公开(公告)号：DE60020638D1

公开(公告)日：2005-07-14

申请号：DE60020638

申请日：2000-04-14

Applicant: ASML NETHERLANDS BV

Inventor： SEGERS HUBERT MARIE ,  BOON RUDOLF MARIA ,  BIJNAGTE ANTON ADRIAAN ,  JACOBS FRANCISCUS MATHIJS

IPC: G03F1/14 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: A pre-aligner receives wafers from a wafer carrier or process track and performs preparatory steps such as centering of the wafer. The prepared wafer is transferred to the wafer table using a robot arm that is isolated from the pre-aligner and the wafer table. The robot arm couples to the pre-aligner to pick up the wafer, decouples, couples to the wafer table and deposits the wafer. Positional accuracy of the wafer is thereby maintained during the transfer.

公开(公告)号：DE60020638T2

公开(公告)日：2006-05-04

申请号：DE60020638

申请日：2000-04-14

Applicant: ASML NETHERLANDS BV

Inventor： SEGERS HUBERT MARIE ,  BOON RUDOLF MARIA ,  BIJNAGTE ANTON ADRIAAN ,  JACOBS FRANCISCUS MATHIJS

IPC: G03F1/14 ,  G03F7/20 ,  H01L21/027 ,  H01L21/68

Abstract: A pre-aligner receives wafers from a wafer carrier or process track and performs preparatory steps such as centering of the wafer. The prepared wafer is transferred to the wafer table using a robot arm that is isolated from the pre-aligner and the wafer table. The robot arm couples to the pre-aligner to pick up the wafer, decouples, couples to the wafer table and deposits the wafer. Positional accuracy of the wafer is thereby maintained during the transfer.

公开(公告)号：NL1036186A1

公开(公告)日：2009-06-04

申请号：NL1036186

申请日：2008-11-12

Applicant: ASML NETHERLANDS BV

Inventor： KROONEN ROGER JOHANNES MARIA HUBERTUS ,  CORNELISSEN SEBASTIAAN MARIA JOHANNES ,  DONDERS SJOERD NICOLAAS LAMBER ,  KATE NICOLAAS TEN ,  HAM RONALD VAN DER ,  ROSET NIEK JACOBUS JOHANNES ,  JACOBS FRANCISCUS MATHIJS ,  RIEPEN MICHEL ,  JANSSEN GERARDUS ARNOLDUS HENDRICUS FRANCISCUS ,  ROOS REINDER WIETSE ,  HOGELAND MATTIJS

IPC: G03F7/20 ,  H01L21/027