Abstract:
하기 화학식 1a로 표현되는 부분 및 하기 화학식 1b로 표현되는 부분을 가지며 양 말단에 이중 결합을 가지는 선형의 제1 실록산 수지, 그리고 3차원 망상 구조의 제2 실록산 수지를 포함하는 하이브리드 실록산 중합체를 제공한다. 또한 상기 하이브리드 실록산 중합체로부터 형성된 봉지재 및 상기 봉지재를 포함하는 전자 소자를 제공한다. [화학식 1a]
Abstract:
PURPOSE: An encapsulant is provided to lower viscosity of resin, to improve processability, and to uniformly distribute phosphors, thereby improving color uniformity and luminous efficiency. CONSTITUTION: An encapsulant comprises a first polysiloxane in chemical formula 1, a monomer in chemical formula 2a, a second polysiloxane in chemical formula 3. In chemical formula 1, the ratio of D1 to T1 is 1:1-1:10. The encapsulant has viscosity of 500-4000 cPs. The encapsulant additionally comprises a hydrosilylation catalyst and/or a phosphor. An electronic device comprises an encapsulant layer obtained by curing the encapsulant, and a luminescent part displaying color in a region of wavelength shorter than the phosphor.
Abstract:
말단에 3차 알킬옥시카르보닐기(tertiary alkyloxycarbonyl)를 가지는 실리콘계 중합체를 포함하는 반도체 캐패시터용 충전제를 제공한다. 또한 반도체 기판 위에 갭(gap)을 가지는 몰드를 형성하는 단계, 상기 반도체 기판 및 상기 몰드 위에 도전층을 형성하는 단계, 상기 갭 및 상기 도전층 위에 충전제를 도포하여 충전층을 형성하는 단계, 상기 충전층을 열처리하는 단계, 상기 충전층의 일부를 현상하여 상기 갭에 채워진 충전 패턴을 형성하는 단계, 상기 도전층의 일부를 제거하여 복수의 제1 전극으로 분리하는 단계, 상기 몰드 및 상기 충전 패턴을 제거하는 단계, 상기 제1 전극 위에 유전체층을 형성하는 단계, 그리고 상기 유전체층 위에 제2 전극을 형성하는 단계를 포함하는 반도체 캐패시터의 제조 방법을 제공한다. 여기서, 상기 충전제는 말단에 화학식 1로 표현되는 3차 알킬옥시카르보닐기(tertiary alkyloxycarbonyl)를 가지는 실리콘계 중합체를 포함한다. 반도체 캐패시터, 충전제, 현상성, 충전성, 보관 안정성
Abstract:
PURPOSE: A composition for a resist sub-layer, a method for manufacturing a semiconductor integrated circuit device using the same, and the semiconductor integrated circuit device manufactured by the same are provided to control the refractive index and the absorbance in a wavelength range which is lower than or equal to 250nm. CONSTITUTION: A composition for a resist sub-layer includes organic silane-based polycondensate and a solvent. The organic silane-based polycondensate is generated from a group represented by chemical formulas 1 or 2 under acidic catalyst and alkaline catalyst. In the chemical formulas, the R1 is halogen, hydroxyl group, alkoxy group, carboxylic group, ester group, cyano group, haloalkyl sulfite group, alkylamine group, alkylsilyl amine group, or alkylsilyloxy group. The Ar1 is substituted or non-substituted C6 to C12 arylene group. The Ar2 and the Ar3 are identical or different and substituted or non-substituted C6 to C12 aryl group. The m and the n are identical or different and are respectively 0 or the integer of 1 to 5.
Abstract translation:目的:提供一种抗蚀剂子层用组合物,使用该组合物的半导体集成电路器件的制造方法以及由其制造的半导体集成电路器件,以控制折射率和波长范围内的吸光度, 低于或等于250nm。 构成:抗蚀剂亚层的组合物包括有机硅烷基缩聚物和溶剂。 有机硅烷类缩聚物由酸式催化剂和碱性催化剂由化学式1或2表示的基团生成。 在化学式中,R1为卤素,羟基,烷氧基,羧基,酯基,氰基,卤代烷基亚硫酸酯基,烷基胺基,烷基甲硅烷基胺基或烷基甲硅烷氧基。 Ar 1是取代或未取代的C6至C12亚芳基。 Ar2和Ar3是相同或不同的取代或未取代的C6至C12芳基。 m和n相同或不同,分别为0或1〜5的整数。
Abstract:
PURPOSE: A hard mask composition for a resist underlayer film is provided to obtain excellent storage stability, to transfer a superior pattern on a material layer due to excellent hard mask properties, and to have excellent etch resistance to plasma. CONSTITUTION: A hard mask composition comprises an organic silane-based polymer and a stabilizer. The stabilizer is selected from a group which is composed of acetic anhydride, methyl acetoactate, propionic anhydride, ethyl-2-methyl acetoacetate, butyric anhydride, ethyl-2-ethyl acetoacetate, valeric anhydride, 2-methylbutyric anhydride, nonanol, decanol, undecanol, dodecanol, propylene glycol propyl ether, propylene glycol ethyl ether, propylene glycol methyl ether propylene glycol, phenyltrimethoxysilane, diphenylhexamethoxydisiloxane, diphenylhexaethoxydisiloxane, dioctyltetramethyldisiloxane, hexamethyltrisiloxane, tetramethyldisiloxane, diphenylhexaethoxydisiloxane, dioctyltetramethyldisiloxane, hexamethyltrisiloxane, tetramethyldisiloxane, decamethyltetrasiloxane, dodecamethylpentasiloxane, and hexamethyldisiloxane.
Abstract:
A hard mask composition for a photoresist under layer, and a method for preparing a semiconductor integrated circuit device by using the composition are provided to improve film characteristics and storage stability and to enhance the solvent resistance against a resist developer. A hard mask composition for a photoresist under layer comprises a silane condensate which is a condensation polymer of the hydrolyzate formed from at least one compound represented by the formula 1; an ammonium salt; and a solvent, wherein R1 is H, a substituted or unsubstituted C1-C30 aliphatic hydrocarbon group, a substituted or unsubstituted C1-C30 aromatic hydrocarbon group, a substituted or unsubstituted C1-C30 alicyclic hydrocarbon group, a substituted or unsubstituted C1-C30 silyl group, a substituted or unsubstituted C1-C30 allyl group, a substituted or unsubstituted C1-C30 acyl group, a vinyl group, an amine group, an acetate group, or an alkali metal; x is 0-2; and R2 is H, a substituted or unsubstituted C1-C4 aliphatic hydrocarbon group, an acetate group, Na, or K.
Abstract:
The present invention relates to a curable polysiloxane composition for an optical device, an encapsulant obtained by curing the same, and an optical device including the encapsulant. The curable polysiloxane composition includes: at least one kind of a first polysiloxane compound presented by chemical formula 1; at least one kind of a second polysiloxane compound having hydrogen bound to silicon (Si-H) on an end thereof; and at least one kind of a third polysiloxane compound having an alkenyl group bound to silicon on an end thereof. [Chemical formula 1] (R^1R^2R^3SiO_1/2)_M1(R^4R^5SiO_2/2)_D1(R^6R^7SiO_2/2)_D2(R^8SiO_2/_2-Y^1-SiO_2/_2R^9)_D3(R^10SiO_3/_2)_T1(R^11SiO_3/_2)_T2(R^12SiO_3/_2)_T3(SiO_3/_2-Y^2-SiO_3/_2)_T4(SiO_4/_2)_Q1.
Abstract:
본 발명에서는 하기 화학식 1로 표시되는 구조단위 10 내지 40 몰%를 포함하는 유기실란계 축중합물 및 용매를 포함하는 레지스트 하층막용 조성물이 제공된다. [화학식 1]
상기 화학식 1에서 ORG의 정의는 명세서에 기재한 바와 같다. 이로써, 본 발명은 저장안정성 및 내에칭성이 우수한 레지스트 하층막을 제공하여 우수한 패턴을 전사할 수 있는 레지스트 하층막용 조성물 및 이를 이용한 반도체 집적회로 디바이스의 제조방법을 제공할 수 있다. 레지스트 하층막, 유기실란계 축중합물, 저장안정성, 내에칭성