公开(公告)号：JP2004245883A

公开(公告)日：2004-09-02

申请号：JP2003032650

申请日：2003-02-10

Applicant: Sony Corp ,  St Lcd Kk ,  エスティ・エルシーディ株式会社 ,  ソニー株式会社

Inventor： KOIKE TATSUYA ,  HOSODA KOJI

IPC: G02F1/1343

Abstract: PROBLEM TO BE SOLVED: To provide a display device for stably manufacturing a display unit by non-destructively confirming a feed state of a conductive adhesive on the halfway of a manufacturing process, and also to provide its manufacturing method.
SOLUTION: An opening 21K is provided at a part corresponding to the arrangement region of a common pad 12 provided on one face of a light transmission substrate 10 out of black masks 21 provided on one face of a light transmission substrate 20. When the substrates 10 and 20 are stuck to each other, the common pad 12 surface can be observed over the substrate 20 through the opening 21K provided on the black masks 21. Thus, the feed state of a common agent 30 fed on the common pad 12 can be visually non-destructively confirmed on the halfway of the manufacturing process of the liquid crystal display device.
COPYRIGHT: (C)2004,JPO&NCIPI

公开(公告)号：JP2004165373A

公开(公告)日：2004-06-10

申请号：JP2002328607

申请日：2002-11-12

Applicant: St Lcd Kk ,  エスティ・エルシーディ株式会社

Inventor： FUKAMI KATSUMI ,  YAMAZAKI TAKESHI

IPC: G03F7/16 ,  B05C5/02 ,  B05C11/10 ,  H01L21/027

Abstract: PROBLEM TO BE SOLVED: To prevent the drying of nozzles and reduce discarded resist. SOLUTION: This resist coating equipment 10 is provided with the nozzles 11 which are arranged at a plurality of parts of one line in a process and used for switching, and a resist tank 12 for storing resist to be supplied to the nozzles 11. A slit-shaped output port is formed in the nozzle 11. In the middle of connection piping 13 which connects the resist tank 12 and the nozzle 11, an opening and closing valve 14 for opening and closing the piping 13 is arranged. In the piping 13, a switching valve 15 for supplying rinse to the nozzle 11 is arranged between the resist tank 12 and the valve 14. The switching valve 15 is formed so as to switch a state that the valve 14 is interconnected with the resist tank 12 and interconnection between the valve 14 and a rinse tank 17 is cut, and a state that the valve 14 is interconnected with the rinse tank 17 and interconnection between the valve 14 and the resist tank 12 is cut. COPYRIGHT: (C)2004,JPO

Abstract translation: 要解决的问题：为了防止喷嘴的干燥并减少废弃的抗蚀剂。 解决方案：该抗蚀剂涂布设备10设置有喷嘴11，喷嘴11在一个工艺中的多个部分布置并用于切换;以及抗蚀剂罐12，用于存储要供应到喷嘴11的抗蚀剂 在喷嘴11中形成有狭缝状的输出口。在连接保护罐12和喷嘴11的连接配管13的中部配置有用于打开和关闭管道13的开关阀14。 在管道13中，在抗蚀剂罐12和阀14之间设置有用于向喷嘴11供给冲洗的切换阀15.切换阀15形成为切换阀14与抗蚀剂槽相互连接的状态 切断阀14与冲洗槽17之间的相互连接，并且切断阀14与冲洗槽17相互连接的状态，并且切断阀14与抗蚀剂箱12之间的连接状态。 版权所有（C）2004，JPO

公开(公告)号：JP2004111723A

公开(公告)日：2004-04-08

申请号：JP2002273451

申请日：2002-09-19

Applicant: St Lcd Kk ,  エスティ・エルシーディ株式会社

Inventor： SUDA TAKESHI

IPC: B65D45/02 ,  B65D53/00 ,  B65D85/86 ,  F16J15/12 ,  H01L21/673 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To provide a carrier box which has a simple structure, is superior in the internal airtight holding ability, which can be enlarged and lightened and which can transport a carrier at low cost by holding a state of high cleanliness. SOLUTION: The carrier box is formed to hold an inner part of a box body 2 to an airtight state with high cleanliness in a closed state of a door 4. The carrier box is transported between a plurality of clean rooms, disposed across a general environment with low cleanliness level, in a state where the carrier is stored. A magnet packing 20, having a packing rubber part 21 sealing a part between the box body 2 and the door 4 and having elasticity and a rubber magnet 22, is fitted to the door 4. The rubber magnet 22 is embedded in the packing rubber part 21. An iron plate 27 is disposed at a position facing the rubber magnet 22 in the box body 2. The packing rubber part 21 and the rubber magnet 22 are arranged so that they are overlapped in a vertical direction, with respect to the door 4. COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003167249A

公开(公告)日：2003-06-13

申请号：JP2001368722

申请日：2001-12-03

Applicant: SONY CORP ,  ST LCD KK

Inventor： FUKUNAGA YOKO ,  KOMATSU HIROSHI ,  AIDA NOBUHIRO ,  MUNAKATA MASAKI

IPC: G02B5/08 ,  G02F1/1335

Abstract: PROBLEM TO BE SOLVED: To improve discoloration of a reflection film consisting of silver or an alloy containing silver and to enhance display quality. SOLUTION: In a manufacturing method for a liquid crystal display element 1 having a liquid crystal layer 16 between a pair of substrates 2 and 3 disposed opposite to each other and the reflection film 9 consisting of silver or the alloy containing silver and formed on one of the pair of substrates 2 and 3, after the reflection film is formed, the reflection film 9 is subjected to heat treatment and/or liquid chemical treatment with alkaline liquid chemical prior to the next stage. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2003146429A

公开(公告)日：2003-05-21

申请号：JP2001351518

申请日：2001-11-16

Applicant: ST LCD KK

Inventor： SUDA TAKESHI

IPC: B65G49/00 ,  F24F7/06 ,  H01L21/673 ,  H01L21/677 ,  H01L21/68

Abstract: PROBLEM TO BE SOLVED: To pass a carrier storing an article to be conveyed which is conveyed by a conveying vehicle or the like between a plurality of clean rooms provided with a public environment between them between inside and outside of the clean room while keeping the environment of the carrier with simple constitution. SOLUTION: The carrier 17 storing an article to be conveyed is conveyed between the clean rooms 11 through the public environment 12 using a carrier conveying container 18 provided with a sealable door 21. A pass box 13 is arranged at the border between the clean room 11 and the public environment 12. The carrier conveying container 18 is conveyed from the public environment 12 side into the pass box 13, and the carrier conveying container 18 is given air blow. Then, a door 14a of the pass box 13 on the clean room 11 side is opened, the carrier conveying container 18 is conveyed into the clean room 11, and the carrier 17 is taken out of the carrier conveying container 18 or stored into the carrier conveying container 18 within the clean room 11.

公开(公告)号：JP2003115594A

公开(公告)日：2003-04-18

申请号：JP2001310560

申请日：2001-10-05

Applicant: SONY CORP ,  ST LCD KK

Inventor： TANAKA TSUTOMU ,  MANO MICHIO ,  TORIYAMA SHIGETAKA ,  FUJINO MASAHIRO ,  KOMATSU HIROSHI ,  TAKEDA HIROHISA

IPC: G02F1/1368 ,  H01L21/302 ,  H01L21/304 ,  H01L21/3065 ,  H01L21/308 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To improve the yield of a product by preventing defects in gate breakdown strength in a bottom gate type TFT. SOLUTION: The manufacturing method of a bottom gate type TFT 100A includes a step (1) of forming a gate electrode on a substrate, a step (2) of forming a gate insulating film on the gate electrode 2, a step (3) of forming a laminate made up of an protective insulating film 8 having a film thickness of 100 nm or smaller while an active-layer antecedent film (polysilicon film 7) and the protective insulating film 8 are laminated on the gate insulating film, a step (4) of implanting a dopant in an LDD region or in a source/drain region of the active-layer precursor film 8 through the protective insulating film 8, a step (5) of activating the implanted dopant and causing the other non-dopant part to be an active layer, a step (6) of modifying the quality of all or part of the protective insulating film 8, a step (7) of forming an interlayer insulating film on the modified protective insulating film 8, and a step (8) of forming a source/drain electrode on the interlayer insulating film.

公开(公告)号：JP2000183354A

公开(公告)日：2000-06-30

申请号：JP35584398

申请日：1998-12-15

Applicant: SONY CORP ,  ST LCD KK

Inventor： HAYASHI HISAO

IPC: H01L21/205 ,  C23C16/24 ,  C23C16/40 ,  H01L21/20 ,  H01L21/265 ,  H01L21/28 ,  H01L21/31 ,  H01L21/316 ,  H01L21/336 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To rationalize a manufacturing process, without deteriorating the characteristics of a bottom gate thin-film transistor. SOLUTION: For manufacturing a thin-film transistor, a gate electrode forming process for forming a gate electrode on an insulating substrate 70 is executed. A continuous film-forming process for supplying the insulating substrate 70, where the gate electrode is formed to the reaction room 12 of a film forming device, forming a gate oxide film with a chemical vapor phase growing method, and forming a semiconductor thin film by overlapping it on the gate oxide in the same reaction room 12 is executed. Then, an implanting process for selectively implanting impurities to the semiconductor thin film and forming a source area and a drain region is executed. In the continuous film-forming process, first reaction gas containing an oxygen element is introduced to the reaction room, the gate oxide film is stacked by chemical vapor phase growing, the reaction room 12 is vacuum-sucked, first reaction gas is exhausted, second reaction gas which does not contain the oxygen element is made to flow into the reaction room 12, the remainder of first reaction gas is diluted, and the semiconductor thin film is stacked with chemical vapor phase growing by using second reaction gas.

公开(公告)号：JP2000182956A

公开(公告)日：2000-06-30

申请号：JP35584298

申请日：1998-12-15

Applicant: SONY CORP ,  ST LCD KK

Inventor： KOJIMA AKIRA ,  HAYASHI HISAO

IPC: H01L21/20 ,  H01L21/268 ,  H01L21/336 ,  H01L29/786

Abstract: PROBLEM TO BE SOLVED: To provide a laser crystallization device for a semiconductor thin film which controls crystal orientation. SOLUTION: Related to a laser crystallization device, a semiconductor thin film 4 formed on a substrate 0 is irradiated with laser beam 50 while applied with a magnetic field 25, so that the semiconductor thin film 4 is melted once and crystallized in a cooling process. The laser crystallization device comprises a stage 31 on which the substrate 0 to be processed is placed, a vessel 30 where the stage 31 is housed, a laser light source 51 for generating the laser beam 50, an optical system for guiding the laser beam 50 to the substrate 0 placed on the stage 31, and a magnetic field generating device which applied the unidirectional magnetic field 25 to the entire vessel 30 where the stage 31 and at least a part of the optical system are housed. Here, the semiconductor thin film 4 is irradiated with the laser light 50 for melting once, and the crystal orientation of crystal particles contained in the semiconductor thin film 4 is aligned under the action of unidirectional magnetic field in a cooling process. A unidirectional electric field may be acted instead of magnetic field.

公开(公告)号：JP2006227105A

公开(公告)日：2006-08-31

申请号：JP2005038073

申请日：2005-02-15

Applicant: St Lcd Kk ,  エスティ・エルシーディ株式会社

Inventor： SAITO TAKASHI

IPC: G09F9/00 ,  G02F1/13

Abstract: PROBLEM TO BE SOLVED: To remove an unnecessary section while suppressing that a panel main body and a pad section are damaged, even when width of the unnecessary section to be removed from a glass substrate becomes about 1 mm. SOLUTION: An unnecessary section removing device 10 comprises; an installing section 11 capable of installing a display panel 40; and an adhesive tape supply means 12 for supplying an adhesive tape 13 so that an adhesive face may contact a facing part of the unnecessary section 45 of the display panel 40 in the state that the display panel 40 is installed on the install section 11. In a state that the adhesive tape 13 is stuck at least in a facing part of an arranging area of a temporary joint of the unnecessary section 45 of the display panel 40 installed on the install section 11, the display panel 40 is relatively moved so that the display panel 40 may be separated from the adhesive supply means 12 and thereby, the unnecessary section 45 is removed from the display panel 40 while suppressing contacting to an edge face of a second substrate 42. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：为了在抑制面板主体和焊盘部分损坏的同时去除不必要的部分，即使从玻璃基板移除的不需要部分的宽度变为约1mm。 解决方案：不必要的部分移除装置10包括： 能够安装显示面板40的安装部11; 以及粘合带供给装置12，用于在显示面板40安装在安装部分11上的状态下提供粘合带13，使得粘合面可以与显示面板40的不必要部分45的面对部分接触。 将粘合带13至少粘贴在安装在安装部11上的显示面板40的不必要部分45的临时接合部的配置区域的相对部分的状态下，显示面板40相对移动， 显示面板40可以与粘合剂供应装置12分离，从而在抑制与第二基板42的边缘接触的同时从显示面板40移除不需要的部分45.版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2005082413A

公开(公告)日：2005-03-31

申请号：JP2003313097

申请日：2003-09-04

Applicant: St Lcd Kk ,  エスティ・エルシーディ株式会社

Inventor： TOMIMOTO KENKICHI

IPC: B28D5/00 ,  C03B33/027

Abstract: PROBLEM TO BE SOLVED: To provide a scribing apparatus in which the hindrance of rotation of a blade caused by the accumulation of chips or the shortening of the life of the blade or the like are prevented.
SOLUTION: The blade 8 is pressed onto the surface of a glass plate G at a prescribed pressing force by controlling the protrusion amount of a cylinder shaft 15 by selecting air pressure to an air cylinder 14, and air is blown in the blade 8 advancing direction side to the center of the blade 8 from air blowing port 22 of a holder 7 through an air supplying tube 11 and an internal air blow passage 12, and at the same time, air is blown toward a line connecting the rotation center of the blade 8 and the contact point of the blade 8 and the glass plate G from the advancing direction side of the blade 8 though an external air blow tube 17. Under such conditions, the glass plate G is cut by horizontally moving the head main body 2.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种划线装置，其中防止了由于碎片的积聚而导致的叶片的旋转阻碍或者缩短了叶片的寿命等。 解决方案：通过通过选择气缸14的空气压力来控制气缸轴15的突出量，将叶片8以规定的压力按压在玻璃板G的表面上，并且空气吹入叶片 8前进方向侧通过供气管11和内部空气吹送通道12从保持器7的空气吹出口22向叶片8的中心延伸，并且同时向连接旋转中心的线 并且通过外部吹风管17从叶片8的前进方向侧的叶片8和玻璃板G的接触点。在这种条件下，玻璃板G通过水平移动头部主体 （C）2005，JPO＆NCIPI