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    82.
    发明专利
    未知

    公开(公告)号：DE69627645T2

    公开(公告)日：2004-02-05

    申请号：DE69627645

    申请日：1996-07-31

    Applicant: ST MICROELECTRONICS SRL

    Inventor： VIGNA BENEDETTO ,  FERRARI PAOLO ,  VILLA FLAVIO

    IPC: G01L9/06 ,  B81B3/00 ,  B81C1/00 ,  G01L9/00 ,  H01L29/84

    Abstract: The pressure sensor is integrated in a SOI (Silicon-on-Insulator) substrate using the insulating layer as a sacrificial layer, which is partly removed by chemical etching to form the diaphragm. To fabricate the sensor, after forming the piezoresistive elements (10) and the electronic components (4, 6-8) integrated in the same chip, trenches (26) are formed in the upper wafer (23) of the substrate and extending from the surface to the layer of insulating material (22); the layer of insulating material (22) is chemically etched through the trenches (26) to form an opening (31) beneath the diaphragm (27); and a dielectric layer (25) is deposited to outwardly close the trenches (26) and the opening (31). Thus, the process is greatly simplified, and numerous packaging problems eliminated.

    83.
    发明专利
    未知

    公开(公告)号：IT1321065B1

    公开(公告)日：2003-12-30

    申请号：ITTO20001067

    申请日：2000-11-14

    Applicant: ST MICROELECTRONICS SRL

    Inventor： VIGNA BENEDETTO ,  SASSOLINI SIMONE ,  ZERBINI SARAH ,  BALDO LORENZO

    IPC: G11B5/596

    Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.

    84.
    发明专利
    未知

    公开(公告)号：DE69708067T2

    公开(公告)日：2002-07-11

    申请号：DE69708067

    申请日：1997-06-27

    Applicant: ST MICROELECTRONICS SRL

    Inventor： VIGNA BENEDETTO ,  MAGGI RICCARDO

    IPC: B41J2/05 ,  B41J2/125 ,  B41J2/14 ,  B41J2/16

    Abstract: The inkjet print head comprises an ink drop emission mini-gun (30) and a drop emission sensor (4) integrated in a chip of semiconductor material. The mini-gun is formed by an ink chamber (21) and a nozzle (23) in communication with the ink chamber and the drop emission sensor includes a resistive element (4) arranged in a position adjacent to the ink chamber (21). The resistance of the resistive element (4) depends on the pressure exerted thereon, so that when the mini-gun emits an ink drop, it is subjected to a recoil movement which causes a change of pressure and hence of resistance in the resistive element; this change in resistance may be detected through a suitable circuitry (29) to identify whether and when a drop of ink has been emitted.

    85.
    发明专利
    未知

    公开(公告)号：DE69708067D1

    公开(公告)日：2001-12-13

    申请号：DE69708067

    申请日：1997-06-27

    Applicant: ST MICROELECTRONICS SRL

    Inventor： VIGNA BENEDETTO ,  MAGGI RICCARDO

    IPC: B41J2/05 ,  B41J2/125 ,  B41J2/14 ,  B41J2/16

    Abstract: The inkjet print head comprises an ink drop emission mini-gun (30) and a drop emission sensor (4) integrated in a chip of semiconductor material. The mini-gun is formed by an ink chamber (21) and a nozzle (23) in communication with the ink chamber and the drop emission sensor includes a resistive element (4) arranged in a position adjacent to the ink chamber (21). The resistance of the resistive element (4) depends on the pressure exerted thereon, so that when the mini-gun emits an ink drop, it is subjected to a recoil movement which causes a change of pressure and hence of resistance in the resistive element; this change in resistance may be detected through a suitable circuitry (29) to identify whether and when a drop of ink has been emitted.

    87.
    发明专利
    未知

    公开(公告)号：ITTO20001067D0

    公开(公告)日：2000-11-14

    申请号：ITTO20001067

    申请日：2000-11-14

    Applicant: ST MICROELECTRONICS SRL

    Inventor： VIGNA BENEDETTO ,  SASSOLINI SIMONE ,  ZERBINI SARAH ,  BALDO LORENZO

    IPC: G11B5/596

    Abstract: Described herein is a read/write transducer for a hard disk drivewith dual actuation stage, comprising at least one hard disk and at least one suspension carrying the read/write transducer. The read/write transducer comprises a supporting body having a substantially parallelepipedal shape, a read/write head arranged on a front face of the supporting body, and a grating defined on one of the side faces of the supporting body during the process of manufacture of the read/write transducer. The grating enables measurement of the position of the read/write transducer with respect to the corresponding suspension in an optical way using a laser transmitter emitting and directing towards the grating a laser beam, and a laser receiver arranged to intercept the laser beam reflected by the grating and outputting a position signal on the basis of which it is possible to calculate, in a simple way, the position of the read/write transducer with respect to the corresponding suspension.

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