公开(公告)号：KR1020110120684A

公开(公告)日：2011-11-04

申请号：KR1020100040210

申请日：2010-04-29

Applicant: (주)펨트론

Inventor： 김영대 ,  유길연 ,  안태원

IPC: H01J37/28 ,  H01J37/30 ,  H01J37/302

CPC classification number: H01J37/28 ,  H01J37/3007 ,  H01J37/302 ,  H01J2237/28

Abstract: PURPOSE: A scanning electron microscope and a control method thereof are provided to eliminate noise by focusing electronics which is accelerated by an electron gun module to a sample. CONSTITUTION: An electron gun module(10) accelerates electronics. The electron gun module is arranged on the upper side of the inside of housing. An electromagnetic lens module(20) focuses the electronics which is accelerated by the electron gun module to a sample. A detector module(30) detects a secondary electron which is generated from the sample. A controller(40) successively gets measurement data. The controller controls the electron gun module, the electromagnetic lens module, and the detector module and creates a measurement image about the sample.

Abstract translation: 目的：提供扫描电子显微镜及其控制方法以通过将由电子枪模块加速的电子器件聚焦到样品来消除噪声。 构成：电子枪模块（10）加速电子学。 电子枪模块设置在壳体内侧的上侧。 电磁透镜模块（20）将由电子枪模块加速的电子器件聚焦到样品上。 检测器模块（30）检测从样品产生的二次电子。 控制器（40）连续获得测量数据。 控制器控制电子枪模块，电磁透镜模块和检测器模块，并创建关于样品的测量图像。

公开(公告)号：KR1020110121004A

公开(公告)日：2011-11-07

申请号：KR1020100040395

申请日：2010-04-30

Applicant: (주)펨트론

Inventor： 김영대 ,  유길연 ,  안태원

IPC: H01J37/28 ,  H01J37/248 ,  H01J37/24

CPC classification number: H01J37/28 ,  H01J37/242 ,  H01J37/248

Abstract: PURPOSE: The electron gun power supply device of a scanning electron microscope is provided to prevent the dereliction of a current by secluding power source inflow to a filament according to the operation of a protection circuit. CONSTITUTION: An electron gun power supply device is floated in the secondary side of a filament and bias. A current leakage protection circuit(Q6) secludes a voltage input to the primary side of a transformer. A zener diode(D8) senses whether high voltage is generated in the secondary side of the transformer or not. A relay(K1) is switched according to the operation of the zener diode. The transformer diminishes distributed capacity between windings.

Abstract translation: 目的：提供扫描电子显微镜的电子枪供电装置，以防止根据保护电路的工作，将电源流入灯丝的电源淹没。 构成：电子枪电源装置漂浮在灯丝的二次侧和偏压。 电流泄漏保护电路（Q6）将输入到变压器的初级侧的电压分开。 齐纳二极管（D8）感测在变压器次级侧是否产生高电压。 继电器（K1）根据齐纳二极管的工作进行切换。 变压器减小绕组间的分配容量。

公开(公告)号：KR101156124B1

公开(公告)日：2012-07-03

申请号：KR1020110034045

申请日：2011-04-13

Applicant: (주)펨트론

Inventor： 김영대 ,  김재순

IPC: H01J37/06 ,  H01J37/26

Abstract: PURPOSE: An electron beam emission apparatus is provided to maintain the vacuum in a vacuum chamber by forming a high pressure passing hole on the top plate side of the vacuum chamber. CONSTITUTION: A feed-through main body(41) comprises a plurality of joint pin balls penetrating the top and bottom thereof. An extended flange unit(42) is extended from an external diameter of the feed-through main body in the outer radial direction. A main body passing hole(21) is combined with the top plate side of a vacuum chamber. A first sealing member has a flange settling unit on which the extended flange unit is settled. A top joint pin(81) is inserted into each joint pin ball from the upper side of a feed-through member(40).

Abstract translation: 目的：提供电子束发射装置，通过在真空室的顶板侧形成高压通孔，将真空保持在真空室中。 构成：馈通主体（41）包括穿过其顶部和底部的多个接头销球。 延伸的凸缘单元（42）在穿过主体的外径沿外径方向延伸。 主体通孔（21）与真空室的顶板侧组合。 第一密封构件具有凸缘沉降单元，延伸的凸缘单元在该法兰沉降单元上沉降。 顶部接头销（81）从馈通构件（40）的上侧插入每个接头销球中。