公开(公告)号：NL2007501A

公开(公告)日：2013-04-02

申请号：NL2007501

申请日：2011-09-29

Applicant: ASML NETHERLANDS BV

Inventor： HOL SVEN ANTOIN JOHAN ,  AANGENENT WOUTER ,  CLIJSEN GEORGE ,  AKKERMANS JOHANNES ,  VEER JACOB KORNELIS ,  BOEIJ JEROEN ,  VERMEULEN JOHANNES

IPC: G03F7/20 ,  G03F9/00 ,  H01L21/68

公开(公告)号：NL2006699A

公开(公告)日：2011-12-06

申请号：NL2006699

申请日：2011-05-02

Applicant: ASML NETHERLANDS BV

Inventor： AKKERMANS JOHANNES ,  CADEE THEODORUS ,  CLIJSEN GEORGE

IPC: G03F7/20 ,  H01L21/68

Abstract: A stage apparatus to position an object, the stage apparatus including a table configured to hold the object, a support structure configured to support the table, the table being displaceable relative to the support structure, the support structure including one of a first data clock and a second data clock and the table including the other one of the first data clock and the second data clock; and a circuit configured to synchronize the first and second data clocks, the circuit including a transmitter and receiver, the transmitter configured to wirelessly transmit clock signal data from the first data clock to the second data clock, and a synchronization circuit configured to synchronize the second data clock with the first data clock from the wirelessly transmitted clock signal data received by the receiver.