Abstract:
PURPOSE: A gas sensor using metal oxide nanorods and a manufacturing method thereof are provided to evenly form nanorods between two electrodes. CONSTITUTION: A gas sensor using metal oxide nanorods the substrate in which the nano template is formed on(S210). The metal oxide layer is formed on the surface of the nano template(S220). The metal oxide layer formed on the top of the nano template is eliminated from the upper side of the nano template(S230). The nano template is removed from the upper side part of the nano template in order to from metal oxide nanorods of tubular(S240). The upper electrode is formed on the metal oxide nanorods(S250).
Abstract:
Provided is a method for manufacturing a sensor portion of a biosensor used in detecting biomolecules. The method includes the steps of: applying a photo- sensitive material on a substrate; lithographically etching the photo- sensitive material to form a nano-size sensor portion precursor; and pyrolyzing the sensor portion precursor to form a sensor portion composed of conductive carbon.
Abstract in simplified Chinese:本发明提出一种具有复合传感功能的穿戴式设备,包含:一穿戴组件,可供穿戴于一用户的一身体部位上,该穿戴组件具有至少一透光口;至少一个复合传感芯片模块,设置于该穿戴组件内,用以运行影像传感与红外线温度传感之功能,该复合传感芯片模块包含一影像传感模块,用以经由该至少一透光口而以影像传感方式传感一待测物之物理或生理特征;以及一红外线温度传感模块,用以经由该至少一透光口而以红外线温度传感方式传感温度。
Abstract:
In described examples of a method for fabricating packaged semiconductor devices with an open cavity (110a) in panel format, the method includes: placing on an adhesive carrier tape a panel-sized grid of metallic pieces having a flat pad (230) and symmetrically placed vertical pillars (231); attaching semiconductor chips (101) with sensor systems face-down onto the tape; laminating and thinning low CTE insulating material to fill gaps between chips and grid; turning over assembly to remove tape; plasma-cleaning assembly front side, sputtering and patterning uniform metal layer across assembly and optionally plating metal layer to form rerouting traces and extended contact pads for assembly; laminating (212) insulating stiffener across panel; opening (213) cavities in stiffener to access the sensor system; and singulating (214) packaged devices by cutting metallic pieces.
Abstract:
본 발명은 절연성 지지부재 상에 형성된 나노포어 구조를 이용한 나노포어 구조체, 그 제조방법 및 나노포어 구조를 이용한 이온 소자에 관한 것이다. 본 발명의 일 실시예에 따른 나노포어 구조체는 실리콘 및 실리콘을 함유하는 화합물 중 적어도 하나를 포함하여 이루어지며 중앙부에 일측과 타측을 관통하는 마이크로포어가 형성되어 있는 절연성 지지부재와, 질화실리콘(SiN)을 포함하여 이루어지며 상기 절연성 지지부재 상에 배치되고 중앙부에 상기 마이크로포어와 연통되도록 상기 마이크로포어보다 크기가 작은 나노포어가 형성되어 있는 나노포어 막을 구비하고, 상기 나노포어 막과 상기 절연성 지지부재는 친수성 표면처리에 의해 부착된다.