a bottom end of the view hole located on the top side of the housing and a top end of the view hole located on the bottom side of the housing is smaller than 50µm. The housing is ultra-thin to enable penetration of the electron beam therethrough even though a liquid specimen is injected into the housing. A general specimen or a live cell can be put into the housing for the microscopic observation under the electron microscope.

公开(公告)号：US09786469B2

公开(公告)日：2017-10-10

申请号：US15233176

申请日：2016-08-10

Applicant: University of Washington

Inventor： Liguo Wang

IPC: H01J37/20 ,  H01J37/16 ,  H01J37/26 ,  C23F1/40 ,  C23F4/00

CPC classification number: H01J37/16 ,  C23F1/40 ,  C23F4/00 ,  H01J37/20 ,  H01J37/26 ,  H01J37/261 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

Abstract: A grid assembly for cryo-electron microscopy may be fabricated using standard nanofabrication processes. The grid assembly may comprise two support members, each support member comprising a silicon substrate coated with an electron-transparent silicon nitride layer. These two support members are positioned together with the silicon nitride layers facing each other with a rigid spacer layer disposed therebetween. The rigid spacer layer defines one or more chambers in which a biological sample may be provided and fast frozen with a high degree of control of the ice thickness.

公开(公告)号：US20170221676A1

公开(公告)日：2017-08-03

申请号：US15514539

申请日：2014-10-09

Applicant: Hitachi High-Technologies Corporation

Inventor： Takeshi SUNAOSHI ,  Yasuhira NAGAKUBO ,  Kazutaka NIMURA

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/18

CPC classification number: H01J37/28 ,  H01J37/18 ,  H01J37/20 ,  H01J2237/1825 ,  H01J2237/2001 ,  H01J2237/2004 ,  H01J2237/2802

Abstract: Provided is an electron microscope with which a sample can be observed stably and with high accuracy. The electron microscope comprises: a sample stage; an electron optical system that scans an electron beam over a sample; a vacuum system that maintains the sample stage and the electron optical system in a vacuum; a secondary electron detector that detects secondary electrons emitted from the sample; transmitted electron detectors that detect transmitted electrons that have transmitted through the sample; and a control device that obtains a secondary electron image and a transmitted electron image on the basis of the secondary electrons and the transmitted electrons detected by the secondary electron detector and the transmitted electron detectors and stores the secondary electron image and the transmitted electron image. The sample stage is provided with cooling means for cooling the sample. The vacuum system is provided with a cold trap that sucks moisture from around the sample and a vacuum gauge that measures the degree of vacuum of the vacuum system.

公开(公告)号：US09508527B2

公开(公告)日：2016-11-29

申请号：US14646159

申请日：2013-11-26

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Takashi Ohshima ,  Sukehiro Ito

IPC: H01J37/26 ,  H01J37/16 ,  H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/22 ,  H01J37/18

CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20235 ,  H01J2237/2445 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/2608 ,  H01J2237/2801

Abstract: This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.

Abstract translation: 该带电粒子束装置将由带电粒子显微镜产生的初级带电粒子束照射到构成至少一部分试样基底的发光部件上的试样上，除了通过以下方式获得带电粒子显微镜图像 检测通过或散射在样品内的带电粒子的发光部件在样品仍然配置在样品平台上的同时通过光学显微镜获得光学显微镜图像。

公开(公告)号：US20160172152A1

公开(公告)日：2016-06-16

申请号：US14964586

申请日：2015-12-10

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Hung Lee ,  Cheng-Yu Lee ,  Chun-Lin Chiang ,  Kun-Chih Tsai ,  Win-Ti Lin

IPC: H01J37/18 ,  H01J37/244 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G01N35/1095 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/2004 ,  H01J2237/2065

Abstract: An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.

Abstract translation: 电子显微镜包括载体，第一驱动单元，流动缓冲单元和电子源。 载体携带样品。 第一驱动单元驱动第一流体沿着第一流动路径流动，其中第一流动路径通过样品。 流缓冲单元设置在第一流路上以对第一流体进行缓冲，其中第一流体依次流过流缓冲单元和载体。 电子源向样品提供电子束。

公开(公告)号：US09207196B2

公开(公告)日：2015-12-08

申请号：US13299241

申请日：2011-11-17

Applicant: Niels De Jonge

Inventor： Niels De Jonge

IPC: G01N23/00 ,  G01N23/22 ,  G01N23/225 ,  H01J37/20 ,  B01L3/00

CPC classification number: G01N23/2204 ,  B01L3/502715 ,  G01N23/2251 ,  H01J37/20 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2802

Abstract: In one aspect, the present invention relates to a microfluidic chamber. In one embodiment, the microfluidic chamber has a first sub-chamber and at least one second sub-chamber. The first sub-chamber has a first window and a second window. Both the first window and the second window are transparent to electrons of certain energies. The second window is positioned substantially parallel and opposite to the first window defining a first volume therebetween. The first window and the second window are separated by a distance that is sufficiently small such that an electron beam that enters from the first window can propagate through the first sub-chamber and exit from the second window. The at least one second sub-chamber is in fluid communication with the first sub-chamber and has a second volume that is greater than the first volume of the first sub-chamber.

Abstract translation: 一方面，本发明涉及一种微流体室。 在一个实施例中，微流体室具有第一子室和至少一个第二子室。 第一子室具有第一窗口和第二窗口。 第一窗口和第二窗口对于某些能量的电子是透明的。 第二窗口基本平行且相对于第一窗口定位，在第一窗口之间限定第一容积。 第一窗口和第二窗口被分开足够小的距离，使得从第一窗口进入的电子束可以传播通过第一子室并从第二窗口排出。 所述至少一个第二子室与所述第一子室流体连通并且具有大于所述第一子室的第一容积的第二容积。

公开(公告)号：US20150311033A1

公开(公告)日：2015-10-29

申请号：US14443293

申请日：2013-11-21

Applicant: HITACHI HIGH-TECHNOLOGY CORPORATION

Inventor： Yusuke OMINAMI ,  Mami KONOMI ,  Shinsuke KAWANISHI ,  Hiroyuki SUZUKI

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/22 ,  H01J37/16

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2608 ,  H01J2237/28

Abstract: A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.

Abstract translation: 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。

公开(公告)号：US20120182548A1

公开(公告)日：2012-07-19

申请号：US13386567

申请日：2010-07-23

Applicant: Maher Harb ,  Alex Paarmann ,  Jason Dwyer ,  Dwayne R. J. Miller

Inventor： Maher Harb ,  Alex Paarmann ,  Jason Dwyer ,  Dwayne R. J. Miller

IPC: G01N1/10 ,  B32B37/14 ,  B32B37/02

CPC classification number: G01N21/05 ,  B82Y35/00 ,  G01N29/032 ,  G01N29/222 ,  G01N2021/0346 ,  G01N2223/637 ,  G01N2291/02466 ,  G01N2291/048 ,  H01J37/20 ,  H01J2237/2003 ,  H01J2237/2004

Abstract: A flow cell is provided for the analysis and/or microscopy of liquid or gas samples on the nanometer to micron scale. The flow cell preferably includes a thin membrane that is transparent to electrons and/or photons, thereby enabling the penetration of electrons or photons into a liquid flowing through the cell. Trenches are provided on either side of the membrane, which advantageously minimize fluidic resistance outside of the window area of the cell and also enable a faster response time in response to changes in external fluidic pressure. This feature enables active feedback using pathlength sensitive probes to stabilize the fluid flow to thin streams from nanometer to micron scale thicknesses with nanometer precision.

Abstract translation: 提供流动池用于分析和/或显微镜的液体或气体样品纳米级至微米级。 流动池优选地包括对电子和/或光子是透明的薄膜，从而使电子或光子能够渗透到流过电池的液体中。 在膜的任一侧设置沟槽，这有利地最小化了细胞窗口区域之外的流体阻力，并且响应于外部流体压力的变化也能够实现更快的响应时间。 该功能可以使用光程探头将主动反馈稳定到具有纳米级精度的纳米级至微米级厚度的稀薄流。