ELECTRON BEAM APPARATUS COMPRISING MONOCHROMATOR

    公开(公告)号:US20190154502A1

    公开(公告)日:2019-05-23

    申请号:US15527588

    申请日:2016-05-20

    Abstract: The present invention relates to an electron beam apparatus including a monochromator in which cylindrical electrostatic lenses for deflecting a path of an electron beam in the lenses are arranged symmetrically and an aperture including a plurality of selectable slits is disposed therebetween to be able to select an electron beam having a specified energy range. The electron beam apparatus has a monochromator having high resolution and excellent stability and maintainability by disposing slits and circular openings in one aperture part in parallel arrangement, thereby improving spatial resolution and energy resolution.

    Sample loading device for electrostatic levitation apparatus

    公开(公告)号:US10033307B2

    公开(公告)日:2018-07-24

    申请号:US14840525

    申请日:2015-08-31

    CPC classification number: H02N13/00 F27B17/02 G01N1/28 G01N11/00 H02N1/002

    Abstract: Sample loading device and electrostatic levitation apparatus. The electrostatic levitation apparatus includes a sample storage part including a rod-shaped sample standby part having an external diameter of a first diameter and a rod-shaped sample loading part having an external diameter of a second diameter and a sample cover part covering the sample standby part. The sample storage part has a loading bar inserting hole formed in its center. The loading bar inserting hole is formed through the sample standby part and is formed successively through a portion of the sample loading part. The sample standby part has sample storage vertical through-holes. The sample loading part has a single sample transfer vertical through-hole. The sample transfer vertical through-hole is formed on a surface where the sample storage vertical through-hole is viewed, penetrates the sample loading part, and is connected to the loading bar inserting hole.

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