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    LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD
    1.
    发明申请
    LITHOGRAPHIC PROJECTION APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    LITHOGRAPHIC投影设备和设备制造方法

    公开(公告)号：WO2010121844A8

    公开(公告)日：2011-11-10

    申请号：PCT/EP2010051017

    申请日：2010-01-28

    Applicant: ASML NETHERLANDS BV ,  DAMEN JOHANNES ,  VAN DUIVENBODE JEROEN ,  VAN HOUT HARM

    Inventor： DAMEN JOHANNES ,  VAN DUIVENBODE JEROEN ,  VAN HOUT HARM

    IPC: H01R13/03

    CPC classification number: H01R13/53 ,  G03F7/70708 ,  G03F7/70991

    Abstract: An electrical connector suitable, for example, for connecting high voltage carrying cables in a low pressure environment comprises a housing having a conducting surface and a plurality of cable insertion parts, each cable insertion part comprising an electrical conductor configured to connect to an electrical cable and an insulating sleeve surrounding the electrical conductor, wherein the housing surrounds the plurality of cable insertion parts.

    Abstract translation: 适合于例如用于在低压环境中连接高压承载电缆的电连接器包括具有导电表面和多个电缆插入部分的壳体，每个电缆插入部分包括被配置为连接到电缆的电导体和 围绕所述电导体的绝缘套管，其中所述壳体围绕所述多个电缆插入部分。

    ELECTRICAL CONNECTION SYSTEM, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND METHOD FOR MANUFACTURING AN ELECTRICAL CONNECTION SYSTEM.
    7.
    发明专利
    ELECTRICAL CONNECTION SYSTEM, LITHOGRAPHIC PROJECTION APPARATUS, DEVICE MANUFACTURING METHOD AND METHOD FOR MANUFACTURING AN ELECTRICAL CONNECTION SYSTEM. 未知

    公开(公告)号：NL2004924A

    公开(公告)日：2010-12-27

    申请号：NL2004924

    申请日：2010-06-21

    Applicant: ASML NETHERLANDS BV

    Inventor： DAMEN JOHANNES

    IPC: G03F7/20

    Abstract: An electrical connection system is disclosed. The electrical connection system comprises a housing, an elongate conductor and a flexible planar electrical connector. The housing comprises a front plate having a conducting surface and a back plate having a conducting surface. The elongate conductor extends through the front plate. The flexible planar electrical connector comprises a laminate that comprises, in order, a first flexible planar insulating layer, a conductor configured to carry an electrical current and a second flexible planar insulating layer. The flexible planar electrical connector is sandwiched by and extends beyond the front plate and the back plate. The elongate conductor is electrically connected to the conductor of the planar connector.

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