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公开(公告)号：KR1020130109391A
公开(公告)日：2013-10-08
申请号：KR1020120031089
申请日：2012-03-27
Applicant: 한국과학기술원
CPC classification number: C23C16/409 , B82B3/0038 , B82Y40/00 , C23C16/407
Abstract: PURPOSE: A manufacturing apparatus of a ferroelectric nanostructure is provided to synthesize a ferroelectric material at a desired temperature, and to decrease the synthesize temperature of the ferroelectric material. CONSTITUTION: A manufacturing apparatus of a ferroelectric nanostructure includes a tube type furnace (100), a gas inlet (10), a material powder supplier (20), a starting material supplier (30), and an outlet (40). The gas inlet is for inserting inert gas into the tube type furnace. The material powder supplier supplies material powder into the tube type furnace. The supply point of the material powder is maintained at the evaporation temperature of the material powder. The starting material supplier supplies a starting material. The starting material reacts with the evaporated material powder, to be synthesized into a ferroelectric nanostructure. The evaporated material powder flows by the flow of the inert gas flowing toward an exit of the tube type furnace. The starting material has a form selected from a nanotube, a nanowire, a nanorod, or a simple thin film. The outlet discharges the inert gas. [Reference numerals] (AA) Cylindrical furnace; (BB) Temperature gradient in furnace; (CC) Position
Abstract translation: 目的：提供铁电体纳米结构的制造装置，以在期望的温度下合成铁电材料，并降低铁电材料的合成温度。 构成：铁电体纳米结构的制造装置包括管式炉（100），气体入口（10），材料粉末供应器（20），起始材料供应器（30）和出口（40）。 气体入口用于将惰性气体插入管式炉中。 材料粉末供应商将材料粉末供应到管式炉中。 材料粉末的供应点保持在材料粉末的蒸发温度。 起始原料供应商提供原料。 起始材料与蒸发的材料粉末反应，合成为铁电纳米结构。 蒸发的材料粉末通过流向管式炉的出口的惰性气体流动。 原料具有选自纳米管，纳米线，纳米棒或简单薄膜的形式。 出口排出惰性气体。 （附图标记）（AA）圆柱形炉; （BB）炉内温度梯度; （CC）职位
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公开(公告)号：KR101212958B1
公开(公告)日：2012-12-18
申请号：KR1020110035742
申请日：2011-04-18
Applicant: 한국과학기술원
Abstract: 본발명은탄성력또는탄력을가지는나선형중심전극(Core Electrode)에강유전성중합체(Ferroelectric Polymer)층및 표면전극이형성된압전소자를이용한에너지수확시스템및 그제조방법에관한것으로, 탄성력또는탄력을가지는나선형의중심전극(Core Electrode), 중심전극(Core Electrode)의표면에선택적으로형성된강유전성중합체(Ferroelectric Polymer)층의표면에형성된표면전극(Surface Electrode)을포함하고, 제조방법으로도전성중심전극을준비하는단계, 중심전극의표면에딥 코팅(Dip Coating) 방식에의해선택적으로강유전성중합체(Ferroelectric Polymer)층을형성하는단계, 강유전성중합체(Ferroelectric Polymer)층이형성된상기중심전극을건조및 열처리하는단계, 강유전성중합체(Ferroelectric Polymer)층표면에표면전극을형성하여압전소자를생성하는단계및 고전압폴링공정으로상기압전소자내부의영구이중극자(Permanent Dipole)를단방향으로정렬시키는단계를포함한다.
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公开(公告)号：KR101453494B1
公开(公告)日：2014-10-27
申请号：KR1020120106371
申请日：2012-09-25
Applicant: 한국과학기술원
IPC: H01L41/45
Abstract: 본 발명은 압전 고분자 코어-쉘 구조체 및 그의 제조방법에 관한 것으로, 보다 상세하게는 폴리우레탄 아크릴레이트 필러 위에 전도성 폴리머 용액을 증착하여 전극을 제조하고, 상기 전극 위에 압전 고분자 P(VDF-TrFE) 용액을 증착하는 압전 고분자 코어-쉘 구조체를 제조하는 방법에 관한 것이다. 본 발명의 실시예에 의하면 하나의 몰드를 통해 폴리우레탄 아크릴레이트 필러를 여러번 복제할 수 있다는 점에서 제조단가를 낮출 수 있으며 대면적 공정이 가능하다. 또한, 수직 정렬된 나노 구조체 및 마이크로 구조체를 제조함으로써 압전센서와 이를 이용한 에너지 하베스터 뿐만 아니라 비휘발성 메모리소자 및 바이오소자 등의 다양한 분야에 적용 가능하다.
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公开(公告)号：KR1020140039750A
公开(公告)日：2014-04-02
申请号：KR1020120106371
申请日：2012-09-25
Applicant: 한국과학기술원
IPC: H01L41/45
CPC classification number: H01L41/45 , H01L41/193 , H01L41/317 , H01L41/332
Abstract: The present invention relates to a method for manufacturing a piezoelectric polymer core-shell structure and, more specifically, to a method for manufacturing a piezoelectric polymer core-shell structure, by manufacturing an electrode by depositing a conductive polymer solution on polyurethane acrylate pillars, and depositing a piezoelectric polymer P(VDE-TrFE) solution on the electrode. By an embodiment of the present invention, the method can reduce manufacturing costs and can perform a large area process by being able to copy the polyurethane acrylate pillars several times through one mold. Also, the method of the present invention can be applied in various fields such as not only a piezoelectric device and an energy harvest using the same, but also a nonvolatile memory device and a bio device by manufacturing a vertically aligned nanostructure and a vertically aligned micro structure. [Reference numerals] (AA) Electrode
Abstract translation: 本发明涉及一种制造压电聚合物核 - 壳结构的方法，更具体地说，涉及通过在聚氨酯丙烯酸酯柱上沉积导电聚合物溶液来制造电极的压电聚合物芯 - 壳结构的制造方法，以及 在电极上沉积压电聚合物P（VDE-TrFE）溶液。 通过本发明的一个实施方案，该方法可以降低制造成本，并且可以通过一次模具将聚氨酯丙烯酸酯柱多次复制来进行大面积的加工。 此外，本发明的方法也可以应用于各种领域，例如不仅压电器件和使用其的能量收集，还可以应用非易失性存储器件和生物器件，通过制造垂直排列的纳米结构和垂直排列的微结构 结构体。 （标号）（AA）电极
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公开(公告)号：KR1020120118269A
公开(公告)日：2012-10-26
申请号：KR1020110035742
申请日：2011-04-18
Applicant: 한국과학기술원
CPC classification number: H01L41/0472 , H01L41/193 , H01L41/293 , H01L41/331 , H02N2/18
Abstract: PURPOSE: An energy gaining system and a manufacturing method thereof are provided to convert external pressure or mechanical vibration into an electric energy. CONSTITUTION: A conductive spiral core electrode(401) has elastic force or elasticity. A ferroelectric polymer layer(402) is selectively formed on a surface of a center electrode. A surface electrode(403) is formed on a surface of the ferroelectric polymer layer. The center electrode includes Fe, Ni, Cr, Ti, Mo, Ag, Au, Al, Cu, W, or TiN.
Abstract translation: 目的：提供能量获取系统及其制造方法，以将外部压力或机械振动转换为电能。 构成：导电螺旋芯电极（401）具有弹性力或弹性。 在中心电极的表面上选择性地形成铁电聚合物层（402）。 表面电极（403）形成在铁电聚合物层的表面上。 中心电极包括Fe，Ni，Cr，Ti，Mo，Ag，Au，Al，Cu，W或TiN。
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Patent Agency Ranking
公开(公告)号：KR1020120105951A
公开(公告)日：2012-09-26
申请号：KR1020110023698
申请日：2011-03-17
Applicant: 한국과학기술원
Abstract: PURPOSE: A ferroelectric polymer nano-dot device and a dewetting process for the manufacturing thereof are provided to have uniform size and density and to be uniformly patterned. CONSTITUTION: A ferroelectric polymer nano-dot device(200) comprises a substrate(101), a lower electrode(102) and P(VDF-TrFE) nano-dots(201). The substrate is composed of insulating materials. The lower electrode is formed on an upper surface of the substrate. The P(VDF-TrFE) nano-dot is formed on the upper surface of the lower electrode in an anti-glare structure and is composed of P(VDF-TrFE) polymers. The ferroelectric polymer nano-dot device additionally includes an upper electrode(104) on the surface of the nano-dot. A dewetting process for manufacturing ferroelectric Polymer nano-dot device comprises the following steps: preparing a substrate; forming a lower electrode on the upper surface of the substrate; obtaining a P (VDF-TrFE) polymer solution; spreading the upper surface of the lower electrode with the P (VDF-TrFE) polymer solution; and obtaining the P (VDF-TrFE) nano-dot through an annealing process.
Abstract translation: 目的：提供铁电聚合物纳米点装置和其制造的去湿方法以具有均匀的尺寸和密度并且被均匀地构图。 构成：铁电聚合物纳米点装置（200）包括基板（101），下电极（102）和P（VDF-TrFE）纳米点（201）。 基板由绝缘材料构成。 下电极形成在基板的上表面上。 P（VDF-TrFE）纳米点以防眩光结构形成在下电极的上表面上，由P（VDF-TrFE）聚合物构成。 铁电聚合物纳米点装置还包括在纳米点的表面上的上电极（104）。 用于制造铁电聚合物纳米点装置的去湿方法包括以下步骤：制备基材; 在所述基板的上表面上形成下电极; 获得P（VDF-TrFE）聚合物溶液; 用P（VDF-TrFE）聚合物溶液撒布下电极的上表面; 并通过退火工艺获得P（VDF-TrFE）纳米点。
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7.发明授权아세트산납이 내부에 충진된 이산화티탄 나노튜브, 이산화티탄 나노튜브 내부에 아세트산납을 충진하는 방법 및 강유전체 나노튜브 소자 제조방법 有权用乙酸铅填充二氧化钛纳米管，用铅酸铅填充二氧化钛纳米管的方法和制造铁电纳米管阵列的方法
公开(公告)号：KR101343467B1
公开(公告)日：2013-12-19
申请号：KR1020110086590
申请日：2011-08-29
Applicant: 한국과학기술원
Abstract: 본발명은아세트산납이내부에충진된 TiO나노튜브, TiO나노튜브내부에아세트산납을충진하는방법및 강유전체나노튜브소자제조방법에관한것으로, 자기정렬된 TiO나노튜브를아세트산납용액에침지또는아세트산납용액드롭후 진공챔버내에서건조시키는방법에의해 TiO나노튜브내부에아세트산납(lead acetate)을손쉽게채워넣음으로써, 강유전체물질인 PbTiO나노튜브를용이하게합성할수 있는효과가있다.
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8.发明公开아세트산납이 내부에 충진된 이산화티탄 나노튜브, 이산화티탄 나노튜브 내부에 아세트산납을 충진하는 방법 및 강유전체 나노튜브 소자 제조방법 有权用铅酸乙酯填充的TIO2纳米管，用铅填充TIO2纳米管的方法和制造电磁纳米管阵列的方法
公开(公告)号：KR1020130023657A
公开(公告)日：2013-03-08
申请号：KR1020110086590
申请日：2011-08-29
Applicant: 한국과학기술원
CPC classification number: B82B3/0038 , B82Y40/00 , C01G23/047 , C01P2004/13
Abstract: PURPOSE: A method to fill lead acetate in a titanium dioxide(TiO2) nanotube is provided to easily fill the lead acetate into the TiO2 nanotube by immersing the TiO2 nanotube which is self-aligned into a lead acetate solution, or by dropping the lead acetate solution on the TiO2 nanotube. CONSTITUTION: A TiO2 nanotube(300) filled with lead acetate inside is composed of the TiO2 nanotube and the lead acetate. The TiO2 nanotube grows vertically by being anodized on a titanium(Ti) sheet(110). A lead acetate filling method includes a step of dropping a lead acetate solution on the TiO2 nanotube, and drying the TiO2 nanotube. A ferroelectric nanotube element manufacturing method includes following steps; the anodized TiO2 nanotube is prepared; the lead acetate is filled in the TiO2 nanotube; and a lead titanate nanotube is formed by depositing PbO on the TiO2 nanotube filled with the lead acetate.
Abstract translation: 目的：提供一种填充二氧化钛（TiO2）纳米管中的乙酸铅的方法，通过将自对准的TiO 2纳米管浸入乙酸铅溶液中，或通过滴加乙酸铅，轻松将乙酸铅填充到TiO2纳米管中 溶液在TiO2纳米管上。 构成：填充有醋酸铅的TiO2纳米管（300）由TiO2纳米管和乙酸铅组成。 通过在钛（Ti）片（110）上阳极氧化，TiO 2纳米管垂直生长。 醋酸铅填充方法包括将乙酸铅溶液滴加到TiO 2纳米管上并干燥TiO 2纳米管的步骤。 铁电纳米管元件的制造方法包括以下步骤： 制备阳极氧化TiO2纳米管; 醋酸铅填充在TiO2纳米管中; 并且通过在填充有乙酸铅的TiO 2纳米管上沉积PbO来形成钛酸铅纳米管。
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公开(公告)号：KR1020120102254A
公开(公告)日：2012-09-18
申请号：KR1020110020274
申请日：2011-03-08
Applicant: 한국과학기술원
IPC: B82B3/00 , B82B1/00 , C08F214/18
CPC classification number: B82B3/0038 , B82B1/008 , B82Y40/00
Abstract: PURPOSE: A ferroelectric polymer nano-rod using immersion crystallization and a manufacturing method thereof are provided to obtain firm nano-rod by uniform heat transmission within a solution. CONSTITUTION: A ferroelectric polymer nano-rod using immersion crystallization comprises a P (VDF-TrFE) nano-rod, an upper electrode and a bottom electrode. The upper electrode is vertically formed on the surface of the P (VDF-TrFE) nanorod. The bottom electrode is formed at the lower part of the P (VDF-TrFE) nano-rod. A manufacturing method of the ferroelectric Polymer nano-rods using an immersion method crystallization comprises the following steps: preparing a porous template(100); coating the porous template with a P (VDF-TrFE) solution(101); transmitting the porous template to a vacuum chamber(102); inducing crystallization while separating dried P(VDF-TrFE) nano-structures from the porous template by vertically soaking along the porous template; and obtaining P (VDF-TrFE) nano-rods(106) by washing and drying the separated P (VDF-TrFE) nano-structure.
Abstract translation: 目的：提供一种使用浸渍结晶的铁电聚合物纳米棒及其制造方法，以通过溶液内的均匀传热获得牢固的纳米棒。 构成：使用浸渍结晶的铁电聚合物纳米棒包括P（VDF-TrFE）纳米棒，上电极和底电极。 上电极垂直形成在P（VDF-TrFE）纳米棒的表面上。 底部电极形成在P（VDF-TrFE）纳米棒的下部。 使用浸渍法结晶的铁电聚合物纳米棒的制造方法包括以下步骤：制备多孔模板（100）; 用P（VDF-TrFE）溶液（101）涂覆多孔模板; 将多孔模板传输到真空室（102）; 通过沿着多孔模板垂直浸泡从多孔模板分离干燥的P（VDF-TrFE）纳米结构; 并通过洗涤和干燥分离的P（VDF-TrFE）纳米结构获得P（VDF-TrFE）纳米棒（106）。
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公开(公告)号：KR101276560B1
公开(公告)日：2013-06-24
申请号：KR1020110023698
申请日：2011-03-17
Applicant: 한국과학기술원
Abstract: 본 발명은 강유전체 폴리머(Ferroelectric Polymer)인 P(VDF-TrFE)로 이루어져, 소자의 특성을 개선시킨 강유전체 폴리머 나노도트 소자 및 그 제조를 위한 디웨팅 프로세스(Dewetting Process)에 관한 것으로, 강유전체 폴리머 나노도트 소자는 절연물질로 이루어진 기판, 기판 상면에 형성된 하부 전극, 하부 전극 상면의 일부 영역에 요철 구조로 형성되고, P(VDF-TrFE)로 이루어진 P(VDF-TrFE) 나노도트 및 P(VDF-TrFE) 나노도트 상면에 형성된 상부 전극을 포함하는 것을 특징으로 한다.
나아가, 본 발명에 따른 강유전체 폴리머 나노도트 소자 제조를 위한 디웨팅 프로세스(Dewetting process)는 기판을 준비하는 단계, 기판 상면에 하부 전극을 형성하는 단계, P(VDF-TrFE) 폴리머 용액을 획득하는 단계, 하부 전극 상면에 P(VDF-TrFE) 폴리머 용액을 도포하는 단계, 어닐링(Annealing) 공정으로 P(VDF-TrFE) 나노도트를 획득하는 단계 및 P(VDF-TrFE) 나노도트 표면에 상부 전극을 형성하는 단계를 포함하는 것을 특징으로 한다.
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