公开(公告)号：NL1036769A1

公开(公告)日：2009-10-26

申请号：NL1036769

申请日：2009-03-25

Applicant: ASML NETHERLANDS BV

Inventor： SCACCABAROZZI LUIGI ,  IVANOV VLADIMIR VITALEVICH ,  KOSHELEV KONSTANTIN NIKOLAEVICH ,  MOORS JOHANNES HUBERTUS JOSEPH ,  STEVENS LUCAS HENRICUS JOHANNE ,  ANTSIFEROV PAVEL STANISLAVOVICH ,  KRIVTSUN VLADIMIR MIHAILOVITCH ,  DOROKHIN LEONID ALEXANDROVICH ,  KAMPEN MAARTEN VAN

IPC: G03F7/20

公开(公告)号：NL1035743A1

公开(公告)日：2009-02-10

申请号：NL1035743

申请日：2008-07-23

Applicant: ASML NETHERLANDS BV

Inventor： IVANOV VLADIMIR VITALEVICH ,  BANINE VADIM YEVGENYEVICH ,  BLEEKER ARNO JAN ,  KOSHELEV KONSTANTIN NIKOLAEVICH ,  ANTSIFEROV PAVEL STANISLAVOVICH ,  KRIVTSUN VLADIMIR MIHAILOVITCH ,  LOPAEV DMITRIY VICTOROVICH

IPC: H01L21/027 ,  G03F7/20